JPH0528774Y2 - - Google Patents
Info
- Publication number
- JPH0528774Y2 JPH0528774Y2 JP4849087U JP4849087U JPH0528774Y2 JP H0528774 Y2 JPH0528774 Y2 JP H0528774Y2 JP 4849087 U JP4849087 U JP 4849087U JP 4849087 U JP4849087 U JP 4849087U JP H0528774 Y2 JPH0528774 Y2 JP H0528774Y2
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- electrostatic adsorption
- film forming
- forming chamber
- lead wire
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001179 sorption measurement Methods 0.000 claims description 24
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical group [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 17
- 230000007246 mechanism Effects 0.000 claims description 14
- 239000000758 substrate Substances 0.000 description 17
- 238000012423 maintenance Methods 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000010445 mica Substances 0.000 description 2
- 229910052618 mica group Inorganic materials 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4849087U JPH0528774Y2 (enrdf_load_stackoverflow) | 1987-03-30 | 1987-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4849087U JPH0528774Y2 (enrdf_load_stackoverflow) | 1987-03-30 | 1987-03-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63153538U JPS63153538U (enrdf_load_stackoverflow) | 1988-10-07 |
| JPH0528774Y2 true JPH0528774Y2 (enrdf_load_stackoverflow) | 1993-07-23 |
Family
ID=30870067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4849087U Expired - Lifetime JPH0528774Y2 (enrdf_load_stackoverflow) | 1987-03-30 | 1987-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0528774Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009235429A (ja) * | 2008-03-25 | 2009-10-15 | Iwate Univ | スパッタ装置 |
-
1987
- 1987-03-30 JP JP4849087U patent/JPH0528774Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63153538U (enrdf_load_stackoverflow) | 1988-10-07 |
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