JPS635470B2 - - Google Patents

Info

Publication number
JPS635470B2
JPS635470B2 JP2605687A JP2605687A JPS635470B2 JP S635470 B2 JPS635470 B2 JP S635470B2 JP 2605687 A JP2605687 A JP 2605687A JP 2605687 A JP2605687 A JP 2605687A JP S635470 B2 JPS635470 B2 JP S635470B2
Authority
JP
Japan
Prior art keywords
metals
layer
carbonitrides
nitrides
cutting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2605687A
Other languages
Japanese (ja)
Other versions
JPS62218566A (en
Inventor
Noribumi Kikuchi
Takayuki Shingyochi
Hiroaki Yamashita
Akio Nishama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP4028883A external-priority patent/JPS59166672A/en
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP2605687A priority Critical patent/JPS62218566A/en
Publication of JPS62218566A publication Critical patent/JPS62218566A/en
Publication of JPS635470B2 publication Critical patent/JPS635470B2/ja
Granted legal-status Critical Current

Links

Description

【発明の詳細な説明】[Detailed description of the invention]

〔産業上の利用分野〕 この発明は、すぐれた耐摩耗性を有し、切削、
耐摩耗、および研削の分野で使用するのに適した
表面被覆工具部材に関するものである。 〔従来の技術〕 従来、例えば、粉末冶金法にて製造された、硬
質分散相が、主として元素周期律表の4a,5a、
および6a族の金属、並びにSiの炭化物、窒化物、
炭窒化物、および炭酸窒化物のうちの1種または
2種以上で構成され、一方結合相が、主として鉄
族金属、並びに同5aおよび6a族の金属のうちの
1種または2種以上で構成された超硬質合金基体
工具部材の表面に、同4a,5a、および6a族の金
属、並びにSiおよびBの炭化物、窒化物、炭窒化
物、および炭酸窒化物のうちの1種の単層または
2種以上の複層で構成された硬質化合物層からな
る表面被覆層を化学蒸着法や物理蒸着法などを用
いて形成してなる表面被覆超硬質合金部材が切削
工具として用いられていることは良く知られると
ころである。 〔発明が解決しようとする問題点〕 しかし、このような従来表面被覆超硬質合金部
材においては、鋼や鋳鉄の切削では比較的すぐれ
た切削性能を示すものの、被削材が、例えば硬質
のガラス繊維を内蔵したプラスチツク(FRP)
やセラミツク〓焼体などである場合には、耐摩耗
性不足が原因して所望の切削寿命を示さないもの
であつた。 〔問題点を解決するための手段〕 そこで、本発明者等は、上述のような観点か
ら、特にFRPやセラミツク〓焼体などの被削材
の切削に切削工具として用いるのに適した工具部
材を得べく研究を行なつた結果、 基体工具部材を、硬質分散相が、主として元素
周期律表の4a,5a、および6a族の金属、並びに
Siの炭化物、窒化物、炭窒化物、および炭酸窒化
物のうちの1種または2種以上で構成され、一方
結合相が、主として鉄族金属、並びに元素周期律
表の5aおよび6a族の金属のうちの1種または2
種以上で構成された超硬質合金とし、 かつこの基体工具部材の表面に形成される表面
被覆層を、化学蒸着法や物理蒸着法などにより形
成された同4a,5a、および6a族の金属、並びに
SiおよびBの炭化物、窒化物、炭窒化物、および
炭酸窒化物のうちの1種の単層または2種以上の
複層からなる硬質化合物層を最内層として、この
硬質化合物層の少なくとも2層と、気相合成法に
より形成したダイヤモンド層の少なくとも1層と
からなる交互積層構造とした表面被覆工具部材
は、前記表面被覆層中に存在する1層以上のダイ
ヤモンド層によつて、著しくすぐれた耐摩耗性を
もつようになり、したがつて、これを切削工具と
して用いた場合には、鋼および鋳鉄は勿論のこ
と、FRPやセラミツク〓焼体などの被削材の切
削においてすぐれた切削性能を発揮し、さらに、
このようにすぐれた耐摩耗性を有するので、金属
熱間加工および金属成形用部材やダイス類などの
耐摩耗工具や、砥石およびラツプ板などの研削工
具として用いた場合にもすぐれた性能を発揮する
という知見を得たのである。 この発明は、上記知見にもとづいてなされたも
のであつて、硬質分散相が、主として元素周期律
表の4a,5a、および6a族の金属、並びにSiの炭
化物、窒化物、炭窒化物、および炭酸窒化物のう
ちの1種または2種以上で構成され、一方結合相
が、主として鉄族金属、並びに元素周期律表の
5aおよび6a族の金属のうちの1種または2種以
上で構成された超硬質合金基体工具部材の表面
に、化学蒸着法や物理蒸着法などにより形成され
た、同4a,5a、および6a族の金属、並びにSiお
よびBの炭化物、窒化物、炭窒化物、および炭酸
窒化物のうちの1種の単層または2種以上の複層
で構成された硬質化合物層を最内層として、この
硬質化合物層の少なくとも2層と、気相合成法に
より形成したダイヤモンド層の少なくとも1層と
からなる交互積層構造を有する表面被覆層を形成
してなり、特に切削工具、耐摩耗工具、および研
削工具として用いるのに適した表面被覆工具部材
に特徴を有するものである。 なお、この発明のダイヤモンド層は、気相合成
装置のフイラメントより蒸発したW,Ta、ある
いはMoなどを不純物として1〜10原子%程度含
有する場合がある。 〔実施例〕 つぎに、この発明の表面被覆工具部材を実施例
により具体的に説明する。 基体工具部材として、それぞれ第1表に示され
る組成をもち、かつJIS・SNP431の形状をもつ
た超硬質合金製切削チツプを用意し、これら基体
工具部材に対して、通常の気相合成装置を用い、 反応炉:内径75mmφの石英管、 Wフイラメントの加熱温度:2000℃、 切削チツプとWフイラメントの間隔:1〜2
cm、 反応炉内に流される反応ガス:容量割合で
CH3/H2=0.005の混合ガス、 反応中保持される反応炉内雰囲気圧力:
20torr、 反応時間:3〜10時間、 の条件での気相合成処理、並びに、通常のマグネ
トロン・スパツタリング装置を用い、 ターゲツトの材質:それぞれ第1表における硬
質化合物層を構成する化合物と同じもの、 反応炉内雰囲気:2×10-2torrのAr、 ターゲツトへの印加電圧:−400V、 切削チツプの加熱温度:500℃、 反応時間:1〜3時間、 の条件での化学蒸着処理とを交互に行ない、硬質
化合物を最内層として、それぞれ第1表に示され
る平均層厚の少なくとも1層のダイヤモンド層
と、同じくそれぞれ第1表に示される化合物およ
び平均層厚の単層または複層からなる硬質化合物
の少なくとも2層との交互積層にて構成された表
面被覆層を、前記切削チツプの表面に形成するこ
とによつて本発明被覆切削チツプ1〜13をそれぞ
れ製造した。
[Industrial Application Field] This invention has excellent wear resistance and is suitable for cutting,
The present invention relates to a wear-resistant and surface-coated tool member suitable for use in the field of grinding. [Prior Art] Conventionally, for example, hard dispersed phases produced by powder metallurgy mainly contain elements 4a, 5a, and 5a of the periodic table.
and group 6a metals, as well as carbides and nitrides of Si,
Composed of one or more of carbonitrides and carbonitrides, while the binder phase is mainly composed of iron group metals and one or more of iron group metals and metals of groups 5a and 6a. A single layer or a single layer of metals of groups 4a, 5a, and 6a, and one of carbides, nitrides, carbonitrides, and carbonitrides of Si and B is applied to the surface of the cemented carbide-based tool member. A surface-coated superhard alloy member formed by forming a surface coating layer consisting of a hard compound layer composed of two or more types of multilayers using a chemical vapor deposition method or a physical vapor deposition method is used as a cutting tool. It is a well-known place. [Problems to be Solved by the Invention] However, although such conventional surface-coated cemented carbide members exhibit relatively excellent cutting performance when cutting steel or cast iron, when the workpiece material is hard glass, for example, Plastic with built-in fibers (FRP)
In the case of a ceramic body or the like, the desired cutting life was not achieved due to insufficient wear resistance. [Means for Solving the Problems] Therefore, from the above-mentioned viewpoint, the present inventors have developed a tool member suitable for use as a cutting tool particularly for cutting work materials such as FRP and ceramic fired bodies. As a result of conducting research to obtain a base tool member, it was found that the hard dispersed phase is mainly made of metals from groups 4a, 5a, and 6a of the periodic table of elements, and
Composed of one or more of Si carbides, nitrides, carbonitrides, and carbonitrides, while the binder phase is mainly composed of iron group metals and metals from groups 5a and 6a of the periodic table of elements. One or two of the following
The surface coating layer formed on the surface of this base tool member is made of metals of Groups 4a, 5a, and 6a formed by chemical vapor deposition, physical vapor deposition, etc. and
A hard compound layer consisting of a single layer or a multilayer of two or more of Si and B carbides, nitrides, carbonitrides, and carbonitrides is the innermost layer, and at least two layers of this hard compound layer and at least one diamond layer formed by a vapor phase synthesis method. It has wear resistance, so when used as a cutting tool, it has excellent cutting performance when cutting work materials such as steel and cast iron, as well as FRP and ceramic fired bodies. In addition,
Because of its excellent wear resistance, it also exhibits excellent performance when used as wear-resistant tools such as metal hot processing and metal forming parts and dies, and as grinding tools such as whetstones and lap plates. We obtained the knowledge that This invention was made based on the above knowledge, and the hard dispersed phase mainly consists of metals of groups 4a, 5a, and 6a of the periodic table of elements, as well as carbides, nitrides, carbonitrides, and silicon carbides of Si. It is composed of one or more types of carbonitrides, while the binder phase is mainly composed of iron group metals and metals of the periodic table of elements.
Group 4a, 5a, and 6a metals formed by chemical vapor deposition, physical vapor deposition, etc. on the surface of a superhard alloy base tool member composed of one or more metals of group 5a and 6a. The innermost layer is a hard compound layer composed of a single layer or a multilayer of two or more of the following metals and carbides, nitrides, carbonitrides, and carbonitrides of Si and B. A surface coating layer having an alternate laminated structure consisting of at least two compound layers and at least one diamond layer formed by a vapor phase synthesis method is formed, and is particularly useful as a cutting tool, a wear-resistant tool, and a grinding tool. It features a surface-coated tool member suitable for use. The diamond layer of the present invention may contain about 1 to 10 atomic percent of impurities such as W, Ta, or Mo evaporated from the filament of a vapor phase synthesis apparatus. [Example] Next, the surface-coated tool member of the present invention will be specifically explained with reference to Examples. Cemented carbide cutting chips having the composition shown in Table 1 and the shape of JIS/SNP431 were prepared as the base tool members, and these base tool members were subjected to a normal vapor phase synthesis apparatus. Reactor: Quartz tube with inner diameter of 75mmφ, W filament heating temperature: 2000℃, Distance between cutting tip and W filament: 1~2
cm, reaction gas flowed into the reactor: in volume fraction
Mixed gas of CH 3 /H 2 = 0.005, atmospheric pressure inside the reactor maintained during the reaction:
20 torr, reaction time: 3 to 10 hours, and a normal magnetron sputtering device.Target material: The same compound as the compound constituting the hard compound layer in Table 1. Atmosphere inside the reactor: Ar at 2×10 -2 torr, voltage applied to the target: -400V, heating temperature of the cutting chip: 500℃, reaction time: 1 to 3 hours, alternating with chemical vapor deposition under the following conditions. consisting of a hard compound as the innermost layer, at least one diamond layer each having an average layer thickness shown in Table 1, and a single layer or multiple layers of compounds and average layer thicknesses each also shown in Table 1. Coated cutting tips 1 to 13 of the present invention were each manufactured by forming a surface coating layer constituted by alternate lamination of at least two layers of a hard compound on the surface of the cutting tip.

【表】【table】

〔発明の効果〕〔Effect of the invention〕

第1表に示される結果から、本発明被覆切削チ
ツプ1〜13は、著しくすぐれた耐摩耗性を有する
ので、FRPの切削において、従来被覆切削チツ
プに比して、すぐれた切削性能を長期に亘つて発
揮することが明らかである。 上述のように、この発明の表面被覆工具部材
は、表面被覆層中におけるダイヤモンド層の存在
によつて、すぐれた耐摩耗性を有するので、鋼や
鋳鉄は勿論のこと、FRPやセラミツク〓焼体、
さらにAlおよびAl合金などの被削材の切削に切
削工具として用いるのに適するばかりでなく、耐
摩耗工具や研削工具などとして用いた場合にもす
ぐれた性能を著しく長期に亘つて発揮するのであ
る。
From the results shown in Table 1, the coated cutting chips 1 to 13 of the present invention have extremely excellent wear resistance, and therefore have superior cutting performance over a long period of time when cutting FRP compared to conventional coated cutting chips. It is clear that it will be effective over a long period of time. As mentioned above, the surface-coated tool member of the present invention has excellent wear resistance due to the presence of the diamond layer in the surface coating layer, so it can be used not only for steel and cast iron, but also for FRP and ceramic fired bodies. ,
Furthermore, it is not only suitable for use as a cutting tool for cutting work materials such as Al and Al alloys, but also exhibits excellent performance over a long period of time when used as a wear-resistant tool or grinding tool. .

Claims (1)

【特許請求の範囲】[Claims] 1 硬質分散相が、主として元素周期律表の4a,
5a、および6a族の金属、並びにSiの炭化物、窒
化物、炭窒化物、および炭酸窒化物のうちの1種
または2種以上で構成され、一方結合相が、主と
して鉄族金属、並びに元素周期律表の5aおよび
6a族の金属のうちの1種または2種以上で構成
された超硬質合金基体工具部材の表面に、元素周
期律表の4a,5a、および6a族の金属、並びにSi
およびBの炭化物、窒化物、炭窒化物、および炭
酸窒化物のうちの1種の単層または2種以上の複
層で構成された硬質化合物層を最内層として、こ
の硬質化合物層の少なくとも2層と、気相合成法
により形成したダイヤモンド層の少なくとも1層
とからなる交互積層構造を有する表面被覆層を形
成してなる耐摩耗性のすぐれた表面被覆工具部
材。
1 The hard dispersed phase is mainly 4a and 4a of the periodic table of elements.
5a and 6a group metals, and one or more of Si carbides, nitrides, carbonitrides, and carbonitrides, while the binder phase is mainly composed of iron group metals and elemental periodic metals. Table 5a and
Metals from groups 4a, 5a, and 6a of the periodic table of elements, and Si
and a hard compound layer composed of a single layer or a multilayer of two or more of carbides, nitrides, carbonitrides, and carbonate nitrides as the innermost layer, and at least two of these hard compound layers A surface-coated tool member having excellent wear resistance, the surface-coated tool member having a surface-coated layer having an alternating laminated structure consisting of diamond layers and at least one diamond layer formed by a vapor phase synthesis method.
JP2605687A 1983-03-11 1987-02-06 Surface coated tool member having excellent wear resistance Granted JPS62218566A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2605687A JPS62218566A (en) 1983-03-11 1987-02-06 Surface coated tool member having excellent wear resistance

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP4028883A JPS59166672A (en) 1983-03-11 1983-03-11 Surface-coated tool member excellent in wear resistance
JP2605687A JPS62218566A (en) 1983-03-11 1987-02-06 Surface coated tool member having excellent wear resistance

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP4028883A Division JPS59166672A (en) 1983-03-11 1983-03-11 Surface-coated tool member excellent in wear resistance

Publications (2)

Publication Number Publication Date
JPS62218566A JPS62218566A (en) 1987-09-25
JPS635470B2 true JPS635470B2 (en) 1988-02-03

Family

ID=26363793

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2605687A Granted JPS62218566A (en) 1983-03-11 1987-02-06 Surface coated tool member having excellent wear resistance

Country Status (1)

Country Link
JP (1) JPS62218566A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0774449B2 (en) * 1987-10-15 1995-08-09 住友電気工業株式会社 Method for producing diamond-coated hydrogen-brittle metal
JPH0794707B2 (en) * 1990-06-25 1995-10-11 東洋鋼鈑株式会社 Method for producing coating thin film with excellent wear resistance and corrosion resistance

Also Published As

Publication number Publication date
JPS62218566A (en) 1987-09-25

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