JPS50153581A - - Google Patents
Info
- Publication number
- JPS50153581A JPS50153581A JP5965274A JP5965274A JPS50153581A JP S50153581 A JPS50153581 A JP S50153581A JP 5965274 A JP5965274 A JP 5965274A JP 5965274 A JP5965274 A JP 5965274A JP S50153581 A JPS50153581 A JP S50153581A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Wire Bonding (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5965274A JPS5724565B2 (https=) | 1974-05-29 | 1974-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5965274A JPS5724565B2 (https=) | 1974-05-29 | 1974-05-29 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58009611A Division JPS58139436A (ja) | 1983-01-24 | 1983-01-24 | 平面移動装置用マニピユレ−タ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50153581A true JPS50153581A (https=) | 1975-12-10 |
| JPS5724565B2 JPS5724565B2 (https=) | 1982-05-25 |
Family
ID=13119335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5965274A Expired JPS5724565B2 (https=) | 1974-05-29 | 1974-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5724565B2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57160136A (en) * | 1981-03-28 | 1982-10-02 | Shinkawa Ltd | Manipulator in planar movement system for semiconductor device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4310557Y1 (https=) * | 1966-08-12 | 1968-05-08 | ||
| JPS4926691A (https=) * | 1972-07-05 | 1974-03-09 | ||
| JPS4977181A (https=) * | 1972-10-30 | 1974-07-25 |
-
1974
- 1974-05-29 JP JP5965274A patent/JPS5724565B2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4310557Y1 (https=) * | 1966-08-12 | 1968-05-08 | ||
| JPS4926691A (https=) * | 1972-07-05 | 1974-03-09 | ||
| JPS4977181A (https=) * | 1972-10-30 | 1974-07-25 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57160136A (en) * | 1981-03-28 | 1982-10-02 | Shinkawa Ltd | Manipulator in planar movement system for semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5724565B2 (https=) | 1982-05-25 |