JPS6362862A - Ti及びTi合金のTiN被覆品の製造方法 - Google Patents
Ti及びTi合金のTiN被覆品の製造方法Info
- Publication number
- JPS6362862A JPS6362862A JP20642086A JP20642086A JPS6362862A JP S6362862 A JPS6362862 A JP S6362862A JP 20642086 A JP20642086 A JP 20642086A JP 20642086 A JP20642086 A JP 20642086A JP S6362862 A JPS6362862 A JP S6362862A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- work
- base material
- coating layer
- tin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910001069 Ti alloy Inorganic materials 0.000 title claims description 15
- 239000000919 ceramic Substances 0.000 title claims description 4
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 239000000463 material Substances 0.000 claims abstract description 21
- 239000011247 coating layer Substances 0.000 claims abstract description 20
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 19
- 239000010410 layer Substances 0.000 claims abstract description 16
- 238000001704 evaporation Methods 0.000 claims abstract description 9
- 238000000576 coating method Methods 0.000 claims abstract description 6
- 239000011248 coating agent Substances 0.000 claims abstract description 5
- 239000002344 surface layer Substances 0.000 claims abstract description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 22
- 150000002500 ions Chemical class 0.000 abstract description 9
- 238000010891 electric arc Methods 0.000 abstract description 4
- 230000008020 evaporation Effects 0.000 abstract description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 2
- 239000001301 oxygen Substances 0.000 abstract description 2
- 229910052760 oxygen Inorganic materials 0.000 abstract description 2
- 238000004544 sputter deposition Methods 0.000 abstract description 2
- 239000010936 titanium Substances 0.000 description 42
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 12
- 238000005121 nitriding Methods 0.000 description 6
- 230000009466 transformation Effects 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000005524 ceramic coating Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20642086A JPS6362862A (ja) | 1986-09-02 | 1986-09-02 | Ti及びTi合金のTiN被覆品の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20642086A JPS6362862A (ja) | 1986-09-02 | 1986-09-02 | Ti及びTi合金のTiN被覆品の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6362862A true JPS6362862A (ja) | 1988-03-19 |
JPH029104B2 JPH029104B2 (enrdf_load_stackoverflow) | 1990-02-28 |
Family
ID=16523080
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20642086A Granted JPS6362862A (ja) | 1986-09-02 | 1986-09-02 | Ti及びTi合金のTiN被覆品の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6362862A (enrdf_load_stackoverflow) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0280553A (ja) * | 1988-09-16 | 1990-03-20 | Shimadzu Corp | 薄膜製造方法 |
US5485259A (en) * | 1993-07-19 | 1996-01-16 | Fuji Xerox Co., Ltd. | Fusing device |
US5619315A (en) * | 1993-12-29 | 1997-04-08 | Fuji Xerox Co., Ltd. | Fixing apparatus using a coated elastic member for use in an image forming apparatus |
US5700546A (en) * | 1994-05-30 | 1997-12-23 | Ebara Corporation | Seal or bearing |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6886239B2 (ja) * | 2015-12-28 | 2021-06-16 | 株式会社Nbcメッシュテック | 粉体付着抑制チタン部材 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50157269A (enrdf_load_stackoverflow) * | 1974-06-10 | 1975-12-19 | ||
JPS52149275A (en) * | 1976-06-07 | 1977-12-12 | Tsuneo Nishida | Casing parts for golden colored portable articles |
-
1986
- 1986-09-02 JP JP20642086A patent/JPS6362862A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50157269A (enrdf_load_stackoverflow) * | 1974-06-10 | 1975-12-19 | ||
JPS52149275A (en) * | 1976-06-07 | 1977-12-12 | Tsuneo Nishida | Casing parts for golden colored portable articles |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0280553A (ja) * | 1988-09-16 | 1990-03-20 | Shimadzu Corp | 薄膜製造方法 |
US5485259A (en) * | 1993-07-19 | 1996-01-16 | Fuji Xerox Co., Ltd. | Fusing device |
US5619315A (en) * | 1993-12-29 | 1997-04-08 | Fuji Xerox Co., Ltd. | Fixing apparatus using a coated elastic member for use in an image forming apparatus |
US5700546A (en) * | 1994-05-30 | 1997-12-23 | Ebara Corporation | Seal or bearing |
Also Published As
Publication number | Publication date |
---|---|
JPH029104B2 (enrdf_load_stackoverflow) | 1990-02-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3039381B2 (ja) | 耐高温酸化特性に優れた複合硬質皮膜の形成法 | |
EP0158271B1 (en) | Process for ion nitriding aluminum or aluminum alloys | |
JPH06507210A (ja) | 炭素質材料上に窒化チタンを形成するための表面処理および蒸着方法 | |
GB2226334A (en) | Multilayer coatings | |
JPS6362862A (ja) | Ti及びTi合金のTiN被覆品の製造方法 | |
JPH02125861A (ja) | 被処理物の表面に被膜を形成する方法 | |
JPS62103379A (ja) | Cvd装置およびドライ・エツチング装置における真空チヤンバの製造方法 | |
EP0646660B1 (en) | Production of carriers for surface plasmon resonance | |
US5474815A (en) | Production of carriers for surface plasmon resonance | |
EP0646659A1 (en) | Production of carriers for surface plasmon resonance | |
JPH0429612B2 (enrdf_load_stackoverflow) | ||
US20120196148A1 (en) | Coated article and method of making the same | |
JPS6342362A (ja) | 表面被覆鋼材の製造方法 | |
JPS5836671B2 (ja) | 表面処理方法 | |
JPS62202071A (ja) | アルミニウム材のイオン窒化方法 | |
JPS6320460A (ja) | イオンプレ−テイング処理材の熱処理方法 | |
JPH01168857A (ja) | 窒化チタン膜の形成方法 | |
JPH0723531B2 (ja) | アルミニウム材の表面処理方法 | |
JP2600092B2 (ja) | 金属系材料の表面改質方法 | |
JPS6320445A (ja) | イオンプレ−テイング | |
JPS61204367A (ja) | TiN被覆ステンレス鋼物品の製法 | |
JPH051365A (ja) | 金属表面処理方法 | |
JPS60106961A (ja) | 多層コ−テイング法 | |
JPS6293366A (ja) | 窒化ホウ素膜の作製方法 | |
JPS6058200B2 (ja) | ダイヤモンド部品の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |