JPS57160136A - Manipulator in planar movement system for semiconductor device - Google Patents

Manipulator in planar movement system for semiconductor device

Info

Publication number
JPS57160136A
JPS57160136A JP4473881A JP4473881A JPS57160136A JP S57160136 A JPS57160136 A JP S57160136A JP 4473881 A JP4473881 A JP 4473881A JP 4473881 A JP4473881 A JP 4473881A JP S57160136 A JPS57160136 A JP S57160136A
Authority
JP
Japan
Prior art keywords
ball
contactors
rotation
manipulator
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4473881A
Other languages
Japanese (ja)
Other versions
JPS6362097B2 (en
Inventor
Nobuhito Yamazaki
Takeshi Hasegawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinkawa Ltd
Original Assignee
Shinkawa Ltd
Shinkawa Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinkawa Ltd, Shinkawa Seisakusho Co Ltd filed Critical Shinkawa Ltd
Priority to JP4473881A priority Critical patent/JPS57160136A/en
Publication of JPS57160136A publication Critical patent/JPS57160136A/en
Publication of JPS6362097B2 publication Critical patent/JPS6362097B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01033Arsenic [As]

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)

Abstract

PURPOSE:To obtain a manipulator in planar movement system for semiconductor device having reduced size and easy to manipulate, by arranging two orthogonal contactors on a rotatable ball and using, as a moving bed driving signal, an electric signal representing the amount of rotation of each contactor. CONSTITUTION:A spherical ball 1 is supported at three points by rollers 4 held on a bottom plate 2. A part of the ball 1 projects out from a window 6a formed in the upper plate 6 fixed to the bottom plate 2. Two cylindrical contactors 9 and 10 are pressed against two points of the ball 1 spaced 90 deg. from each other around the center of the ball 1. A transducer 11, 12, consisting of encoders for converting the rotation amount into electric signal, are fixed to respective contactors 9, 10. As the ball 1 is rotated by, for example, finger or the like touching at the part of the ball projected out from the window 6a in the upper plate 6, the contactors 9 and 10 are rotated by amounts corresponding to the components of rotation of the ball in respective directions, and the rotation amounts are converted into electric signals by respective transducers 11 and 12.
JP4473881A 1981-03-28 1981-03-28 Manipulator in planar movement system for semiconductor device Granted JPS57160136A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4473881A JPS57160136A (en) 1981-03-28 1981-03-28 Manipulator in planar movement system for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4473881A JPS57160136A (en) 1981-03-28 1981-03-28 Manipulator in planar movement system for semiconductor device

Publications (2)

Publication Number Publication Date
JPS57160136A true JPS57160136A (en) 1982-10-02
JPS6362097B2 JPS6362097B2 (en) 1988-12-01

Family

ID=12699780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4473881A Granted JPS57160136A (en) 1981-03-28 1981-03-28 Manipulator in planar movement system for semiconductor device

Country Status (1)

Country Link
JP (1) JPS57160136A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0889692A (en) * 1994-09-27 1996-04-09 Tokyo Sensen Kikai Seisakusho:Kk Clothes dryer hanger

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50153581A (en) * 1974-05-29 1975-12-10
JPS5183737A (en) * 1974-12-16 1976-07-22 Xerox Corp

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50153581A (en) * 1974-05-29 1975-12-10
JPS5183737A (en) * 1974-12-16 1976-07-22 Xerox Corp

Also Published As

Publication number Publication date
JPS6362097B2 (en) 1988-12-01

Similar Documents

Publication Publication Date Title
EP0178805A3 (en) Wireless mouse apparatus
GB1451162A (en) Position indicator for a display system
JPS6471679A (en) Robot-controller
CA2056304A1 (en) Information processing and apparatus including inputing implement and tablet
CA2008098A1 (en) Writing doll
IT8219102A0 (en) DEVICE FOR TRANSFORMING A ROTARY MOVEMENT INTO A LINEAR MOVEMENT BY MEANS OF COAXIAL MEANS WITH INTERPOSED NON-DRIVEN WHEELS.
JPS57160136A (en) Manipulator in planar movement system for semiconductor device
KR900700974A (en) Device for controlling moving mark of display
JPS5217198A (en) Vacuum container for nuclear fission device
JPS53138335A (en) Electrostatic recorder
JPS5729928A (en) Endurance tester
JPH0423282Y2 (en)
JPS5249564A (en) Guiding apparatus for industrial robot
JPS5232186A (en) Spherical surface processing device
JPS647217A (en) Device for instructing cursor movement
JPS5753616A (en) Signal generating method
JPS5351832A (en) Pivot mechanism
JPS53137356A (en) Adaptable conductive structure
JPS5433951A (en) Intermittent moving unit
JPS5541746A (en) Movement controlling device
JPS6431437U (en)
GB1519384A (en) Mechanism for operating a switch
EP0241431A3 (en) Balancing-vessel transducer with intercommunicating chambers for the conversion of a pneumatic signal into a quantifiable output
JPS6456039A (en) Ultrasonic probe
JPS56164273A (en) Ununiform crank moving device