JPS57160136A - Manipulator in planar movement system for semiconductor device - Google Patents
Manipulator in planar movement system for semiconductor deviceInfo
- Publication number
- JPS57160136A JPS57160136A JP4473881A JP4473881A JPS57160136A JP S57160136 A JPS57160136 A JP S57160136A JP 4473881 A JP4473881 A JP 4473881A JP 4473881 A JP4473881 A JP 4473881A JP S57160136 A JPS57160136 A JP S57160136A
- Authority
- JP
- Japan
- Prior art keywords
- ball
- contactors
- rotation
- manipulator
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
Abstract
PURPOSE:To obtain a manipulator in planar movement system for semiconductor device having reduced size and easy to manipulate, by arranging two orthogonal contactors on a rotatable ball and using, as a moving bed driving signal, an electric signal representing the amount of rotation of each contactor. CONSTITUTION:A spherical ball 1 is supported at three points by rollers 4 held on a bottom plate 2. A part of the ball 1 projects out from a window 6a formed in the upper plate 6 fixed to the bottom plate 2. Two cylindrical contactors 9 and 10 are pressed against two points of the ball 1 spaced 90 deg. from each other around the center of the ball 1. A transducer 11, 12, consisting of encoders for converting the rotation amount into electric signal, are fixed to respective contactors 9, 10. As the ball 1 is rotated by, for example, finger or the like touching at the part of the ball projected out from the window 6a in the upper plate 6, the contactors 9 and 10 are rotated by amounts corresponding to the components of rotation of the ball in respective directions, and the rotation amounts are converted into electric signals by respective transducers 11 and 12.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4473881A JPS57160136A (en) | 1981-03-28 | 1981-03-28 | Manipulator in planar movement system for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4473881A JPS57160136A (en) | 1981-03-28 | 1981-03-28 | Manipulator in planar movement system for semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57160136A true JPS57160136A (en) | 1982-10-02 |
JPS6362097B2 JPS6362097B2 (en) | 1988-12-01 |
Family
ID=12699780
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4473881A Granted JPS57160136A (en) | 1981-03-28 | 1981-03-28 | Manipulator in planar movement system for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57160136A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0889692A (en) * | 1994-09-27 | 1996-04-09 | Tokyo Sensen Kikai Seisakusho:Kk | Clothes dryer hanger |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50153581A (en) * | 1974-05-29 | 1975-12-10 | ||
JPS5183737A (en) * | 1974-12-16 | 1976-07-22 | Xerox Corp |
-
1981
- 1981-03-28 JP JP4473881A patent/JPS57160136A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50153581A (en) * | 1974-05-29 | 1975-12-10 | ||
JPS5183737A (en) * | 1974-12-16 | 1976-07-22 | Xerox Corp |
Also Published As
Publication number | Publication date |
---|---|
JPS6362097B2 (en) | 1988-12-01 |
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