JPS6362097B2 - - Google Patents

Info

Publication number
JPS6362097B2
JPS6362097B2 JP56044738A JP4473881A JPS6362097B2 JP S6362097 B2 JPS6362097 B2 JP S6362097B2 JP 56044738 A JP56044738 A JP 56044738A JP 4473881 A JP4473881 A JP 4473881A JP S6362097 B2 JPS6362097 B2 JP S6362097B2
Authority
JP
Japan
Prior art keywords
manipulator
ball
amount
movement
contacts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56044738A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57160136A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP56044738A priority Critical patent/JPS57160136A/ja
Publication of JPS57160136A publication Critical patent/JPS57160136A/ja
Publication of JPS6362097B2 publication Critical patent/JPS6362097B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W99/00—Subject matter not provided for in other groups of this subclass

Landscapes

  • Wire Bonding (AREA)
JP56044738A 1981-03-28 1981-03-28 Manipulator in planar movement system for semiconductor device Granted JPS57160136A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56044738A JPS57160136A (en) 1981-03-28 1981-03-28 Manipulator in planar movement system for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56044738A JPS57160136A (en) 1981-03-28 1981-03-28 Manipulator in planar movement system for semiconductor device

Publications (2)

Publication Number Publication Date
JPS57160136A JPS57160136A (en) 1982-10-02
JPS6362097B2 true JPS6362097B2 (https=) 1988-12-01

Family

ID=12699780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56044738A Granted JPS57160136A (en) 1981-03-28 1981-03-28 Manipulator in planar movement system for semiconductor device

Country Status (1)

Country Link
JP (1) JPS57160136A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0889692A (ja) * 1994-09-27 1996-04-09 Tokyo Sensen Kikai Seisakusho:Kk 物干しハンガー

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5724565B2 (https=) * 1974-05-29 1982-05-25
US3987685A (en) * 1974-12-16 1976-10-26 Xerox Corporation Cursor position device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0889692A (ja) * 1994-09-27 1996-04-09 Tokyo Sensen Kikai Seisakusho:Kk 物干しハンガー

Also Published As

Publication number Publication date
JPS57160136A (en) 1982-10-02

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