JPS60141697A - ダイヤモンド振動板の製造方法 - Google Patents
ダイヤモンド振動板の製造方法Info
- Publication number
- JPS60141697A JPS60141697A JP58244776A JP24477683A JPS60141697A JP S60141697 A JPS60141697 A JP S60141697A JP 58244776 A JP58244776 A JP 58244776A JP 24477683 A JP24477683 A JP 24477683A JP S60141697 A JPS60141697 A JP S60141697A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- diamond
- base body
- diaphragm
- thermal conductivity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 49
- 239000010432 diamond Substances 0.000 title claims abstract description 49
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 239000010409 thin film Substances 0.000 claims abstract description 31
- 238000010438 heat treatment Methods 0.000 claims abstract description 8
- 239000000463 material Substances 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims description 9
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 239000011733 molybdenum Substances 0.000 claims description 4
- 238000001947 vapour-phase growth Methods 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 2
- 238000001816 cooling Methods 0.000 abstract description 3
- 229930195733 hydrocarbon Natural products 0.000 abstract description 2
- 150000002430 hydrocarbons Chemical class 0.000 abstract description 2
- 239000001257 hydrogen Substances 0.000 abstract description 2
- 229910052739 hydrogen Inorganic materials 0.000 abstract description 2
- 229910052710 silicon Inorganic materials 0.000 abstract description 2
- 239000010703 silicon Substances 0.000 abstract description 2
- 239000004215 Carbon black (E152) Substances 0.000 abstract 1
- 239000008246 gaseous mixture Substances 0.000 abstract 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 abstract 1
- 239000012808 vapor phase Substances 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 239000010408 film Substances 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/04—Diamond
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58244776A JPS60141697A (ja) | 1983-12-27 | 1983-12-27 | ダイヤモンド振動板の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58244776A JPS60141697A (ja) | 1983-12-27 | 1983-12-27 | ダイヤモンド振動板の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60141697A true JPS60141697A (ja) | 1985-07-26 |
| JPS6357399B2 JPS6357399B2 (cg-RX-API-DMAC7.html) | 1988-11-11 |
Family
ID=17123742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58244776A Granted JPS60141697A (ja) | 1983-12-27 | 1983-12-27 | ダイヤモンド振動板の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60141697A (cg-RX-API-DMAC7.html) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0385099A (ja) * | 1989-08-29 | 1991-04-10 | Kenwood Corp | スピーカ用振動板及びその製造法 |
| US5071708A (en) * | 1987-10-20 | 1991-12-10 | Showa Denko K.K. | Composite diamond grain |
| US5110579A (en) * | 1989-09-14 | 1992-05-05 | General Electric Company | Transparent diamond films and method for making |
| US5130111A (en) * | 1989-08-25 | 1992-07-14 | Wayne State University, Board Of Governors | Synthetic diamond articles and their method of manufacture |
| US5180571A (en) * | 1990-05-30 | 1993-01-19 | Idemitsu Petrochemical Company Limited | Process for the preparation of diamond |
| US5264071A (en) * | 1990-06-13 | 1993-11-23 | General Electric Company | Free standing diamond sheet and method and apparatus for making same |
| JPH0891992A (ja) * | 1994-09-28 | 1996-04-09 | Toyo Kohan Co Ltd | ダイヤモンド被覆ろう付け製品の製造方法 |
| US5523121A (en) * | 1992-06-11 | 1996-06-04 | General Electric Company | Smooth surface CVD diamond films and method for producing same |
| GB2413234A (en) * | 2004-04-15 | 2005-10-19 | B & W Loudspeakers | Diamond diaphragms for loudspeaker drive units or microphones |
| JP2015523952A (ja) * | 2012-05-28 | 2015-08-20 | エレメント シックス テクノロジーズ リミテッド | 自立形非平面状多結晶合成ダイヤモンドコンポーネント |
-
1983
- 1983-12-27 JP JP58244776A patent/JPS60141697A/ja active Granted
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5071708A (en) * | 1987-10-20 | 1991-12-10 | Showa Denko K.K. | Composite diamond grain |
| WO1993013015A1 (fr) * | 1987-10-20 | 1993-07-08 | Kunio Komaki | Grains de diamant composites et leur procede de production |
| US5130111A (en) * | 1989-08-25 | 1992-07-14 | Wayne State University, Board Of Governors | Synthetic diamond articles and their method of manufacture |
| JPH0385099A (ja) * | 1989-08-29 | 1991-04-10 | Kenwood Corp | スピーカ用振動板及びその製造法 |
| US5110579A (en) * | 1989-09-14 | 1992-05-05 | General Electric Company | Transparent diamond films and method for making |
| US5180571A (en) * | 1990-05-30 | 1993-01-19 | Idemitsu Petrochemical Company Limited | Process for the preparation of diamond |
| US5264071A (en) * | 1990-06-13 | 1993-11-23 | General Electric Company | Free standing diamond sheet and method and apparatus for making same |
| US5349922A (en) * | 1990-06-13 | 1994-09-27 | General Electric Company | Free standing diamond sheet and method and apparatus for making same |
| US5523121A (en) * | 1992-06-11 | 1996-06-04 | General Electric Company | Smooth surface CVD diamond films and method for producing same |
| JPH0891992A (ja) * | 1994-09-28 | 1996-04-09 | Toyo Kohan Co Ltd | ダイヤモンド被覆ろう付け製品の製造方法 |
| GB2413234A (en) * | 2004-04-15 | 2005-10-19 | B & W Loudspeakers | Diamond diaphragms for loudspeaker drive units or microphones |
| GB2413234B (en) * | 2004-04-15 | 2007-09-12 | B & W Loudspeakers | Diaphragms for loudspeaker drive units or microphones |
| EP1757160B1 (en) * | 2004-04-15 | 2010-05-19 | B & W Group Ltd. | Diamond diaphragms for loudspeaker drive units or microphones |
| JP2015523952A (ja) * | 2012-05-28 | 2015-08-20 | エレメント シックス テクノロジーズ リミテッド | 自立形非平面状多結晶合成ダイヤモンドコンポーネント |
| US9210972B2 (en) | 2012-05-28 | 2015-12-15 | Element Six Technologies Limited | Free-standing non-planar polycrystalline synthetic diamond components and method of fabrication |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6357399B2 (cg-RX-API-DMAC7.html) | 1988-11-11 |
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