JPS60141697A - Manufacture of diamond diaphragm - Google Patents
Manufacture of diamond diaphragmInfo
- Publication number
- JPS60141697A JPS60141697A JP58244776A JP24477683A JPS60141697A JP S60141697 A JPS60141697 A JP S60141697A JP 58244776 A JP58244776 A JP 58244776A JP 24477683 A JP24477683 A JP 24477683A JP S60141697 A JPS60141697 A JP S60141697A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- diamond
- base body
- diaphragm
- thermal conductivity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/04—Diamond
Abstract
Description
【発明の詳細な説明】
本発明は、スピーカの振動板の形状としたダイヤモンド
薄膜の振動板の製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a diamond thin film diaphragm shaped like a speaker diaphragm.
従来からスピーカ用の振動板として各社の素材が使用さ
れて来たが、高剛性の振動板の素材としてはへリリウム
、ホロン化チタン、アルミナ系セラミック、チタン、ア
ルミニウム等が使用されている。Conventionally, materials from various companies have been used as diaphragms for speakers, and materials such as helium, titanium holonide, alumina ceramic, titanium, and aluminum are used as materials for highly rigid diaphragms.
又、ダイヤモンドを使用した振動板としてはダイヤモン
１−の微粒子をニッケル等の金属で結合したものもある
。Further, as a diaphragm using diamond, there is also one in which fine particles of diamond 1 are bonded with a metal such as nickel.
これ等の振動板のうち、金属を素材として使用したもの
は、金属の薄い板を金型でプレスしたり、振動板の形状
をした基板に蒸着法で金属薄膜を形成した後、基板を薬
品で溶かし、或いは全体を加熱しておいてから急冷して
金属薄膜を剥離する等の方法がとられていた。Among these diaphragms, those that use metal as a material are made by pressing a thin metal plate with a mold, or by forming a thin metal film on a diaphragm-shaped substrate by vapor deposition, and then applying chemicals to the substrate. Methods used include melting the metal, or heating the entire body and then rapidly cooling it to peel off the metal thin film.
しかしながら、プレス成型は金属）炒の厚さを成る程度
以下とすることはできず、皺ができ易く、且つ成型歪が
残り、不規則振動の原因となっていた。However, press molding cannot reduce the thickness of the metal layer to a certain level or less, and wrinkles tend to form, and molding distortion remains, causing irregular vibrations.
又、前記全体を加熱しておいてから急冷する方法では、
全体が同し温度になるため伸びの差が少く、剥離がうま
くゆかない欠点がある。In addition, in the method of heating the whole and then rapidly cooling it,
Since the entire surface is at the same temperature, there is little difference in elongation, which makes peeling difficult.
更に、ダイヤモンドの微粒子をニッケル等の金属で結合
したものは、比重が大きくなり、ダイヤモンドの４り性
が生かせない欠点があった。Furthermore, those in which diamond fine particles are bonded with a metal such as nickel have a disadvantage that the specific gravity becomes large and the four-sidedness of diamond cannot be utilized.
本発明は、透明で高剛性のダイヤモンドを振動板の形状
に形成し、それによって振動板の性能を向上すると共に
、ダイヤモンＩＳの輝きによる美化が可能なダイヤモン
ド振動板を提供し、以って従来の振動板の欠点を除去せ
んとすることを目的とするダイヤモンド振動板の製造方
法である。The present invention provides a diamond diaphragm in which a transparent and highly rigid diamond is formed into the shape of a diaphragm, thereby improving the performance of the diaphragm, and which can beautify with the brilliance of the diamond IS. This method of manufacturing a diamond diaphragm aims to eliminate the drawbacks of the diaphragm.
以下、本発明の実施例を図面について説明する。Embodiments of the present invention will be described below with reference to the drawings.
モリブデン、シリコン、セラミック等のような１０００
℃以上の耐熱性を有し、しかも熱膨張率の小さい材料で
、第１図のような振動板形状の基体ｌを作成する。1000 like molybdenum, silicon, ceramic etc.
A base 1 in the shape of a diaphragm as shown in FIG. 1 is made of a material that has heat resistance above .degree. C. and has a small coefficient of thermal expansion.
この基体１の振動板を形成する表面には、同心円状、或
いは放射線方向、又はランダムに数μ程度の凹凸を形成
しである。The surface of the base 1 forming the diaphragm is provided with concavities and convexities of approximately several microns concentrically, in the radial direction, or randomly.
７００℃〜１０００ ’Ｃの電気か巾に基体１を置き、
この上に１気圧以下でゆっくりと炭化水素及び水素の混
合ガス２を流し、このガスを更に基体１の上に配設した
ヒータ３で加熱して高温化すると、基体１上には膜状に
ダイヤモンド薄膜４が生長してくる。Place the substrate 1 in an electric field at 700°C to 1000'C,
A mixed gas 2 of hydrocarbons and hydrogen is slowly flowed over this at a pressure of 1 atm or less, and when this gas is further heated to a high temperature with a heater 3 disposed above the base 1, a film is formed on the base 1. The diamond thin film 4 grows.
このように生長したダイヤセン１−゛薄膜４が形成され
た基体１を取り出し、一度冷却した後に赤外線ランプ又
はヒータ５をダイヤセン１薄膜４側から照射すると、ダ
イヤモンＦ−′ｆ！、膜４は透明であるため、前記光線
はダイヤモンド薄膜４を通過し、基体１の表面を加熱す
る。When the substrate 1 on which the Diacene 1-' thin film 4 that has grown in this manner is taken out and once cooled, an infrared lamp or heater 5 is irradiated from the Diacene 1 thin film 4 side, a Diamond F-'f! Since the film 4 is transparent, the light beam passes through the diamond film 4 and heats the surface of the substrate 1.
この加熱による熱は基体１が熱伝導率が低いため基体１
の温度はそれ程に上昇せず、ダイヤモンド薄膜４の方が
熱伝導率が高いためダイヤモンド薄膜４ば温度」二昇す
る。The heat due to this heating is absorbed by the base 1 because the base 1 has a low thermal conductivity.
The temperature of the diamond thin film 4 does not rise that much, and since the diamond thin film 4 has a higher thermal conductivity, the temperature of the diamond thin film 4 rises by 2.
例えば、ダイヤモンド薄膜４と、基体１をモリブデンで
形成した時では、熱伝導率、熱膨張率は熱伝導率ｗ ／
ｃｍ ’Ｃ熱膨張率Ｘ １０−６／ ’Ｃダイヤモン
ド ６．６０ ．１．０
モリブデン １．３５ ５．０
と異っているため、昇温したダイヤモンド薄膜４は熱膨
張を起し、上記差によって基体１から剥離し、ダイヤモ
ンド振動板が形成できるものである。For example, when the diamond thin film 4 and the base 1 are made of molybdenum, the thermal conductivity and thermal expansion coefficient are the thermal conductivity w/
cm 'C coefficient of thermal expansion X 10-6/'C Diamond 6.60. 1.0 Molybdenum 1.35 5.0 Therefore, the heated diamond thin film 4 undergoes thermal expansion and peels off from the base 1 due to the above difference, forming a diamond diaphragm.
即ぢ、気相成長法により厚さ１０〜５０μに形成したダ
イヤモンド薄膜４は脆いため、基体１から剥離する際に
、機械的な手段では破ｍしてしまう。In other words, the diamond thin film 4 formed to a thickness of 10 to 50 μm by vapor phase growth is brittle and will break if mechanically used when it is peeled off from the base 1.
又、冷熱の急激な変化で剥離しようとしても、ダイヤモ
ンド薄膜４に応力を残してしまうので、ダイヤモンド薄
膜４を破損してしまう公算が大である。Furthermore, even if an attempt is made to separate the diamond thin film 4 by a sudden change in temperature, stress will remain in the diamond thin film 4, and there is a high possibility that the diamond thin film 4 will be damaged.
これに対し、前記実施例では、ダイヤモンド薄膜４の透
明な性質を利用して、熱光線により基体１の表面を加熱
し、この熱をダイヤモンド振動板膜４には伝達させて、
ダイヤモン）・の熱伝導率が良いためダイヤモンド薄膜
４を全体が均一に温度上昇させ、一方基体１は熱伝導率
が低い為に温度上昇せず、熱膨張に差が生じることによ
ってダイ薄膜ン１′薄欣４が基体１から剥離するもので
ある。On the other hand, in the embodiment described above, the transparent property of the diamond thin film 4 is utilized to heat the surface of the base body 1 with heat rays, and this heat is transmitted to the diamond diaphragm film 4.
Due to the good thermal conductivity of diamond), the temperature of the entire diamond thin film 4 rises uniformly, while the temperature of the substrate 1 does not rise due to its low thermal conductivity, and due to the difference in thermal expansion, the temperature of the die thin film 4 rises uniformly. 'The thin film 4 is peeled off from the base 1.
そして、基体１０表面には、数μの凹凸を同心円状、放
射線状、或いはランダムに形成しであるので、ダイヤモ
ンド薄１１＊４は表面にこれと反対の凹凸が形成され、
外部からの光線が当るとダイヤモンド特有の輝きを放つ
こととなる。Since the surface of the base body 10 is formed with concavities and convexities of several micrometers concentrically, radially, or randomly, the diamond thin layer 11*4 has concavities and convexities opposite to these formed on the surface.
When exposed to external light, it emits a diamond-like brilliance.
このようにして形成されたダイヤモンド振動板は、ダイ
ヤモンドの剛性が大きく、Ｅ＝ ３３Ｘ １０”ｄｙｎ
／ｃｍ、 Ｐ ＝ ３．５ ’２、音速で９７００ｍ
／ ｖｃと現在の材料中ではベリリウムの１２０００
ｍ ／ ｓｅｔに次いで大きいので、広帯域スピーカ
を得ることができる。The diamond diaphragm formed in this way has a high rigidity of diamond, and has an E = 33X 10”dyn
/cm, P = 3.5'2, 9700m at the speed of sound
/vc and 12,000 of beryllium among current materials.
Since it is the second largest after m/set, a wideband speaker can be obtained.
尚、ダイヤモンド薄膜の形成は、前記気相成長法の他に
、蒸着法も使用でき、同様な方法で剥離が行なわれる。Incidentally, in addition to the above-mentioned vapor phase growth method, a vapor deposition method can also be used to form the diamond thin film, and the diamond thin film can be peeled off using the same method.
このように、本発明に拠る時には純粋のダイヤモンド振
動板が得られるので、ダイヤモンドの剛性により広１８
域のスピーカとすることができる。As described above, since a pure diamond diaphragm can be obtained according to the present invention, the rigidity of diamond allows for a wide
It can be used as a speaker in the area.
そして、スピーカの最も目につく部分に、このダイヤモ
ンド振動板が位置するので、他から光線や、スピーカ内
部に組み込んだ光源からの光線によって、ダイヤモンド
特有の輝きを放つため、大きなデザイン効果が得られる
。Since this diamond diaphragm is located in the most visible part of the speaker, it emits the unique shine of a diamond when exposed to light from other sources or from a light source built into the speaker, resulting in a great design effect. .
このようなダイヤモンド振動板をその脆さにも拘らず本
発明は製造できるものであって、しかも基体から残留歪
や、その他破損の原因を内■１５に残すことなく、確実
に剥離して、製造できるものである。Despite the fragility of such a diamond diaphragm, the present invention is capable of manufacturing it, and moreover, it can be reliably peeled off from the base without leaving any residual strain or other causes of damage. It can be manufactured.
図面は本発明の実施の一例を示すもので、第１図は基体
の側面図、第２図は気相成長時、第３図は加熱時、第４
図はその一部の拡大を、第５図はこれによって製造され
たダイヤモン１”振動板の断面図である。
１・・・基体、２・・・混合ガス、３・・・ヒータ、４
・・・ダイヤモンドｉｎ！、５・・・ヒータ。
特許出願人 パイオニア株式会社The drawings show an example of the implementation of the present invention; FIG. 1 is a side view of the substrate, FIG. 2 is a view during vapor phase growth, FIG. 3 is during heating, and FIG.
The figure is an enlarged view of a part of it, and Figure 5 is a cross-sectional view of a diamond 1" diaphragm manufactured thereby. 1...Base body, 2...Mixed gas, 3...Heater, 4
...Diamond in! , 5... Heater. Patent applicant Pioneer Corporation
Claims (1)
００℃以上の而（熱性を有すると共に、熱伝導率の小さ
い素材の基体上に、気相成長法によりダイヤモンド薄膜
を形成した後、赤外線等の加熱光線でダイヤモンド薄膜
と基体の接触面を加熱して熱伝導率の差によってダイヤ
モノ１薄膜と基体の熱膨張に差を生じさせ、この熱膨張
の差によって基体からダイヤモンド薄膜を剥離すること
を特徴とするダイヤモンド振動板の製造方法。10 made of molybdenum, ceramic, etc. formed into the shape of a diaphragm
00℃ or above (after forming a diamond thin film by vapor phase growth on a substrate made of a material that has thermal properties and low thermal conductivity, the contact surface between the diamond thin film and the substrate is heated with heating light such as infrared rays). A method for producing a diamond diaphragm, characterized in that a difference in thermal expansion is created between the Diamond Mono 1 thin film and the base due to the difference in thermal conductivity, and the diamond thin film is peeled from the base based on this difference in thermal expansion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58244776A JPS60141697A (en) | 1983-12-27 | 1983-12-27 | Manufacture of diamond diaphragm |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58244776A JPS60141697A (en) | 1983-12-27 | 1983-12-27 | Manufacture of diamond diaphragm |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60141697A true JPS60141697A (en) | 1985-07-26 |
| JPS6357399B2 JPS6357399B2 (en) | 1988-11-11 |
Family
ID=17123742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58244776A Granted JPS60141697A (en) | 1983-12-27 | 1983-12-27 | Manufacture of diamond diaphragm |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60141697A (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0398257A2 (en) * | 1989-05-18 | 1990-11-22 | Yamaha Corporation | A speaker diaphragm |
| JPH0385099A (en) * | 1989-08-29 | 1991-04-10 | Kenwood Corp | Diaphragm for speaker and its manufacture |
| US5071708A (en) * | 1987-10-20 | 1991-12-10 | Showa Denko K.K. | Composite diamond grain |
| US5110579A (en) * | 1989-09-14 | 1992-05-05 | General Electric Company | Transparent diamond films and method for making |
| US5130111A (en) * | 1989-08-25 | 1992-07-14 | Wayne State University, Board Of Governors | Synthetic diamond articles and their method of manufacture |
| US5180571A (en) * | 1990-05-30 | 1993-01-19 | Idemitsu Petrochemical Company Limited | Process for the preparation of diamond |
| US5264071A (en) * | 1990-06-13 | 1993-11-23 | General Electric Company | Free standing diamond sheet and method and apparatus for making same |
| JPH0891992A (en) * | 1994-09-28 | 1996-04-09 | Toyo Kohan Co Ltd | Production of diamond-coated brazed product |
| US5523121A (en) * | 1992-06-11 | 1996-06-04 | General Electric Company | Smooth surface CVD diamond films and method for producing same |
| GB2413234A (en) * | 2004-04-15 | 2005-10-19 | B & W Loudspeakers | Diamond diaphragms for loudspeaker drive units or microphones |
| JP2015523952A (en) * | 2012-05-28 | 2015-08-20 | エレメント シックス テクノロジーズ リミテッド | Free-standing nonplanar polycrystalline synthetic diamond component |
-
1983
- 1983-12-27 JP JP58244776A patent/JPS60141697A/en active Granted
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5071708A (en) * | 1987-10-20 | 1991-12-10 | Showa Denko K.K. | Composite diamond grain |
| WO1993013015A1 (en) * | 1987-10-20 | 1993-07-08 | Kunio Komaki | Composite diamond grains and process for their production |
| EP0398257A2 (en) * | 1989-05-18 | 1990-11-22 | Yamaha Corporation | A speaker diaphragm |
| US5130111A (en) * | 1989-08-25 | 1992-07-14 | Wayne State University, Board Of Governors | Synthetic diamond articles and their method of manufacture |
| JPH0385099A (en) * | 1989-08-29 | 1991-04-10 | Kenwood Corp | Diaphragm for speaker and its manufacture |
| US5110579A (en) * | 1989-09-14 | 1992-05-05 | General Electric Company | Transparent diamond films and method for making |
| US5180571A (en) * | 1990-05-30 | 1993-01-19 | Idemitsu Petrochemical Company Limited | Process for the preparation of diamond |
| US5349922A (en) * | 1990-06-13 | 1994-09-27 | General Electric Company | Free standing diamond sheet and method and apparatus for making same |
| US5264071A (en) * | 1990-06-13 | 1993-11-23 | General Electric Company | Free standing diamond sheet and method and apparatus for making same |
| US5523121A (en) * | 1992-06-11 | 1996-06-04 | General Electric Company | Smooth surface CVD diamond films and method for producing same |
| JPH0891992A (en) * | 1994-09-28 | 1996-04-09 | Toyo Kohan Co Ltd | Production of diamond-coated brazed product |
| GB2413234A (en) * | 2004-04-15 | 2005-10-19 | B & W Loudspeakers | Diamond diaphragms for loudspeaker drive units or microphones |
| GB2413234B (en) * | 2004-04-15 | 2007-09-12 | B & W Loudspeakers | Diaphragms for loudspeaker drive units or microphones |
| EP1757160B1 (en) * | 2004-04-15 | 2010-05-19 | B & W Group Ltd. | Diamond diaphragms for loudspeaker drive units or microphones |
| JP2015523952A (en) * | 2012-05-28 | 2015-08-20 | エレメント シックス テクノロジーズ リミテッド | Free-standing nonplanar polycrystalline synthetic diamond component |
| US9210972B2 (en) | 2012-05-28 | 2015-12-15 | Element Six Technologies Limited | Free-standing non-planar polycrystalline synthetic diamond components and method of fabrication |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6357399B2 (en) | 1988-11-11 |
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