JPS6359257B2 - - Google Patents

Info

Publication number
JPS6359257B2
JPS6359257B2 JP53050317A JP5031778A JPS6359257B2 JP S6359257 B2 JPS6359257 B2 JP S6359257B2 JP 53050317 A JP53050317 A JP 53050317A JP 5031778 A JP5031778 A JP 5031778A JP S6359257 B2 JPS6359257 B2 JP S6359257B2
Authority
JP
Japan
Prior art keywords
polycrystalline silicon
layer
silicon layer
metal layer
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53050317A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54141585A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5031778A priority Critical patent/JPS54141585A/ja
Publication of JPS54141585A publication Critical patent/JPS54141585A/ja
Publication of JPS6359257B2 publication Critical patent/JPS6359257B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D88/00—Three-dimensional [3D] integrated devices

Landscapes

  • Bipolar Integrated Circuits (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP5031778A 1978-04-26 1978-04-26 Semiconductor integrated circuit device Granted JPS54141585A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5031778A JPS54141585A (en) 1978-04-26 1978-04-26 Semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5031778A JPS54141585A (en) 1978-04-26 1978-04-26 Semiconductor integrated circuit device

Publications (2)

Publication Number Publication Date
JPS54141585A JPS54141585A (en) 1979-11-02
JPS6359257B2 true JPS6359257B2 (en:Method) 1988-11-18

Family

ID=12855516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5031778A Granted JPS54141585A (en) 1978-04-26 1978-04-26 Semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS54141585A (en:Method)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55148422A (en) * 1979-05-09 1980-11-19 Hitachi Ltd Manufacturing of semiconductor device
JPS56121264U (en:Method) * 1980-02-18 1981-09-16
JPS59119756A (ja) * 1982-12-25 1984-07-11 Toshiba Corp 半導体装置
JPS60150678A (ja) * 1984-01-18 1985-08-08 Mitsubishi Electric Corp 半導体装置の入力保護回路
JPS61263254A (ja) * 1985-05-17 1986-11-21 Nec Corp 入力保護装置
JPH04355969A (ja) * 1991-08-22 1992-12-09 Rohm Co Ltd 個別ダイオード装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4943574A (en:Method) * 1972-08-30 1974-04-24

Also Published As

Publication number Publication date
JPS54141585A (en) 1979-11-02

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