JPH02131257U - - Google Patents

Info

Publication number
JPH02131257U
JPH02131257U JP4123989U JP4123989U JPH02131257U JP H02131257 U JPH02131257 U JP H02131257U JP 4123989 U JP4123989 U JP 4123989U JP 4123989 U JP4123989 U JP 4123989U JP H02131257 U JPH02131257 U JP H02131257U
Authority
JP
Japan
Prior art keywords
refrigerant
vacuum processing
sample stage
discharge port
introduction space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4123989U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4123989U priority Critical patent/JPH02131257U/ja
Publication of JPH02131257U publication Critical patent/JPH02131257U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの考案の一実施例の真空処理装置の
断面図、第2図は他の実施例の要部断面図、第3
図は従来の真空処理装置の冷却部の部分断面図で
ある。 1……試料、2……試料台2、2a……冷媒導
入空間、2b……導入口、3……真空処理室、4
……冷媒供給口、5……排出口、6……予備室、
7……ゲートバルプ、9……移動手段、16……
冷媒。
Fig. 1 is a sectional view of a vacuum processing apparatus according to one embodiment of this invention, Fig. 2 is a sectional view of main parts of another embodiment, and Fig. 3 is a sectional view of a main part of another embodiment.
The figure is a partial sectional view of a cooling section of a conventional vacuum processing apparatus. 1...Sample, 2...Sample stand 2, 2a...Refrigerant introduction space, 2b...Inlet, 3...Vacuum processing chamber, 4
... Refrigerant supply port, 5 ... Discharge port, 6 ... Preparation chamber,
7... Gate Valp, 9... Means of transportation, 16...
Refrigerant.

Claims (1)

【実用新案登録請求の範囲】 (1) ゲートバルブを介して連結した真空処理室
および予備室と、この両室内を移動可能でかつ内
部に冷媒導入空間を設けた試料台と、前記真空処
理室内に設けられて前記試料台の前記冷媒導入空
間の導入口に気密接続可能な冷媒供給口および排
出口と、この冷媒供給口および排出口に前記冷媒
導入空間の導入口が気密接続される位置と前記予
備室内の位置との間で前記試料台を移動させる移
動手段とを備えた真空処理装置。 (2) 前記冷媒供給口および排出口の何れか一方
を他方の内部に設けたことを特徴とする請求項(1
)記載の真空処理装置。
[Claims for Utility Model Registration] (1) A vacuum processing chamber and a preliminary chamber connected via a gate valve, a sample stage movable within both chambers and having a refrigerant introduction space inside, and the vacuum processing chamber a refrigerant supply port and a discharge port that are provided in the sample stage and can be airtightly connected to the inlet of the refrigerant introduction space of the sample stage, and a position where the inlet of the refrigerant introduction space is airtightly connected to the refrigerant supply port and the discharge port; A vacuum processing apparatus comprising: a moving means for moving the sample stage to and from a position in the preliminary chamber. (2) Claim (1) characterized in that either the refrigerant supply port or the refrigerant discharge port is provided inside the other.
) The vacuum processing apparatus described in ).
JP4123989U 1989-04-06 1989-04-06 Pending JPH02131257U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4123989U JPH02131257U (en) 1989-04-06 1989-04-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4123989U JPH02131257U (en) 1989-04-06 1989-04-06

Publications (1)

Publication Number Publication Date
JPH02131257U true JPH02131257U (en) 1990-10-31

Family

ID=31551738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4123989U Pending JPH02131257U (en) 1989-04-06 1989-04-06

Country Status (1)

Country Link
JP (1) JPH02131257U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006302524A (en) * 2005-04-15 2006-11-02 Jeol Ltd Sample holder cooling member

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006302524A (en) * 2005-04-15 2006-11-02 Jeol Ltd Sample holder cooling member
JP4533790B2 (en) * 2005-04-15 2010-09-01 日本電子株式会社 Sample holder cooling member

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