JP6669795B2 - 走査型電子顕微鏡および検査装置 - Google Patents
走査型電子顕微鏡および検査装置 Download PDFInfo
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Description
(b):O157の写真(画像)とその特徴
(c):エボラウイルスの写真(画像)とその特徴
(d):大腸菌の写真(画像)とその特徴
(e):インフルエンザウイルスの写真(画像)とその特徴
(f):ラッサウイルスの写真(画像)とその特徴
(g):コレラ菌の写真(画像)とその特徴
(h):破傷風の写真(画像)とその特徴
(i):HVウイルスの写真(画像)とその特徴
2:電子ビーム
3:ブランキング装置
4:ブランキングアパチャー
5:コンデンサレンズ
6:対物アパチャー
7:偏向装置
8:電子検出装置
9:EDX
10:隔膜
11:対物レンズ
12:可変シール
13、25:近接センサ
131:スイッチ
14、141:可変シール室
142:真空ヘッド
15:試料
151:XYステージ
152:距離測定手段
153:支持台座
154:支持支柱
155:支持板
156、158:摺動面
16,17:電磁弁
18:真空ポンプ
21:鏡筒
210:ロール(測定試料)
211:エアーベアリング
212:間隙(エアーギャップ)
213:回転軸
214:回転制御装置
215:台
216:軸方向移動装置
217:支持部
218:真空ポンプ
220:距離測定装置
23:加圧ポンプ
24:浮上ヘッド
25:センサ(近接センサ)
41:PC
42:データベース
43:データマイニングエンジン
Claims (5)
- 電子銃、電子ビーム走査手段、検出器を真空封じ切りにした鏡筒と対物レンズと可変シールと画像生成手段を有し、真空封じ切りにした鏡筒で発生させた電子ビームは隔膜を通じて取り出し、鏡筒に接続した該対物レンズで細く絞って、大気中に配置された試料の表面の任意の一部分あるいは全部を覆って大気との分離を行って真空排気する、対物レンズと試料との間にあって該試料に押し付けて薄膜と該試料との間に微小空間を形成する収縮自在の可変シール、の内にある該試料の表面の走査を行い、発生した2次電子、反射電子あるいは発生したX線を検出、あるいは試料に流れる電流を検出して画像を生成する
ことを特徴とする走査型電子顕微鏡。 - 前記対物レンズの電子ビームの入射側と前記試料との間であって、前記鏡筒に接続する対物レンズの電子ビームの入射側あるいは出射側あるいは該対物レンズ内に配置して、該鏡筒を真空封じ切りにする隔膜と、
前記大気中に配置された試料の表面の画像生成対象となる任意の一部分あるいは全部を覆って大気との分離を行う、前記対物レンズの出射側の該対物レンズの先端部と該試料の表面の画像生成対象となる任意の一部分あるいは全部をシールする収縮自在の可変シールと、
前記対物レンズの出射側の該対物レンズの先端部と該試料の表面の画像生成対象となる一部分あるいは全部とからなる可変シール内の空間、および該可変シールが接する対物レンズの電子ビームの出射側の先端部と該対物レンズの電子ビームの入射側あるいは出射側あるいは該対物レンズ内に配置した隔膜との間の空間からなる狭い空間を、測定時あるいは観察時に、目的とする真空度に真空排気する真空排気手段と
を備えたことを特徴とする請求項1に記載の走査型電子顕微鏡。 - 前記対物レンズを、永久磁石を用いた対物レンズとしたことを特徴とする請求項1から請求項2のいずれかに記載の走査型電子顕微鏡。
- 前記真空封じきりした鏡筒は、内蔵した真空ポンプが必要に応じて真空排気して真空を回復させることを特徴とする請求項1から請求項3のいずれかに記載の走査型電子顕微鏡。
- 請求項1から請求項4で取得された画像と、病原菌、ウィルスなどを含む微小生物の画像を予め登録したデータベースとを比較して微小生物の種別を抽出することを特徴とする走査型電子顕微鏡を用いた検査装置。
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JP6898955B2 (ja) * | 2019-01-29 | 2021-07-07 | ケーディーアイコンズ株式会社 | 情報処理装置 |
KR102344698B1 (ko) * | 2019-03-25 | 2021-12-29 | (주)코셈 | 주사 전자 현미경의 착탈 가능한 컬럼 유닛, 및 그 제공방법 |
KR102198707B1 (ko) | 2019-03-25 | 2021-01-05 | (주)코셈 | 착탈 가능한 컬럼을 구비하는 주사 전자 현미경 및, 이를 이용한 영상 획득 방법 |
KR102552225B1 (ko) * | 2020-02-04 | 2023-07-06 | (주)새론테크놀로지 | 주사 전자 현미경 |
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JPS5056283A (ja) * | 1973-09-14 | 1975-05-16 | ||
JPS5676152A (en) * | 1979-11-26 | 1981-06-23 | Mitsubishi Heavy Ind Ltd | Scanning electron microscope |
JPS60136048U (ja) * | 1984-12-27 | 1985-09-10 | 三菱重工業株式会社 | 走査電子顕微鏡装置 |
JP2003217500A (ja) * | 2002-01-21 | 2003-07-31 | Sony Corp | 走査型電子顕微鏡を用いた検査装置 |
JP2003234080A (ja) * | 2002-02-06 | 2003-08-22 | Canon Inc | 電子線照射装置 |
JP2003346697A (ja) * | 2002-05-24 | 2003-12-05 | Technex Lab Co Ltd | 永久磁石レンズを使用した走査電子顕微鏡 |
JP2004031207A (ja) * | 2002-06-27 | 2004-01-29 | Canon Inc | 電子線照射装置および走査型電子顕微鏡装置 |
JP4154300B2 (ja) * | 2003-09-08 | 2008-09-24 | 株式会社日立ハイテクノロジーズ | 透過電子顕微鏡システムおよびそれを用いた検査方法 |
JP2007003352A (ja) * | 2005-06-23 | 2007-01-11 | Sony Corp | ポリシリコン膜の結晶状態検査装置、これを用いたポリシリコン膜の結晶状態検査方法及び薄膜トランジスタの製造システム |
JP2007188821A (ja) * | 2006-01-16 | 2007-07-26 | Univ Osaka Sangyo | ハンディ電子顕微鏡 |
JP4795847B2 (ja) * | 2006-05-17 | 2011-10-19 | 株式会社日立ハイテクノロジーズ | 電子レンズ及びそれを用いた荷電粒子線装置 |
JP2008262886A (ja) * | 2007-04-12 | 2008-10-30 | Beam Seiko:Kk | 走査型電子顕微鏡装置 |
JP5253800B2 (ja) * | 2007-12-26 | 2013-07-31 | 日本電子株式会社 | 試料保持体及び観察・検査方法並びに観察・検査装置 |
JP5259688B2 (ja) * | 2010-12-09 | 2013-08-07 | 本田技研工業株式会社 | 走査型電子顕微鏡 |
JP6309195B2 (ja) * | 2013-02-18 | 2018-04-11 | 株式会社ホロン | 走査型電子顕微鏡および検査装置 |
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