JPS6356930A - 半導体装置 - Google Patents
半導体装置Info
- Publication number
- JPS6356930A JPS6356930A JP61202498A JP20249886A JPS6356930A JP S6356930 A JPS6356930 A JP S6356930A JP 61202498 A JP61202498 A JP 61202498A JP 20249886 A JP20249886 A JP 20249886A JP S6356930 A JPS6356930 A JP S6356930A
- Authority
- JP
- Japan
- Prior art keywords
- region
- channel stop
- type
- regions
- oxide film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 23
- 238000000034 method Methods 0.000 claims abstract description 8
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 7
- 238000007689 inspection Methods 0.000 claims abstract description 6
- 238000005468 ion implantation Methods 0.000 claims description 18
- 238000012360 testing method Methods 0.000 claims description 18
- 230000007547 defect Effects 0.000 abstract description 3
- 238000009792 diffusion process Methods 0.000 description 11
- 239000000758 substrate Substances 0.000 description 9
- 239000002184 metal Substances 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 5
- 230000000694 effects Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 230000002547 anomalous effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000013101 initial test Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61202498A JPS6356930A (ja) | 1986-08-28 | 1986-08-28 | 半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61202498A JPS6356930A (ja) | 1986-08-28 | 1986-08-28 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6356930A true JPS6356930A (ja) | 1988-03-11 |
| JPH0365018B2 JPH0365018B2 (enrdf_load_stackoverflow) | 1991-10-09 |
Family
ID=16458480
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61202498A Granted JPS6356930A (ja) | 1986-08-28 | 1986-08-28 | 半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6356930A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0945746A (ja) * | 1995-05-24 | 1997-02-14 | Nec Corp | 半導体装置とその製造方法 |
| US6153892A (en) * | 1998-02-12 | 2000-11-28 | Nec Corporation | Semiconductor device and method for manufacture thereof |
-
1986
- 1986-08-28 JP JP61202498A patent/JPS6356930A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0945746A (ja) * | 1995-05-24 | 1997-02-14 | Nec Corp | 半導体装置とその製造方法 |
| US6153892A (en) * | 1998-02-12 | 2000-11-28 | Nec Corporation | Semiconductor device and method for manufacture thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0365018B2 (enrdf_load_stackoverflow) | 1991-10-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |