JPH0248874U - - Google Patents
Info
- Publication number
- JPH0248874U JPH0248874U JP12871288U JP12871288U JPH0248874U JP H0248874 U JPH0248874 U JP H0248874U JP 12871288 U JP12871288 U JP 12871288U JP 12871288 U JP12871288 U JP 12871288U JP H0248874 U JPH0248874 U JP H0248874U
- Authority
- JP
- Japan
- Prior art keywords
- measurement
- contact
- measurement contact
- semiconductor device
- exchanging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 2
- 230000004308 accommodation Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Description
第１図は本考案の一実施例の概略図である。
１…測定用接触子制御部、２…測定用接触子交
換部、３…測定部、４…供給部、５…搬送部、６
…分類・収容部、７…制御部、８…半導体装置、
９Ａ，９Ｂ，９Ｃ…トレー、１０…測定用接触子
、１１，１５…操作パネル、１２…スタートスイ
ツチ、１３…搬送アーム、１４…製品チヤツク、
１６…交換個数設定スイツチ、１７…交換アーム
。
FIG. 1 is a schematic diagram of an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1...Measurement contact control part, 2...Measurement contact exchange part, 3...Measurement part, 4...Supply part, 5...Transportation part, 6
...Classification/accommodation section, 7.Control section, 8.Semiconductor device,
9A, 9B, 9C...Tray, 10...Measurement contact, 11, 15...Operation panel, 12...Start switch, 13...Transport arm, 14...Product chuck,
16... Replacement number setting switch, 17... Replacement arm.
Claims (1)
つて設定した測定個数に達した際に測定用接触子
の交換信号を出す測定用接触子制御部と、交換信
号により測定中の測定用接触子を予備の測定用接
触子と交換する測定用接触子交換部とを有するこ
とを特徴とする半導体装置の電気的測定用ハンド
リング装置。 A measurement contact controller that measures the actual number of measurement contacts and issues a replacement signal for the measurement contact when the preset number of measurements is reached; 1. A handling device for electrical measurement of a semiconductor device, comprising a measurement contact exchange section for exchanging a contact with a spare measurement contact.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12871288U JPH0248874U (en) | 1988-09-30 | 1988-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12871288U JPH0248874U (en) | 1988-09-30 | 1988-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0248874U true JPH0248874U (en) | 1990-04-04 |
Family
ID=31382309
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12871288U Pending JPH0248874U (en) | 1988-09-30 | 1988-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0248874U (en) |
-
1988
- 1988-09-30 JP JP12871288U patent/JPH0248874U/ja active Pending