JPS63170464U - - Google Patents

Info

Publication number
JPS63170464U
JPS63170464U JP6168887U JP6168887U JPS63170464U JP S63170464 U JPS63170464 U JP S63170464U JP 6168887 U JP6168887 U JP 6168887U JP 6168887 U JP6168887 U JP 6168887U JP S63170464 U JPS63170464 U JP S63170464U
Authority
JP
Japan
Prior art keywords
wafer
holder
grooves
supported
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6168887U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0441173Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6168887U priority Critical patent/JPH0441173Y2/ja
Publication of JPS63170464U publication Critical patent/JPS63170464U/ja
Application granted granted Critical
Publication of JPH0441173Y2 publication Critical patent/JPH0441173Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP6168887U 1987-04-22 1987-04-22 Expired JPH0441173Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6168887U JPH0441173Y2 (enrdf_load_stackoverflow) 1987-04-22 1987-04-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6168887U JPH0441173Y2 (enrdf_load_stackoverflow) 1987-04-22 1987-04-22

Publications (2)

Publication Number Publication Date
JPS63170464U true JPS63170464U (enrdf_load_stackoverflow) 1988-11-07
JPH0441173Y2 JPH0441173Y2 (enrdf_load_stackoverflow) 1992-09-28

Family

ID=30895261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6168887U Expired JPH0441173Y2 (enrdf_load_stackoverflow) 1987-04-22 1987-04-22

Country Status (1)

Country Link
JP (1) JPH0441173Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02114938U (enrdf_load_stackoverflow) * 1989-03-03 1990-09-14
JP2002060947A (ja) * 2000-07-07 2002-02-28 Asm Internatl Nv 原子層のｃｖｄ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02114938U (enrdf_load_stackoverflow) * 1989-03-03 1990-09-14
JP2002060947A (ja) * 2000-07-07 2002-02-28 Asm Internatl Nv 原子層のｃｖｄ

Also Published As

Publication number Publication date
JPH0441173Y2 (enrdf_load_stackoverflow) 1992-09-28

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