JPS6359968B2 - - Google Patents

Info

Publication number
JPS6359968B2
JPS6359968B2 JP9849482A JP9849482A JPS6359968B2 JP S6359968 B2 JPS6359968 B2 JP S6359968B2 JP 9849482 A JP9849482 A JP 9849482A JP 9849482 A JP9849482 A JP 9849482A JP S6359968 B2 JPS6359968 B2 JP S6359968B2
Authority
JP
Japan
Prior art keywords
silicon
pellets
carbon
chlorine
raw material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9849482A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58217421A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9849482A priority Critical patent/JPS58217421A/ja
Publication of JPS58217421A publication Critical patent/JPS58217421A/ja
Publication of JPS6359968B2 publication Critical patent/JPS6359968B2/ja
Granted legal-status Critical Current

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  • Silicon Compounds (AREA)
JP9849482A 1982-06-10 1982-06-10 四塩化ケイ素の製造法 Granted JPS58217421A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9849482A JPS58217421A (ja) 1982-06-10 1982-06-10 四塩化ケイ素の製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9849482A JPS58217421A (ja) 1982-06-10 1982-06-10 四塩化ケイ素の製造法

Publications (2)

Publication Number Publication Date
JPS58217421A JPS58217421A (ja) 1983-12-17
JPS6359968B2 true JPS6359968B2 (enrdf_load_stackoverflow) 1988-11-22

Family

ID=14221193

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9849482A Granted JPS58217421A (ja) 1982-06-10 1982-06-10 四塩化ケイ素の製造法

Country Status (1)

Country Link
JP (1) JPS58217421A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5755150B2 (ja) * 2009-12-22 2015-07-29 東邦チタニウム株式会社 ポリシリコンの製造方法および四塩化ケイ素の製造方法

Also Published As

Publication number Publication date
JPS58217421A (ja) 1983-12-17

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