JPH0482842U - - Google Patents

Info

Publication number
JPH0482842U
JPH0482842U JP12435690U JP12435690U JPH0482842U JP H0482842 U JPH0482842 U JP H0482842U JP 12435690 U JP12435690 U JP 12435690U JP 12435690 U JP12435690 U JP 12435690U JP H0482842 U JPH0482842 U JP H0482842U
Authority
JP
Japan
Prior art keywords
plasma processing
processing apparatus
purging
ring
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12435690U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12435690U priority Critical patent/JPH0482842U/ja
Publication of JPH0482842U publication Critical patent/JPH0482842U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP12435690U 1990-11-28 1990-11-28 Pending JPH0482842U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12435690U JPH0482842U (enrdf_load_stackoverflow) 1990-11-28 1990-11-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12435690U JPH0482842U (enrdf_load_stackoverflow) 1990-11-28 1990-11-28

Publications (1)

Publication Number Publication Date
JPH0482842U true JPH0482842U (enrdf_load_stackoverflow) 1992-07-20

Family

ID=31872014

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12435690U Pending JPH0482842U (enrdf_load_stackoverflow) 1990-11-28 1990-11-28

Country Status (1)

Country Link
JP (1) JPH0482842U (enrdf_load_stackoverflow)

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