JPH03120560U - - Google Patents
Info
- Publication number
- JPH03120560U JPH03120560U JP2670690U JP2670690U JPH03120560U JP H03120560 U JPH03120560 U JP H03120560U JP 2670690 U JP2670690 U JP 2670690U JP 2670690 U JP2670690 U JP 2670690U JP H03120560 U JPH03120560 U JP H03120560U
- Authority
- JP
- Japan
- Prior art keywords
- tray
- sensor
- heater block
- output
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000009529 body temperature measurement Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 2
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例で用いるトレーの構
造を示す図、第２図は常圧ＣＶＤ装置の電気的温
度制御ブロツク図、第３図は常圧ＣＶＤ装置の概
略図、第４図・第５図は別のトレーの構造を示す
側面図、平面図である。
１……トレー、２……熱電対、３，３′……リ
ード端子、４……ソケツト端子、４′……接触板
、５……サンプルホールド回路、７……温度コン
トローラ、８……サイリスタ、９……電源、１０
，１１……ヒータブロツク、１２……搬送チエー
ン、１３……ウエーハローダ、１４……半導体ウ
エーハ、１５……ヘツドベース、１６……ウエー
ハアンローダ。
Fig. 1 is a diagram showing the structure of a tray used in an embodiment of the present invention, Fig. 2 is a block diagram of electrical temperature control of the atmospheric pressure CVD apparatus, Fig. 3 is a schematic diagram of the atmospheric pressure CVD apparatus, and Fig. 4 - Fig. 5 is a side view and a plan view showing the structure of another tray. 1... Tray, 2... Thermocouple, 3, 3'... Lead terminal, 4... Socket terminal, 4'... Contact plate, 5... Sample hold circuit, 7... Temperature controller, 8... Thyristor , 9...Power supply, 10
, 11... Heater block, 12... Transfer chain, 13... Wafer loader, 14... Semiconductor wafer, 15... Head base, 16... Wafer unloader.
Claims (1)
半導体ウエーハの加工を行なう製造装置において
、トレーの各々に温度測定用センサを設け、該セ
ンサの出力を取り出すリード端子が、トレー搬送
径路に沿つて所定の加工位置に設けたヒータブロ
ツクの位置を中心として、筐体に設けた接触端子
と、トレー搬送中に摺動的に接触し、該センサの
出力を温度情報として前記ヒータブロツクの温度
制御に用いることを特徴とする半導体ウエーハ加
工装置。 A tray loaded with semiconductor wafers is transported,
In manufacturing equipment that processes semiconductor wafers, each tray is provided with a temperature measurement sensor, and the lead terminal for taking out the output of the sensor is centered at the position of a heater block installed at a predetermined processing position along the tray conveyance path. A semiconductor wafer processing apparatus characterized in that the sensor makes sliding contact with a contact terminal provided on a housing during conveyance of the tray, and uses the output of the sensor as temperature information to control the temperature of the heater block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2670690U JPH03120560U (en) | 1990-03-15 | 1990-03-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2670690U JPH03120560U (en) | 1990-03-15 | 1990-03-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03120560U true JPH03120560U (en) | 1991-12-11 |
Family
ID=31529587
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2670690U Pending JPH03120560U (en) | 1990-03-15 | 1990-03-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03120560U (en) |
-
1990
- 1990-03-15 JP JP2670690U patent/JPH03120560U/ja active Pending
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