JPS61186158U - - Google Patents

Info

Publication number
JPS61186158U
JPS61186158U JP6907885U JP6907885U JPS61186158U JP S61186158 U JPS61186158 U JP S61186158U JP 6907885 U JP6907885 U JP 6907885U JP 6907885 U JP6907885 U JP 6907885U JP S61186158 U JPS61186158 U JP S61186158U
Authority
JP
Japan
Prior art keywords
objective
sample
aperture
electron gun
objective lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6907885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0511643Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6907885U priority Critical patent/JPH0511643Y2/ja
Publication of JPS61186158U publication Critical patent/JPS61186158U/ja
Application granted granted Critical
Publication of JPH0511643Y2 publication Critical patent/JPH0511643Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP6907885U 1985-05-10 1985-05-10 Expired - Lifetime JPH0511643Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6907885U JPH0511643Y2 (enrdf_load_stackoverflow) 1985-05-10 1985-05-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6907885U JPH0511643Y2 (enrdf_load_stackoverflow) 1985-05-10 1985-05-10

Publications (2)

Publication Number Publication Date
JPS61186158U true JPS61186158U (enrdf_load_stackoverflow) 1986-11-20
JPH0511643Y2 JPH0511643Y2 (enrdf_load_stackoverflow) 1993-03-23

Family

ID=30604416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6907885U Expired - Lifetime JPH0511643Y2 (enrdf_load_stackoverflow) 1985-05-10 1985-05-10

Country Status (1)

Country Link
JP (1) JPH0511643Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013179808A1 (ja) * 2012-05-31 2013-12-05 株式会社 日立ハイテクノロジーズ 荷電粒子装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013179808A1 (ja) * 2012-05-31 2013-12-05 株式会社 日立ハイテクノロジーズ 荷電粒子装置
JP2013251088A (ja) * 2012-05-31 2013-12-12 Hitachi High-Technologies Corp 荷電粒子装置
CN104350575A (zh) * 2012-05-31 2015-02-11 株式会社日立高新技术 带电粒子装置

Also Published As

Publication number Publication date
JPH0511643Y2 (enrdf_load_stackoverflow) 1993-03-23

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