JPS63136730U - - Google Patents

Info

Publication number
JPS63136730U
JPS63136730U JP2930587U JP2930587U JPS63136730U JP S63136730 U JPS63136730 U JP S63136730U JP 2930587 U JP2930587 U JP 2930587U JP 2930587 U JP2930587 U JP 2930587U JP S63136730 U JPS63136730 U JP S63136730U
Authority
JP
Japan
Prior art keywords
diameter bellows
small
sealing ring
vacuum processing
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2930587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0422826Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2930587U priority Critical patent/JPH0422826Y2/ja
Publication of JPS63136730U publication Critical patent/JPS63136730U/ja
Application granted granted Critical
Publication of JPH0422826Y2 publication Critical patent/JPH0422826Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Diaphragms And Bellows (AREA)
  • Sealing Devices (AREA)
  • Physical Vapour Deposition (AREA)
JP2930587U 1987-02-26 1987-02-26 Expired JPH0422826Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2930587U JPH0422826Y2 (enrdf_load_stackoverflow) 1987-02-26 1987-02-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2930587U JPH0422826Y2 (enrdf_load_stackoverflow) 1987-02-26 1987-02-26

Publications (2)

Publication Number Publication Date
JPS63136730U true JPS63136730U (enrdf_load_stackoverflow) 1988-09-08
JPH0422826Y2 JPH0422826Y2 (enrdf_load_stackoverflow) 1992-05-26

Family

ID=30833072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2930587U Expired JPH0422826Y2 (enrdf_load_stackoverflow) 1987-02-26 1987-02-26

Country Status (1)

Country Link
JP (1) JPH0422826Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006281085A (ja) * 2005-03-31 2006-10-19 Hitachi Eng Co Ltd 往復動機構を備えた真空装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006281085A (ja) * 2005-03-31 2006-10-19 Hitachi Eng Co Ltd 往復動機構を備えた真空装置

Also Published As

Publication number Publication date
JPH0422826Y2 (enrdf_load_stackoverflow) 1992-05-26

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