JPS636519B2 - - Google Patents

Info

Publication number
JPS636519B2
JPS636519B2 JP55043262A JP4326280A JPS636519B2 JP S636519 B2 JPS636519 B2 JP S636519B2 JP 55043262 A JP55043262 A JP 55043262A JP 4326280 A JP4326280 A JP 4326280A JP S636519 B2 JPS636519 B2 JP S636519B2
Authority
JP
Japan
Prior art keywords
film
substrate
pbtio
crystal
target material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55043262A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56138813A (en
Inventor
Heihachiro Hirai
Hiroyoshi Hamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4326280A priority Critical patent/JPS56138813A/ja
Publication of JPS56138813A publication Critical patent/JPS56138813A/ja
Publication of JPS636519B2 publication Critical patent/JPS636519B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Inorganic Insulating Materials (AREA)
JP4326280A 1980-03-31 1980-03-31 Method of forming lead titanate thin film Granted JPS56138813A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4326280A JPS56138813A (en) 1980-03-31 1980-03-31 Method of forming lead titanate thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4326280A JPS56138813A (en) 1980-03-31 1980-03-31 Method of forming lead titanate thin film

Publications (2)

Publication Number Publication Date
JPS56138813A JPS56138813A (en) 1981-10-29
JPS636519B2 true JPS636519B2 (enrdf_load_stackoverflow) 1988-02-10

Family

ID=12658930

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4326280A Granted JPS56138813A (en) 1980-03-31 1980-03-31 Method of forming lead titanate thin film

Country Status (1)

Country Link
JP (1) JPS56138813A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58186105A (ja) * 1982-04-26 1983-10-31 松下電器産業株式会社 強誘電体薄膜素子
JPS61274342A (ja) * 1985-05-29 1986-12-04 Ube Ind Ltd 強誘電体素子およびその製造法

Also Published As

Publication number Publication date
JPS56138813A (en) 1981-10-29

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