JPH02131257U - - Google Patents
Info
- Publication number
- JPH02131257U JPH02131257U JP4123989U JP4123989U JPH02131257U JP H02131257 U JPH02131257 U JP H02131257U JP 4123989 U JP4123989 U JP 4123989U JP 4123989 U JP4123989 U JP 4123989U JP H02131257 U JPH02131257 U JP H02131257U
- Authority
- JP
- Japan
- Prior art keywords
- refrigerant
- vacuum processing
- sample stage
- discharge port
- introduction space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003507 refrigerant Substances 0.000 claims description 10
- 238000001816 cooling Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
Description
第１図はこの考案の一実施例の真空処理装置の
断面図、第２図は他の実施例の要部断面図、第３
図は従来の真空処理装置の冷却部の部分断面図で
ある。
１……試料、２……試料台２、２ａ……冷媒導
入空間、２ｂ……導入口、３……真空処理室、４
……冷媒供給口、５……排出口、６……予備室、
７……ゲートバルプ、９……移動手段、１６……
冷媒。
Fig. 1 is a sectional view of a vacuum processing apparatus according to one embodiment of this invention, Fig. 2 is a sectional view of main parts of another embodiment, and Fig. 3 is a sectional view of a main part of another embodiment.
The figure is a partial sectional view of a cooling section of a conventional vacuum processing apparatus. 1...Sample, 2...Sample stand 2, 2a...Refrigerant introduction space, 2b...Inlet, 3...Vacuum processing chamber, 4
... Refrigerant supply port, 5 ... Discharge port, 6 ... Preparation chamber,
7... Gate Valp, 9... Means of transportation, 16...
Refrigerant.
Claims (1)
および予備室と、この両室内を移動可能でかつ内
部に冷媒導入空間を設けた試料台と、前記真空処
理室内に設けられて前記試料台の前記冷媒導入空
間の導入口に気密接続可能な冷媒供給口および排
出口と、この冷媒供給口および排出口に前記冷媒
導入空間の導入口が気密接続される位置と前記予
備室内の位置との間で前記試料台を移動させる移
動手段とを備えた真空処理装置。 (2) 前記冷媒供給口および排出口の何れか一方
を他方の内部に設けたことを特徴とする請求項(1
)記載の真空処理装置。[Claims for Utility Model Registration] (1) A vacuum processing chamber and a preliminary chamber connected via a gate valve, a sample stage movable within both chambers and having a refrigerant introduction space inside, and the vacuum processing chamber a refrigerant supply port and a discharge port that are provided in the sample stage and can be airtightly connected to the inlet of the refrigerant introduction space of the sample stage, and a position where the inlet of the refrigerant introduction space is airtightly connected to the refrigerant supply port and the discharge port; A vacuum processing apparatus comprising: a moving means for moving the sample stage to and from a position in the preliminary chamber. (2) Claim (1) characterized in that either the refrigerant supply port or the refrigerant discharge port is provided inside the other.
) The vacuum processing apparatus described in ).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4123989U JPH02131257U (en) | 1989-04-06 | 1989-04-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4123989U JPH02131257U (en) | 1989-04-06 | 1989-04-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02131257U true JPH02131257U (en) | 1990-10-31 |
Family
ID=31551738
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4123989U Pending JPH02131257U (en) | 1989-04-06 | 1989-04-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02131257U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006302524A (en) * | 2005-04-15 | 2006-11-02 | Jeol Ltd | Sample holder cooling member |
-
1989
- 1989-04-06 JP JP4123989U patent/JPH02131257U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006302524A (en) * | 2005-04-15 | 2006-11-02 | Jeol Ltd | Sample holder cooling member |
| JP4533790B2 (en) * | 2005-04-15 | 2010-09-01 | 日本電子株式会社 | Sample holder cooling member |