JPS6362100B2 - - Google Patents
Info
- Publication number
- JPS6362100B2 JPS6362100B2 JP56155042A JP15504281A JPS6362100B2 JP S6362100 B2 JPS6362100 B2 JP S6362100B2 JP 56155042 A JP56155042 A JP 56155042A JP 15504281 A JP15504281 A JP 15504281A JP S6362100 B2 JPS6362100 B2 JP S6362100B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- oxide film
- polycrystalline silicon
- forming
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/01—Manufacture or treatment
- H10W10/011—Manufacture or treatment of isolation regions comprising dielectric materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/10—Isolation regions comprising dielectric materials
Landscapes
- Local Oxidation Of Silicon (AREA)
- Bipolar Transistors (AREA)
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56155042A JPS5856433A (ja) | 1981-09-30 | 1981-09-30 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56155042A JPS5856433A (ja) | 1981-09-30 | 1981-09-30 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5856433A JPS5856433A (ja) | 1983-04-04 |
| JPS6362100B2 true JPS6362100B2 (enExample) | 1988-12-01 |
Family
ID=15597393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56155042A Granted JPS5856433A (ja) | 1981-09-30 | 1981-09-30 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5856433A (enExample) |
-
1981
- 1981-09-30 JP JP56155042A patent/JPS5856433A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5856433A (ja) | 1983-04-04 |
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