JPS6373854U - - Google Patents

Info

Publication number
JPS6373854U
JPS6373854U JP16787986U JP16787986U JPS6373854U JP S6373854 U JPS6373854 U JP S6373854U JP 16787986 U JP16787986 U JP 16787986U JP 16787986 U JP16787986 U JP 16787986U JP S6373854 U JPS6373854 U JP S6373854U
Authority
JP
Japan
Prior art keywords
sample
holder
cylindrical body
chamber
exchange chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16787986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16787986U priority Critical patent/JPS6373854U/ja
Publication of JPS6373854U publication Critical patent/JPS6373854U/ja
Pending legal-status Critical Current

Links

JP16787986U 1986-10-31 1986-10-31 Pending JPS6373854U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16787986U JPS6373854U (enrdf_load_stackoverflow) 1986-10-31 1986-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16787986U JPS6373854U (enrdf_load_stackoverflow) 1986-10-31 1986-10-31

Publications (1)

Publication Number Publication Date
JPS6373854U true JPS6373854U (enrdf_load_stackoverflow) 1988-05-17

Family

ID=31100227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16787986U Pending JPS6373854U (enrdf_load_stackoverflow) 1986-10-31 1986-10-31

Country Status (1)

Country Link
JP (1) JPS6373854U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009146791A (ja) * 2007-12-17 2009-07-02 Hitachi High-Technologies Corp 電子ビーム検査装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5147072A (enrdf_load_stackoverflow) * 1974-10-22 1976-04-22 Furukawa Electric Co Ltd
JPS542055A (en) * 1977-06-08 1979-01-09 Hitachi Ltd Test piece treatment unit for scanning electron microscope or the like

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5147072A (enrdf_load_stackoverflow) * 1974-10-22 1976-04-22 Furukawa Electric Co Ltd
JPS542055A (en) * 1977-06-08 1979-01-09 Hitachi Ltd Test piece treatment unit for scanning electron microscope or the like

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009146791A (ja) * 2007-12-17 2009-07-02 Hitachi High-Technologies Corp 電子ビーム検査装置

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