JPH0843482A - Temperature-regulating device - Google Patents

Abstract

PURPOSE:To provide a temperature-regulating device in which a mounting-plate part with reference to different kinds of devices is used in common when every device formed by packaging an object to be inspected such as, e.g. a semiconductor integrated circuit, by which every device can be heated or cooled with good efficiency and which is used for the inspection apparatus of every device. CONSTITUTION:A mounting-plate part 3 on which a plurality of devices 10 are arranged and mounted is installed on a heating unit 4 so as to be freely detachable, and a recessed part 5 in which every device 10 is housed is formed on the surface part of the mounting-plate part 3. Then, a mounting-stand part 6 having a height at which every lead terminal R for every device 10 does not come into contact with the bottom face is formed in the central part on the bottom face of the recessed part 5, and a suction hole 43 which is used to vacuum-suck every device 10 is formed in the center of the mounting-stand part 6.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection apparatus for inspecting a device in which, for example, a semiconductor integrated circuit is packaged.

[0002]

2. Description of the Related Art For example, a device in which a semiconductor integrated circuit is packaged is tested for electrical characteristics. As an inspection apparatus of this type, a socket portion is used when lead terminals have a relatively wide pitch. When the pitch of the lead terminals is relatively narrow, the probe terminals of the probe card are used to make electrical contact between the lead terminals and the test head. And, the above-mentioned test is usually carried out while the device is heated, and for this reason, a device preheating apparatus is used. Describing the transportation of the device in the inspection apparatus, for example, four device upper surfaces are simultaneously suction-held from the loading tray by the loader and transported to the first supply alignment unit, and the alignment is performed by the shape of the recess in the alignment unit. . Next, the device is carried by the loader from the aligning unit to the preheating device and preheated, and then carried to the second supply aligning unit. It is transported to and tested for electrical characteristics.

Here, the preheating device is constructed so that a large number of devices can be arranged and heated at the same time. The structure of a unit region for heating each device will be described with reference to FIGS. 5 and 6. Reference numeral 71 denotes a mounting portion, and a positioning rib 72 is formed on the peripheral edge of the mounting portion 71, and the peripheral surface thereof is formed so that the lead terminals R of the device 10 can be extended. Rib 72
When the device 10 is displaced and tilted when the device 10 is released from adsorption of the loader, for example, the device 1
Since the lead terminals of 10 are bent when 0 is adsorbed, they are provided so as not to be displaced. Then, depending on the shape of the device 10, the placement area (rib 7
Since the size of the area surrounded by 2 is different, the mounting plate portion 74 of the device including the mounting portion 71 is replaceably stacked on the common heating unit 73 so as to be compatible with various devices 10. Are provided to form a preheating device.

[0004]

Even if devices of the same type are slightly different in size depending on the user, there are actually a plurality of types of devices in one device type. On the other hand, in the preheating device, the rib 72
Since the mounting area surrounded by is required to have a size that accurately corresponds to the size of the device, it is necessary to prepare a plurality of mounting plate portions 74 for one type of device. Every time the type is changed, the work of replacing the mounting plate 74 is required, and the cost is high.

Further, since the device is placed on the placing part 71 of the placing plate part 74 only by its own weight, the adhesion between the device and the placing face is poor, and the heat from the heating unit 73 is efficiently applied to the device. There was also the problem of not being able to transfer heat. In addition, in order to securely mount the device in the mounting area surrounded by the ribs 72, it is necessary to temporarily place the device on the alignment table before carrying it to the preheating device, and for that purpose, There is also an inconvenience that the alignment section is required and the processing time becomes long.

The present invention has been made under such circumstances, and an object thereof is to provide a temperature control device used for an inspection device, which can efficiently heat or cool an inspection object. It is in. Another object of the present invention is to provide a temperature control device capable of using a common mounting plate portion for different types of inspection objects.

[0007]

According to a first aspect of the present invention, there is provided an apparatus for heating or cooling an inspected object having a terminal portion, wherein the heated or cooled inspected object has an electrical characteristic at an inspection position. In a temperature control device used in an inspection device for inspecting, a mounting plate part having a recess in which an object to be inspected is formed is formed on a surface part, and a temperature control unit for heating or cooling the mounting plate part. The apparatus is characterized in that a suction hole for vacuum suction is opened in the concave portion and a mounting table portion for mounting an object to be inspected is formed.

According to a second aspect of the present invention, in the first aspect of the invention, the object to be inspected is conveyed to the mounting table portion with its upper surface sucked and held by the conveying mechanism.

According to a third aspect of the present invention, in the first or second aspect of the present invention, the terminal portion of the object to be inspected is a lead terminal extending to the lower side of the body of the object to be inspected, and the mounting table portion is to be inspected. It is characterized in that it is narrower than the main body of the object and is higher than the surroundings so that the lead terminals do not contact the bottom surface of the surroundings.

The invention of claim 4 is the invention of claim 1, 2 or 3.
In the invention described above, the depth of the concave portion is set so that the inspection object does not protrude from the surface of the mounting plate portion.

According to a fifth aspect of the present invention, in the first, second, third, or fourth aspect of the present invention, a plurality of recesses, in which a plurality of objects to be inspected are arranged, are formed on the surface portion of the mounting plate portion. It is characterized by

The invention of claim 6 is the invention of claims 1, 2, 3, 4
Alternatively, in the invention described in the fifth aspect, the mounting plate portion is detachably attached to the temperature control unit.

[0013]

The object to be inspected is transferred onto the mounting portion in the recess of the mounting plate portion while the upper surface is held by the transfer mechanism, for example, by vacuum suction, and is then preheated (or cooled) and then transferred. It is sent to the inspection position by the mechanism, for example, via the alignment section, and the electrical characteristics are tested in the heated (or cooled) state. Since the object to be inspected is vacuum-adsorbed on the mounting table portion, it is mounted with high adhesion, and therefore is efficiently heated. In this case, if the depth of the recess is set as in claim 3, the influence of the outside air can be reduced, and the temperature of the object to be inspected can be adjusted to a constant temperature. Since the object to be inspected is vacuum-sucked to the mounting table portion, the object to be inspected does not move due to an impact at the time of release from the transport mechanism, and therefore, a positioning rib is not necessary, so that different types are used. The mounting portion can be made common to the inspection object.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An example in which the present invention is applied to a device inspection device in which a semiconductor integrated circuit chip is packaged will be described below. First, an overview of the entire inspection apparatus will be briefly described with reference to FIG. On the front side (back side in FIG. 1) of the apparatus, four tray mounting portions 1A to 1D are arranged along the X direction. However, actually, a plurality of trays are mounted on each of the tray mounting portions 1A to 1D.

A temperature adjusting device, for example, a preheating device 2 according to an embodiment of the present invention is provided on the back side of the tray mounting portions 1A and 1B so as to face them, and a supply device is provided beside the preheating device 2. The aligning section 12 for storage and the aligning section 13 for storage are integrally guided by the X rail 14 and moved by a drive mechanism (not shown). In addition, the device 1 is installed in the tray T.
The concave portion Ta for accommodating 0 is formed, and the alignment portion 1
2 and 13 are provided with a concave portion 15, and when the device 10 is put into the concave portion 15, the device is automatically placed in a horizontal posture and aligned (aligned) in a predetermined direction.

As for the devices 10 in the tray T on the tray placing parts 1A and 1B, four devices 10 at the same time are preheated by the loader 16 which is a transfer mechanism having four adsorption holding parts 16a.
And is preheated, and then conveyed to the supply alignment unit 12. The socket portion S held by the ring-shaped holder 20 is located at the inspection position away from the moving area of the aligning portions 12, 13 in the Y direction on the side opposite to the tray mounting portions 1A to 1D.
Is provided. The socket S is the device 10
The lead terminals R come into contact with each other to electrically connect the lead terminals R to a test head (not shown) therebelow. The inspection apparatus holds the device 10 from the upper surface, and the socket section S and the alignment sections 12 and 13 are held.
It is provided with a transport mechanism 21 for transporting between and. After the inspection, the device 10 is conveyed to the storage aligning unit 13 and then, similarly to the loader 16, an unloader 17 having four suction holding units 17a is used to detect the tray mounting unit 1 according to the inspection result.
The trays C on C and 1D are sorted and transported.

Next, the preheating device 2 which is an embodiment of the present invention will be described in detail. As shown in FIGS. 2 to 4, the preheating device 2 includes a mounting plate portion 3 for mounting an inspection object, for example, made of aluminum or stainless steel, and a lower surface side of the mounting plate portion 3, for example. A temperature control unit such as a heating unit 4 which is detachably attached by screwing or the like.
And a plurality of recesses 5 each having a size for accommodating one device 10 are formed vertically and horizontally on the surface of the mounting plate 3. It is configured to be heated.

At the center of the bottom surface of the recess 5, a device mounting table 6 is formed so that the mounting surface of the device 10 is higher than the surrounding bottom surface, and the height of the mounting surface with respect to the surrounding bottom surface. Is set so that the lead terminal R floats from the bottom surface when the main body of the device 10 is placed on the mounting surface. Here, the devices are the same type, for example, 0.
Even a device of 28 mm × 28 mm size having 208-pin lead terminals arranged at a pitch of 5 mm is slightly different in size depending on the manufacturer, and therefore the same product type but different types. Mounting plate part 3
Is a device for preheating a device of the type, the mounting surface of the mounting table 6 is narrower than the smallest device body of the types of devices to be inspected, for example, a size of 22 mm × 22 mm. In addition, the recess 5 is set to have a size of length × width of 38 mm × 38 mm, and when the device is placed on the mounting table part 6, the upper surface of the device sinks from the surface of the mounting plate part 3 by, for example, about 3 mm. It is set to Further, a suction hole 61 for vacuum suction is formed in the central portion of the mounting table portion 6 described above. On the other hand, in the heating unit 4, a heater 42 made of, for example, a resistance heating element is embedded in a thick plate-shaped unit body 41, and the mounting plate portions 3 are respectively inserted into the suction holes 61 of the mounting table portion 6. A suction path 43 communicating with the back surface side of is formed.
The end of the suction path 43 on the suction side communicates with, for example, a suction tube extending from a suction means (not shown).

Next, the delivery of the device 10 to the above-mentioned preheating device 2 and the operation of the preheating device 2 will be described. First, as described above, the loader 16 (see FIGS. 1 and 4)
(Refer to FIG. 4) sucks and holds the upper surface of the device 10 on the tray T and simultaneously conveys the four devices 10. Then, in the preheating device 2, the loader 16 mounts the device 10 on the mounting table portion 6, while the suction holes 61 allow the device 10 to move.
The lower surface of the loader is vacuum-sucked and the vacuum suction on the loader 16 side is released. As a result, the device 10 is stably transferred from the loader 16 to the preheating device 2 side and placed on the mounting table 6.

The mounting table 6 is heated by the heater 42, and the heat is transferred to the device 10 to preheat the device 10 to 150 ° C., for example. Then, the vacuum suction on the mounting table portion 6 side is released, and at the same time, the four devices 10 in the preheating device 2 are suction-held by the loader 16 and conveyed to the supply alignment portion 12. That is, the orientations of the devices 10 are aligned to some extent in the tray T, and the orientations of the devices 10 are also aligned in the preheating device 2, but the devices 10 are aligned in the socket S.
In order to ensure the contact between each lead terminal R and the electrode of the socket portion S, the preheated device 10 is temporarily placed on the supply aligning portion 12 having an inverted pyramid-shaped recess for alignment. Be transported.

According to such a preheating device 2, since the device 10 is vacuum-sucked by the mounting table portion 6 and then the vacuum suction of the loader 16 is released, the delivery of the device 10 is stabilized and the device 10 is mounted. There is no fear of slipping from the portion 6 and tilting. Since ribs are not provided on the periphery of the mounting table portion 6 as in the conventional case, pre-alignment does not have to be performed before the transportation to the preheating device 2, that is, the alignment portion does not have to be provided and the transportation is required. Even if there are a plurality of types of devices 10 of the same type (even if the size of the body of the device 10 is slightly different), the number of steps is reduced, and the types of devices 10 and the mounting surface of the mounting table 6 are different. You don't have to make one-to-one correspondence with the size of
The mounting surface can be made common to each type of device. Therefore, the mounting plate portion 3 can be made common for each device type, and it is not necessary to prepare a large number of product type replacement parts (mounting plate parts) having slightly different rib dimensions, which can reduce the number of product type replacement parts. .

Since the mounting plate 3 is expensive, the cost can be kept low by making it common, and the replacement work of the mounting plate 3 can be reduced. Further, since the device 10 is vacuum-adsorbed on the mounting table portion 6, the device 10 and the mounting table portion 6 come into contact with each other with high adhesion, so that the heat of the heating unit 4 is efficiently supplied to the device 1.
The heat is transferred to 0, and the electric power of the heating unit 4 can be saved. Further, since the device 10 is placed in the recess, the influence of the outside air is reduced, and the variation in the heating temperature of the device 10 due to the temperature of the outside air is reduced.

In the above, the temperature control device of the present invention is not limited to the one for heating the inspection object, but a cooling unit may be used instead of the heating unit to cool the inspection object to a predetermined temperature.

[0024]

According to the present invention, when heating or cooling an object to be inspected, the mounting plate portion can be made common to the objects to be inspected of different types, and the object to be inspected can be efficiently heated or cooled. You can

[Brief description of drawings]

FIG. 1 is a schematic perspective view showing an overall configuration of an inspection device using a temperature control device according to an embodiment of the present invention.

FIG. 2 is a plan view showing an embodiment in which the temperature control device of the present invention is applied to a preheating device.

FIG. 3 is a sectional view showing a main part of the preheating device.

FIG. 4 is a perspective view showing a main part of the preheating device.

FIG. 5 is a perspective view showing a main part of a conventional example of a preheating device used in an inspection device.

FIG. 6 is a cross-sectional view showing a main part of a conventional example of a preheating device used in an inspection device.

[Explanation of symbols]

 10 device 2 preheating device 3 mounting plate part 4 heating unit 42 heater 5 recessed part 6 mounting table part 61 suction hole R lead terminal

Claims (6)

[Claims] 1. A device for heating or cooling an inspected object having a terminal portion, which is used as an inspecting device for inspecting a heated or cooled inspected object for electrical characteristics at an inspection position. In the above, there is provided a mounting plate part having a concave part formed on the surface part for arranging an object to be inspected, and a temperature control unit for heating or cooling the mounting plate part. A temperature adjusting device, wherein a suction hole for use is opened and a mounting table for mounting an object to be inspected is formed. 2. The temperature controller according to claim 1, wherein the object to be inspected is conveyed to the mounting table portion with its upper surface being sucked and held by a conveying mechanism. 3. The terminal part of the object to be inspected comprises a lead terminal extending to the lower side of the body of the object to be inspected, the mounting table part is narrower than the body of the object to be inspected, and the lead terminals are provided on the peripheral bottom surface. The temperature control device according to claim 1 or 2, wherein the temperature control device is configured to be higher than the surroundings so as not to come into contact with each other. 4. The temperature control device according to claim 1, wherein the depth of the recess is set so that the object to be inspected does not protrude from the surface of the mounting plate. 5. The temperature according to claim 1, 2, 3 or 4, wherein a plurality of recesses in which a plurality of objects to be inspected are arranged are formed on a surface portion of the mounting plate portion. Adjustment device. 6. The mounting plate portion is detachably attached to the temperature control unit.
The temperature control device according to 4 or 5.