JPS6365231U - - Google Patents
Info
- Publication number
- JPS6365231U JPS6365231U JP15964086U JP15964086U JPS6365231U JP S6365231 U JPS6365231 U JP S6365231U JP 15964086 U JP15964086 U JP 15964086U JP 15964086 U JP15964086 U JP 15964086U JP S6365231 U JPS6365231 U JP S6365231U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transfer device
- wafer prober
- belt
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 4
- 238000007664 blowing Methods 0.000 claims description 2
- 238000001035 drying Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図はこの考案の一実施例を示す斜視図、第
２図は従来装置を示す斜視図である。
図中、１はウエハ収納カセツト、２は吸着テー
ブル、３ａ，３ｂは搬送ベルト、４ａ，４ｂ，４
ｃは測定ウエハ、５はマーク、６は熱風送風パイ
プ、７はストツパである。尚、図中同一符号は同
一または相当部分を示す。
FIG. 1 is a perspective view showing an embodiment of this invention, and FIG. 2 is a perspective view showing a conventional device. In the figure, 1 is a wafer storage cassette, 2 is a suction table, 3a, 3b are conveyor belts, 4a, 4b, 4
C is a measurement wafer, 5 is a mark, 6 is a hot air blowing pipe, and 7 is a stopper. Note that the same reference numerals in the figures indicate the same or corresponding parts.
補正 昭６２．１２．１５
実用新案登録請求の範囲を次のように補正する
。Amendment December 15, 1982 The scope of claims for utility model registration is amended as follows.
【実用新案登録請求の範囲】
表面に電気的試験結果を表わす液状のマークを
有する半導体ウエハを搬送装置により順次収納カ
セツト内へ移送し収納するようにしたものにおい
て、上記ウエハ搬送装置の途中に上記液状のマー
クを硬化させるための乾燥手段を配設したことを
特徴とするウエハプローバ。[Claims for Utility Model Registration] In a device in which semiconductor wafers having liquid marks representing electrical test results on their surfaces are sequentially transferred and stored in storage cassettes by a transfer device, the above-mentioned A wafer prober comprising a drying means for curing liquid marks.
Claims (1)
クを有する半導体ウエハを搬送装置により順次収
納カセツト内へ移送し収納するようにしたものに
おいて、上記ウエハ搬送装置の途中に上記液状の
マークを硬化させるための乾燥手段を配設したこ
とを特徴とするウエハプローバ。 (2) ウエハ搬送装置である搬送ベルトの途中に
該ベルトより突出して設けたストツパを備えてな
る実用新案登録請求の範囲第１項記載のウエハプ
ローバ。 (3) 搬送ベルトの下方に熱風送風パイプを配設
してなる実用新案登録請求の範囲第２項記載のウ
エハプローバ。[Claims for Utility Model Registration] (1) In a device in which semiconductor wafers having liquid marks representing electrical test results on their surfaces are sequentially transferred and stored in storage cassettes by a transfer device, the wafer transfer device described above A wafer prober characterized in that a drying means for curing the liquid mark is disposed in the middle of the wafer prober. (2) The wafer prober according to claim 1, which is a wafer transfer device, and includes a stopper provided in the middle of a transfer belt that is a wafer transfer device and protrudes from the belt. (3) The wafer prober according to claim 2, which comprises a hot air blowing pipe disposed below the conveyor belt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15964086U JPS6365231U (en) | 1986-10-17 | 1986-10-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15964086U JPS6365231U (en) | 1986-10-17 | 1986-10-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6365231U true JPS6365231U (en) | 1988-04-30 |
Family
ID=31084262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15964086U Pending JPS6365231U (en) | 1986-10-17 | 1986-10-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6365231U (en) |
-
1986
- 1986-10-17 JP JP15964086U patent/JPS6365231U/ja active Pending
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