JPS6359268B2 - - Google Patents
Info
- Publication number
- JPS6359268B2 JPS6359268B2 JP57233818A JP23381882A JPS6359268B2 JP S6359268 B2 JPS6359268 B2 JP S6359268B2 JP 57233818 A JP57233818 A JP 57233818A JP 23381882 A JP23381882 A JP 23381882A JP S6359268 B2 JPS6359268 B2 JP S6359268B2
- Authority
- JP
- Japan
- Prior art keywords
- type
- semiconductor layer
- layer
- gaas
- graded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 58
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 27
- 150000001875 compounds Chemical class 0.000 claims description 9
- 230000005533 two-dimensional electron gas Effects 0.000 claims description 9
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 2
- 238000005530 etching Methods 0.000 description 9
- 238000001312 dry etching Methods 0.000 description 7
- 230000004888 barrier function Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 101100264195 Caenorhabditis elegans app-1 gene Proteins 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 125000005842 heteroatom Chemical group 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/40—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels
- H10D30/47—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels having 2D charge carrier gas channels, e.g. nanoribbon FETs or high electron mobility transistors [HEMT]
- H10D30/471—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT]
- H10D30/475—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having wider bandgap layer formed on top of lower bandgap active layer, e.g. undoped barrier HEMTs such as i-AlGaN/GaN HEMTs
- H10D30/4755—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having wider bandgap layer formed on top of lower bandgap active layer, e.g. undoped barrier HEMTs such as i-AlGaN/GaN HEMTs having wide bandgap charge-carrier supplying layers, e.g. modulation doped HEMTs such as n-AlGaAs/GaAs HEMTs
Landscapes
- Bipolar Transistors (AREA)
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57233818A JPS59124771A (ja) | 1982-12-30 | 1982-12-30 | 化合物半導体装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57233818A JPS59124771A (ja) | 1982-12-30 | 1982-12-30 | 化合物半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59124771A JPS59124771A (ja) | 1984-07-18 |
JPS6359268B2 true JPS6359268B2 (enrdf_load_stackoverflow) | 1988-11-18 |
Family
ID=16961046
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57233818A Granted JPS59124771A (ja) | 1982-12-30 | 1982-12-30 | 化合物半導体装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59124771A (enrdf_load_stackoverflow) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4745448A (en) * | 1985-12-24 | 1988-05-17 | Raytheon Company | Semiconductor devices having compensated buffer layers |
JPH0787246B2 (ja) * | 1987-08-20 | 1995-09-20 | 富士通株式会社 | 半導体装置 |
JPH01107578A (ja) * | 1987-09-25 | 1989-04-25 | Siemens Ag | 高電子移動度電界効果トランジスタ |
JPH01199475A (ja) * | 1988-02-03 | 1989-08-10 | Sanyo Electric Co Ltd | ヘテロ接合電界効果トランジスタ |
JP2005191449A (ja) * | 2003-12-26 | 2005-07-14 | Matsushita Electric Ind Co Ltd | 電界効果トランジスタ |
-
1982
- 1982-12-30 JP JP57233818A patent/JPS59124771A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS59124771A (ja) | 1984-07-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4663643A (en) | Semiconductor device and process for producing the same | |
US4908325A (en) | Method of making heterojunction transistors with wide band-gap stop etch layer | |
US6391696B1 (en) | Field effect transistor and method of manufacturing thereof | |
JPH077004A (ja) | 半導体エッチング液,半導体エッチング方法,及びGaAs面の判定方法 | |
USRE36185E (en) | Method of fabricating Group III-V compound semiconductor devices using selective etching | |
JPS61121369A (ja) | 半導体装置 | |
EP0391380B1 (en) | HEMT Structure | |
US5729030A (en) | Semiconductor device | |
JPS6359268B2 (enrdf_load_stackoverflow) | ||
US4689646A (en) | Depletion mode two-dimensional electron gas field effect transistor and the method for manufacturing the same | |
JP3084820B2 (ja) | 化合物半導体装置 | |
JP2757258B2 (ja) | 超格子素子の製造方法 | |
JP3038737B2 (ja) | 量子細線半導体装置およびその製造方法 | |
JPH0817241B2 (ja) | 細線電界効果トランジスタ及びその製造方法 | |
JPS6235677A (ja) | 反転型高電子移動度トランジスタ装置 | |
JPH07105490B2 (ja) | 半導体装置 | |
JPS6357948B2 (enrdf_load_stackoverflow) | ||
JP3156279B2 (ja) | 半導体装置の製造方法 | |
JPS62274675A (ja) | 電界効果トランジスタの製造方法 | |
JP2668418B2 (ja) | 半導体装置 | |
JPS61116877A (ja) | 電界効果トランジスタの製造方法 | |
KR20240043176A (ko) | 금속산화물반도체 고전자 이동도 트랜지스터의 제조방법 및 이에 의해 제조된 금속산화물반도체 고전자 이동도 트랜지스터 | |
JP2964170B2 (ja) | ヘテロ接合電界効果半導体装置 | |
JP3263869B2 (ja) | 共鳴トンネル型ホットエレクトロントランジスタ | |
JPH06196504A (ja) | 半導体装置およびその製造方法 |