JPS62168644U - - Google Patents

Info

Publication number
JPS62168644U
JPS62168644U JP5586786U JP5586786U JPS62168644U JP S62168644 U JPS62168644 U JP S62168644U JP 5586786 U JP5586786 U JP 5586786U JP 5586786 U JP5586786 U JP 5586786U JP S62168644 U JPS62168644 U JP S62168644U
Authority
JP
Japan
Prior art keywords
wafer
holder
holder base
holding device
hook portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5586786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5586786U priority Critical patent/JPS62168644U/ja
Publication of JPS62168644U publication Critical patent/JPS62168644U/ja
Pending legal-status Critical Current

Links

JP5586786U 1986-04-14 1986-04-14 Pending JPS62168644U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5586786U JPS62168644U (enrdf_load_stackoverflow) 1986-04-14 1986-04-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5586786U JPS62168644U (enrdf_load_stackoverflow) 1986-04-14 1986-04-14

Publications (1)

Publication Number Publication Date
JPS62168644U true JPS62168644U (enrdf_load_stackoverflow) 1987-10-26

Family

ID=30884167

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5586786U Pending JPS62168644U (enrdf_load_stackoverflow) 1986-04-14 1986-04-14

Country Status (1)

Country Link
JP (1) JPS62168644U (enrdf_load_stackoverflow)

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