JPS6357399B2 - - Google Patents
Info
- Publication number
- JPS6357399B2 JPS6357399B2 JP58244776A JP24477683A JPS6357399B2 JP S6357399 B2 JPS6357399 B2 JP S6357399B2 JP 58244776 A JP58244776 A JP 58244776A JP 24477683 A JP24477683 A JP 24477683A JP S6357399 B2 JPS6357399 B2 JP S6357399B2
- Authority
- JP
- Japan
- Prior art keywords
- diamond
- thin film
- diamond thin
- diaphragm
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010432 diamond Substances 0.000 claims description 47
- 229910003460 diamond Inorganic materials 0.000 claims description 46
- 239000010409 thin film Substances 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000001947 vapour-phase growth Methods 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 239000010408 film Substances 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/04—Diamond
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58244776A JPS60141697A (ja) | 1983-12-27 | 1983-12-27 | ダイヤモンド振動板の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58244776A JPS60141697A (ja) | 1983-12-27 | 1983-12-27 | ダイヤモンド振動板の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60141697A JPS60141697A (ja) | 1985-07-26 |
| JPS6357399B2 true JPS6357399B2 (cg-RX-API-DMAC7.html) | 1988-11-11 |
Family
ID=17123742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58244776A Granted JPS60141697A (ja) | 1983-12-27 | 1983-12-27 | ダイヤモンド振動板の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60141697A (cg-RX-API-DMAC7.html) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5071708A (en) * | 1987-10-20 | 1991-12-10 | Showa Denko K.K. | Composite diamond grain |
| US5130111A (en) * | 1989-08-25 | 1992-07-14 | Wayne State University, Board Of Governors | Synthetic diamond articles and their method of manufacture |
| JPH0385099A (ja) * | 1989-08-29 | 1991-04-10 | Kenwood Corp | スピーカ用振動板及びその製造法 |
| US5110579A (en) * | 1989-09-14 | 1992-05-05 | General Electric Company | Transparent diamond films and method for making |
| EP0459425A1 (en) * | 1990-05-30 | 1991-12-04 | Idemitsu Petrochemical Company Limited | Process for the preparation of diamond |
| US5264071A (en) * | 1990-06-13 | 1993-11-23 | General Electric Company | Free standing diamond sheet and method and apparatus for making same |
| US5439492A (en) * | 1992-06-11 | 1995-08-08 | General Electric Company | Fine grain diamond workpieces |
| JP3023056B2 (ja) * | 1994-09-28 | 2000-03-21 | 東洋鋼鈑株式会社 | ダイヤモンド被覆ろう付け製品の製造方法 |
| GB2413234B (en) * | 2004-04-15 | 2007-09-12 | B & W Loudspeakers | Diaphragms for loudspeaker drive units or microphones |
| GB201209424D0 (en) * | 2012-05-28 | 2012-07-11 | Element Six Ltd | Free-standing non-planar polycrystalline synthetic diamond components |
-
1983
- 1983-12-27 JP JP58244776A patent/JPS60141697A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60141697A (ja) | 1985-07-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5514439A (en) | Wafer support fixtures for rapid thermal processing | |
| JPS6357399B2 (cg-RX-API-DMAC7.html) | ||
| US4142006A (en) | Method of making a high power laser mirror | |
| KR910015717A (ko) | Cvd다이아몬드 공작물 및 그 제조법 | |
| JPH03100177A (ja) | 化学蒸着における支持体上の背面生長を防止する方法 | |
| JP2004359481A (ja) | レンズ成形用レプリカ型の製造方法 | |
| US1532002A (en) | Composite quartz body | |
| JP2763239B2 (ja) | 複層セラミックスるつぼ | |
| TWI226309B (en) | Method for fabricating a diamond film having low surface roughness | |
| JPH06140133A (ja) | 複層セラミックスヒーター | |
| US5178727A (en) | Ceramic membrane device and a method of producing the same | |
| JPH03269501A (ja) | 金属反射鏡およびその製造方法 | |
| JPS60255676A (ja) | 熱分解窒化硼素成形体の製造方法 | |
| JPS58200692A (ja) | スピ−カ用振動板 | |
| JPH02504022A (ja) | 全体を黒くした銀合金の製造方法 | |
| JP2797190B2 (ja) | Ｘ線露光マスクの製造方法 | |
| JPH0778559B2 (ja) | 放射光．Ｘ線反射用ＳｉＣミラー | |
| JPS6161599B2 (cg-RX-API-DMAC7.html) | ||
| TWI496189B (zh) | 製造具結構表面之固態材料之薄獨立層的方法 | |
| JPS60219895A (ja) | スピ−カ用振動板の製造方法 | |
| JP3606473B2 (ja) | 熱分解窒化ほう素容器 | |
| JP2988459B2 (ja) | Ｘ線分光器とその製造方法 | |
| JPS61141299A (ja) | 電気音響変換器用振動板とその製造方法 | |
| JP2001106573A (ja) | グラファイトるつぼの製造方法 | |
| JPH02221131A (ja) | 光学素子成形用型 |