JPS63123666U - - Google Patents

Info

Publication number
JPS63123666U
JPS63123666U JP1321587U JP1321587U JPS63123666U JP S63123666 U JPS63123666 U JP S63123666U JP 1321587 U JP1321587 U JP 1321587U JP 1321587 U JP1321587 U JP 1321587U JP S63123666 U JPS63123666 U JP S63123666U
Authority
JP
Japan
Prior art keywords
vapor deposition
semiconductor wafer
pot
wafer
inverts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1321587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1321587U priority Critical patent/JPS63123666U/ja
Publication of JPS63123666U publication Critical patent/JPS63123666U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1321587U 1987-01-31 1987-01-31 Pending JPS63123666U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1321587U JPS63123666U (enrdf_load_stackoverflow) 1987-01-31 1987-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1321587U JPS63123666U (enrdf_load_stackoverflow) 1987-01-31 1987-01-31

Publications (1)

Publication Number Publication Date
JPS63123666U true JPS63123666U (enrdf_load_stackoverflow) 1988-08-11

Family

ID=30802066

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1321587U Pending JPS63123666U (enrdf_load_stackoverflow) 1987-01-31 1987-01-31

Country Status (1)

Country Link
JP (1) JPS63123666U (enrdf_load_stackoverflow)

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