JPS635640U - - Google Patents

Info

Publication number
JPS635640U
JPS635640U JP9667086U JP9667086U JPS635640U JP S635640 U JPS635640 U JP S635640U JP 9667086 U JP9667086 U JP 9667086U JP 9667086 U JP9667086 U JP 9667086U JP S635640 U JPS635640 U JP S635640U
Authority
JP
Japan
Prior art keywords
support
pair
wafer
bar
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9667086U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9667086U priority Critical patent/JPS635640U/ja
Publication of JPS635640U publication Critical patent/JPS635640U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案の基本構成を示すウエハ支持ボ
ートの上面図、第２図は本考案の実施例に係るウ
エハ支持ボートの斜視図である。第３図及び第４
図はいずれも従来公知のウエハ支持ボートの上面
図である。 １，１０：ウエハ支持ボート、１１，１２，１
３：支持棒材、１４，１５：仕切棒材、１６，１
７，１８：ウエハー支持溝。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) 長手方向に平行に延設する一対の支持棒材
    と、該支持棒材と直交させて短手方向に沿つて平
    行に配設された少なくとも一対以上の仕切棒材と
    を有し、前記支持棒材と仕切棒材の、対面するい
    ずれの側にも夫々ウエハ支持溝を形成し、ボート
    長手方向及び短手方向の夫々の方向に沿つて選択
    的に半導体ウエハが列設可能に構成した事を特徴
    とするウエハ支持ボート。 (2) 前記一対の支持棒材間に挾まれる距離と各
    一対の仕切棒材間に挾まれる距離を異ならせ、複
    数種類のウエハを搭載可能にした実用新案登録請
    求の範囲第１項記載のウエハ支持ボート。 (3) 前記一対の支持棒材の下方位置に、該支持
    棒材に沿つて平行に延設する第３の支持棒材を配
    するとともに、該第３の支持棒材上面にウエハ支
    持溝を形成し、３点支持にて半導体ウエハを支持
    可能に構成した実用新案登録請求の範囲第１項又
    は第２項記載のウエハ支持ボート。
JP9667086U 1986-06-26 1986-06-26 Pending JPS635640U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9667086U JPS635640U (ja) 1986-06-26 1986-06-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9667086U JPS635640U (ja) 1986-06-26 1986-06-26

Publications (1)

Publication Number Publication Date
JPS635640U true JPS635640U (ja) 1988-01-14

Family

ID=30962660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9667086U Pending JPS635640U (ja) 1986-06-26 1986-06-26

Country Status (1)

Country Link
JP (1) JPS635640U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03103044U (ja) * 1990-02-05 1991-10-25

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5135283A (en) * 1974-09-20 1976-03-25 Kyoji Okamoto Ic hotomasukutonimochiirukeesu

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5135283A (en) * 1974-09-20 1976-03-25 Kyoji Okamoto Ic hotomasukutonimochiirukeesu

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03103044U (ja) * 1990-02-05 1991-10-25

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