JPH053439B2 - - Google Patents
Info
- Publication number
- JPH053439B2 JPH053439B2 JP61199244A JP19924486A JPH053439B2 JP H053439 B2 JPH053439 B2 JP H053439B2 JP 61199244 A JP61199244 A JP 61199244A JP 19924486 A JP19924486 A JP 19924486A JP H053439 B2 JPH053439 B2 JP H053439B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- dielectric
- epitaxial film
- mgal
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Inorganic Insulating Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61199244A JPS6355198A (ja) | 1986-08-25 | 1986-08-25 | 誘電体薄膜デバイス用基板 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61199244A JPS6355198A (ja) | 1986-08-25 | 1986-08-25 | 誘電体薄膜デバイス用基板 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6355198A JPS6355198A (ja) | 1988-03-09 |
| JPH053439B2 true JPH053439B2 (enrdf_load_stackoverflow) | 1993-01-14 |
Family
ID=16404564
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61199244A Granted JPS6355198A (ja) | 1986-08-25 | 1986-08-25 | 誘電体薄膜デバイス用基板 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6355198A (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2712780B2 (ja) * | 1990-07-19 | 1998-02-16 | 松下電器産業株式会社 | 高周波加熱装置 |
| JPH06196648A (ja) * | 1992-12-25 | 1994-07-15 | Fuji Xerox Co Ltd | 配向性強誘電体薄膜素子 |
| JP2004158717A (ja) * | 2002-11-07 | 2004-06-03 | Fujitsu Ltd | 薄膜積層体、その薄膜積層体を用いた電子装置及びアクチュエータ、並びにアクチュエータの製造方法 |
| AU2003203395A1 (en) * | 2003-01-27 | 2004-08-23 | Fujitsu Limited | Optical deflection device, and manufacturing method thereof |
| JP2008252071A (ja) * | 2007-03-06 | 2008-10-16 | Fujifilm Corp | 圧電素子とその製造方法、及び液体吐出装置 |
-
1986
- 1986-08-25 JP JP61199244A patent/JPS6355198A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6355198A (ja) | 1988-03-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |