JPH02131674U - - Google Patents
Info
- Publication number
- JPH02131674U JPH02131674U JP4082189U JP4082189U JPH02131674U JP H02131674 U JPH02131674 U JP H02131674U JP 4082189 U JP4082189 U JP 4082189U JP 4082189 U JP4082189 U JP 4082189U JP H02131674 U JPH02131674 U JP H02131674U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- substrate
- measuring
- socket
- temperature sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 4
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図ａ，ｂはそれぞれ本考案の一実施例の斜
視図及び第１図ａのＡ−Ａ′線断面図、第２図ａ
，ｂはそれぞれ本考案の他の実施例の斜視図及び
第２図ａのＡ−Ａ′線断面図である。
１，１′……ＤＵＴボード基板、２，２′……
ＩＣソケツト、３，３′……半導体装置接触ピン
、４……温度感知機、５，５′……半導体装置、
６……温度感知機配線、７……半導体装置の測定
用装置。
Figures 1a and b are a perspective view of an embodiment of the present invention, a sectional view taken along line A-A' in Figure 1a, and Figure 2a.
, b are a perspective view of another embodiment of the present invention and a sectional view taken along the line A-A' in FIG. 2a, respectively. 1, 1'...DUT board substrate, 2, 2'...
IC socket, 3, 3'... semiconductor device contact pin, 4... temperature sensor, 5, 5'... semiconductor device,
6... Temperature sensor wiring, 7... Device for measuring semiconductor devices.
Claims (1)
の測定用基板において、前記半導体装置と相対向
する前記ＩＣソケツト面に温度感知機を備えたこ
とを特徴とする半導体装置の測定用基板。 What is claimed is: 1. A substrate for measuring a semiconductor device, the substrate for measuring a semiconductor device having an IC socket fixed on the substrate, further comprising a temperature sensor on a surface of the IC socket facing the semiconductor device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4082189U JPH02131674U (en) | 1989-04-05 | 1989-04-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4082189U JPH02131674U (en) | 1989-04-05 | 1989-04-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02131674U true JPH02131674U (en) | 1990-11-01 |
Family
ID=31550943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4082189U Pending JPH02131674U (en) | 1989-04-05 | 1989-04-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02131674U (en) |
-
1989
- 1989-04-05 JP JP4082189U patent/JPH02131674U/ja active Pending