JPS635913B2 - - Google Patents

Info

Publication number
JPS635913B2
JPS635913B2 JP57223055A JP22305582A JPS635913B2 JP S635913 B2 JPS635913 B2 JP S635913B2 JP 57223055 A JP57223055 A JP 57223055A JP 22305582 A JP22305582 A JP 22305582A JP S635913 B2 JPS635913 B2 JP S635913B2
Authority
JP
Japan
Prior art keywords
semiconductor layer
film
annealing
conductor
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57223055A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59114853A (ja
Inventor
Toshiaki Myajima
Masayoshi Koba
Atsushi Kudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP57223055A priority Critical patent/JPS59114853A/ja
Publication of JPS59114853A publication Critical patent/JPS59114853A/ja
Publication of JPS635913B2 publication Critical patent/JPS635913B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/3814—
    • H10P14/3808—
    • H10P14/2905—
    • H10P14/3238—
    • H10P14/3241—
    • H10P14/3251—
    • H10P14/3411—
    • H10P14/3458—
    • H10P14/3818—

Landscapes

  • Recrystallisation Techniques (AREA)
JP57223055A 1982-12-21 1982-12-21 積層集積回路素子の製造方法 Granted JPS59114853A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57223055A JPS59114853A (ja) 1982-12-21 1982-12-21 積層集積回路素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57223055A JPS59114853A (ja) 1982-12-21 1982-12-21 積層集積回路素子の製造方法

Publications (2)

Publication Number Publication Date
JPS59114853A JPS59114853A (ja) 1984-07-03
JPS635913B2 true JPS635913B2 (cg-RX-API-DMAC10.html) 1988-02-05

Family

ID=16792125

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57223055A Granted JPS59114853A (ja) 1982-12-21 1982-12-21 積層集積回路素子の製造方法

Country Status (1)

Country Link
JP (1) JPS59114853A (cg-RX-API-DMAC10.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5227318A (en) * 1989-12-06 1993-07-13 General Motors Corporation Method of making a cubic boron nitride bipolar transistor
US5264296A (en) * 1989-12-06 1993-11-23 General Motors Corporation Laser depositon of crystalline boron nitride films
US5330611A (en) * 1989-12-06 1994-07-19 General Motors Corporation Cubic boron nitride carbide films
US5232862A (en) * 1990-07-16 1993-08-03 General Motors Corporation Method of fabricating a transistor having a cubic boron nitride layer
US5142350A (en) * 1990-07-16 1992-08-25 General Motors Corporation Transistor having cubic boron nitride layer
WO2009013873A1 (ja) * 2007-07-20 2009-01-29 Sharp Kabushiki Kaisha 積層膜の製造方法、半導体装置の製造方法、半導体装置および表示装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821854A (ja) * 1981-07-31 1983-02-08 Sanyo Electric Co Ltd 半導体回路素子

Also Published As

Publication number Publication date
JPS59114853A (ja) 1984-07-03

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