JPS6351432U - - Google Patents

Info

Publication number
JPS6351432U
JPS6351432U JP14611486U JP14611486U JPS6351432U JP S6351432 U JPS6351432 U JP S6351432U JP 14611486 U JP14611486 U JP 14611486U JP 14611486 U JP14611486 U JP 14611486U JP S6351432 U JPS6351432 U JP S6351432U
Authority
JP
Japan
Prior art keywords
reaction tube
lid member
susceptor
reaction
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14611486U
Other languages
English (en)
Japanese (ja)
Other versions
JPH058672Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14611486U priority Critical patent/JPH058672Y2/ja
Publication of JPS6351432U publication Critical patent/JPS6351432U/ja
Application granted granted Critical
Publication of JPH058672Y2 publication Critical patent/JPH058672Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP14611486U 1986-09-24 1986-09-24 Expired - Lifetime JPH058672Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14611486U JPH058672Y2 (enrdf_load_stackoverflow) 1986-09-24 1986-09-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14611486U JPH058672Y2 (enrdf_load_stackoverflow) 1986-09-24 1986-09-24

Publications (2)

Publication Number Publication Date
JPS6351432U true JPS6351432U (enrdf_load_stackoverflow) 1988-04-07
JPH058672Y2 JPH058672Y2 (enrdf_load_stackoverflow) 1993-03-04

Family

ID=31058281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14611486U Expired - Lifetime JPH058672Y2 (enrdf_load_stackoverflow) 1986-09-24 1986-09-24

Country Status (1)

Country Link
JP (1) JPH058672Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015138897A (ja) * 2014-01-23 2015-07-30 信越半導体株式会社 気相成長装置の清掃又は点検方法
JP2016039174A (ja) * 2014-08-05 2016-03-22 住友化学株式会社 反応容器の密閉構造、および基板処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015138897A (ja) * 2014-01-23 2015-07-30 信越半導体株式会社 気相成長装置の清掃又は点検方法
JP2016039174A (ja) * 2014-08-05 2016-03-22 住友化学株式会社 反応容器の密閉構造、および基板処理装置

Also Published As

Publication number Publication date
JPH058672Y2 (enrdf_load_stackoverflow) 1993-03-04

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