JPS6151375U - - Google Patents

Info

Publication number
JPS6151375U
JPS6151375U JP13633984U JP13633984U JPS6151375U JP S6151375 U JPS6151375 U JP S6151375U JP 13633984 U JP13633984 U JP 13633984U JP 13633984 U JP13633984 U JP 13633984U JP S6151375 U JPS6151375 U JP S6151375U
Authority
JP
Japan
Prior art keywords
wafer carrier
partition plate
main body
wafers
carrier main
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13633984U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13633984U priority Critical patent/JPS6151375U/ja
Publication of JPS6151375U publication Critical patent/JPS6151375U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)

Description

【図面の簡単な説明】
第１図はこの考案に係るウエハキヤリアの一実
施例を示す斜視説明図、第２図は仕切板の上面図
、第３図はウエハキヤリアに仕切板とウエハを収
納した状態を示す側面図である。 １……ウエハキヤリア本体、１１，１２……側
壁、１１１，１２１……突脈、２……仕切板。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) 複数個のウエハを所定間隔をもつて収納並
    設するウエハキヤリア本体には、相隣接するウエ
    ハ相互の接触を防止する仕切板が設けられたこと
    を特徴とするウエハキヤリア。 (2) 前記仕切板は、ウエハキヤリア本体に着脱
    自在に構成されるものであることを特徴とする実
    用新案登録請求の範囲第１項記載のウエハキヤリ
    ア。
JP13633984U 1984-09-07 1984-09-07 Pending JPS6151375U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13633984U JPS6151375U (ja) 1984-09-07 1984-09-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13633984U JPS6151375U (ja) 1984-09-07 1984-09-07

Publications (1)

Publication Number Publication Date
JPS6151375U true JPS6151375U (ja) 1986-04-07

Family

ID=30694798

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13633984U Pending JPS6151375U (ja) 1984-09-07 1984-09-07

Country Status (1)

Country Link
JP (1) JPS6151375U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012109622A (ja) * 2006-10-25 2012-06-07 Siltronic Ag 少なくとも２つの円筒状工作物を多数のウェハに同時に切断するための方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012109622A (ja) * 2006-10-25 2012-06-07 Siltronic Ag 少なくとも２つの円筒状工作物を多数のウェハに同時に切断するための方法

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