JPS57160136A - Manipulator in planar movement system for semiconductor device - Google Patents

Manipulator in planar movement system for semiconductor device

Info

Publication number
JPS57160136A
JPS57160136A JP56044738A JP4473881A JPS57160136A JP S57160136 A JPS57160136 A JP S57160136A JP 56044738 A JP56044738 A JP 56044738A JP 4473881 A JP4473881 A JP 4473881A JP S57160136 A JPS57160136 A JP S57160136A
Authority
JP
Japan
Prior art keywords
ball
contactors
rotation
manipulator
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56044738A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6362097B2 (https=
Inventor
Nobuhito Yamazaki
Takeshi Hasegawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinkawa Ltd
Original Assignee
Shinkawa Ltd
Shinkawa Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinkawa Ltd, Shinkawa Seisakusho Co Ltd filed Critical Shinkawa Ltd
Priority to JP56044738A priority Critical patent/JPS57160136A/ja
Publication of JPS57160136A publication Critical patent/JPS57160136A/ja
Publication of JPS6362097B2 publication Critical patent/JPS6362097B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W99/00—Subject matter not provided for in other groups of this subclass

Landscapes

  • Wire Bonding (AREA)
JP56044738A 1981-03-28 1981-03-28 Manipulator in planar movement system for semiconductor device Granted JPS57160136A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56044738A JPS57160136A (en) 1981-03-28 1981-03-28 Manipulator in planar movement system for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56044738A JPS57160136A (en) 1981-03-28 1981-03-28 Manipulator in planar movement system for semiconductor device

Publications (2)

Publication Number Publication Date
JPS57160136A true JPS57160136A (en) 1982-10-02
JPS6362097B2 JPS6362097B2 (https=) 1988-12-01

Family

ID=12699780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56044738A Granted JPS57160136A (en) 1981-03-28 1981-03-28 Manipulator in planar movement system for semiconductor device

Country Status (1)

Country Link
JP (1) JPS57160136A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0889692A (ja) * 1994-09-27 1996-04-09 Tokyo Sensen Kikai Seisakusho:Kk 物干しハンガー

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50153581A (https=) * 1974-05-29 1975-12-10
JPS5183737A (https=) * 1974-12-16 1976-07-22 Xerox Corp

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50153581A (https=) * 1974-05-29 1975-12-10
JPS5183737A (https=) * 1974-12-16 1976-07-22 Xerox Corp

Also Published As

Publication number Publication date
JPS6362097B2 (https=) 1988-12-01

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