JPH02131257U - - Google Patents

Info

Publication number
JPH02131257U
JPH02131257U JP4123989U JP4123989U JPH02131257U JP H02131257 U JPH02131257 U JP H02131257U JP 4123989 U JP4123989 U JP 4123989U JP 4123989 U JP4123989 U JP 4123989U JP H02131257 U JPH02131257 U JP H02131257U
Authority
JP
Japan
Prior art keywords
refrigerant
vacuum processing
sample stage
discharge port
introduction space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4123989U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4123989U priority Critical patent/JPH02131257U/ja
Publication of JPH02131257U publication Critical patent/JPH02131257U/ja
Pending legal-status Critical Current

Links

JP4123989U 1989-04-06 1989-04-06 Pending JPH02131257U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4123989U JPH02131257U (enrdf_load_stackoverflow) 1989-04-06 1989-04-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4123989U JPH02131257U (enrdf_load_stackoverflow) 1989-04-06 1989-04-06

Publications (1)

Publication Number Publication Date
JPH02131257U true JPH02131257U (enrdf_load_stackoverflow) 1990-10-31

Family

ID=31551738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4123989U Pending JPH02131257U (enrdf_load_stackoverflow) 1989-04-06 1989-04-06

Country Status (1)

Country Link
JP (1) JPH02131257U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006302524A (ja) * 2005-04-15 2006-11-02 Jeol Ltd 試料ホルダ冷却部材

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006302524A (ja) * 2005-04-15 2006-11-02 Jeol Ltd 試料ホルダ冷却部材

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