JPS6176676U - - Google Patents

Info

Publication number
JPS6176676U
JPS6176676U JP16163684U JP16163684U JPS6176676U JP S6176676 U JPS6176676 U JP S6176676U JP 16163684 U JP16163684 U JP 16163684U JP 16163684 U JP16163684 U JP 16163684U JP S6176676 U JPS6176676 U JP S6176676U
Authority
JP
Japan
Prior art keywords
sample
chamber
preliminary chamber
air lock
lock valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16163684U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16163684U priority Critical patent/JPS6176676U/ja
Publication of JPS6176676U publication Critical patent/JPS6176676U/ja
Pending legal-status Critical Current

Links

JP16163684U 1984-10-25 1984-10-25 Pending JPS6176676U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16163684U JPS6176676U (enrdf_load_stackoverflow) 1984-10-25 1984-10-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16163684U JPS6176676U (enrdf_load_stackoverflow) 1984-10-25 1984-10-25

Publications (1)

Publication Number Publication Date
JPS6176676U true JPS6176676U (enrdf_load_stackoverflow) 1986-05-23

Family

ID=30719538

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16163684U Pending JPS6176676U (enrdf_load_stackoverflow) 1984-10-25 1984-10-25

Country Status (1)

Country Link
JP (1) JPS6176676U (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61294747A (ja) * 1985-06-21 1986-12-25 Anelva Corp 超高真空用試料移動装置
JP2012138233A (ja) * 2010-12-27 2012-07-19 Jeol Ltd 試料ホルダの排気方法及び装置
JP2013137995A (ja) * 2011-11-28 2013-07-11 Jeol Ltd イオンビーム加工装置、試料加工方法及び試料容器
JPWO2013035866A1 (ja) * 2011-09-09 2015-03-23 独立行政法人科学技術振興機構 生物試料をそのままの姿で観察するための電子顕微鏡による観察方法とそれに用いられる真空下での蒸発抑制用組成物、走査型電子顕微鏡および透過型電子顕微鏡
JP2015103431A (ja) * 2013-11-26 2015-06-04 日本電子株式会社 試料導入装置および荷電粒子線装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5012961A (enrdf_load_stackoverflow) * 1973-04-11 1975-02-10
JPS5931147B2 (ja) * 1975-10-24 1984-07-31 松下電器産業株式会社 Ｆｍ ホウソウロクオンソウチ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5012961A (enrdf_load_stackoverflow) * 1973-04-11 1975-02-10
JPS5931147B2 (ja) * 1975-10-24 1984-07-31 松下電器産業株式会社 Ｆｍ ホウソウロクオンソウチ

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61294747A (ja) * 1985-06-21 1986-12-25 Anelva Corp 超高真空用試料移動装置
JP2012138233A (ja) * 2010-12-27 2012-07-19 Jeol Ltd 試料ホルダの排気方法及び装置
JPWO2013035866A1 (ja) * 2011-09-09 2015-03-23 独立行政法人科学技術振興機構 生物試料をそのままの姿で観察するための電子顕微鏡による観察方法とそれに用いられる真空下での蒸発抑制用組成物、走査型電子顕微鏡および透過型電子顕微鏡
JP2013137995A (ja) * 2011-11-28 2013-07-11 Jeol Ltd イオンビーム加工装置、試料加工方法及び試料容器
JP2015103431A (ja) * 2013-11-26 2015-06-04 日本電子株式会社 試料導入装置および荷電粒子線装置

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