JPS63153538U - - Google Patents

Info

Publication number
JPS63153538U
JPS63153538U JP4849087U JP4849087U JPS63153538U JP S63153538 U JPS63153538 U JP S63153538U JP 4849087 U JP4849087 U JP 4849087U JP 4849087 U JP4849087 U JP 4849087U JP S63153538 U JPS63153538 U JP S63153538U
Authority
JP
Japan
Prior art keywords
electrostatic adsorption
rotation axis
adsorption part
lead wire
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4849087U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0528774Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4849087U priority Critical patent/JPH0528774Y2/ja
Publication of JPS63153538U publication Critical patent/JPS63153538U/ja
Application granted granted Critical
Publication of JPH0528774Y2 publication Critical patent/JPH0528774Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Jigs For Machine Tools (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP4849087U 1987-03-30 1987-03-30 Expired - Lifetime JPH0528774Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4849087U JPH0528774Y2 (enrdf_load_stackoverflow) 1987-03-30 1987-03-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4849087U JPH0528774Y2 (enrdf_load_stackoverflow) 1987-03-30 1987-03-30

Publications (2)

Publication Number Publication Date
JPS63153538U true JPS63153538U (enrdf_load_stackoverflow) 1988-10-07
JPH0528774Y2 JPH0528774Y2 (enrdf_load_stackoverflow) 1993-07-23

Family

ID=30870067

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4849087U Expired - Lifetime JPH0528774Y2 (enrdf_load_stackoverflow) 1987-03-30 1987-03-30

Country Status (1)

Country Link
JP (1) JPH0528774Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009235429A (ja) * 2008-03-25 2009-10-15 Iwate Univ スパッタ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009235429A (ja) * 2008-03-25 2009-10-15 Iwate Univ スパッタ装置

Also Published As

Publication number Publication date
JPH0528774Y2 (enrdf_load_stackoverflow) 1993-07-23

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