JPS59170261A - Surface-coated tool member with superior wear resistance - Google Patents

Surface-coated tool member with superior wear resistance

Info

Publication number
JPS59170261A
JPS59170261A JP4170683A JP4170683A JPS59170261A JP S59170261 A JPS59170261 A JP S59170261A JP 4170683 A JP4170683 A JP 4170683A JP 4170683 A JP4170683 A JP 4170683A JP S59170261 A JPS59170261 A JP S59170261A
Authority
JP
Japan
Prior art keywords
tool member
wear resistance
layer
cutting
diamond particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4170683A
Other languages
Japanese (ja)
Inventor
Noribumi Kikuchi
菊池 則文
Takayuki Shingyouchi
新行内 隆之
Hiroaki Yamashita
山下 博明
Akio Nishiyama
昭雄 西山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP4170683A priority Critical patent/JPS59170261A/en
Publication of JPS59170261A publication Critical patent/JPS59170261A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B27/00Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14Cutting tools of which the bits or tips or cutting inserts are of special material
    • B23B27/148Composition of the cutting inserts
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material

Abstract

PURPOSE:To improve the wear resistance and cutting performance of an iron alloy tool member by forming a coating layer having a structure contg. diamond particles dispersed in a prescribed hard compound layer on the surface of the tool member. CONSTITUTION:A coating layer contg. diamond particles dispersed in a hard compound layer is formed on the surface of an alloy tool member to obtain the titled member. The diamond particles are formed by a vapor phase synthesis method. The hard compound layer is a single layer of one kind of compound selected among the carbides, nitrides, carbonitrides and oxycarbonitrides of the IVa, Va and VIa group metals in the periodic table, Si and B or a double layer of two or more kinds of compounds selected among said compounds. Said alloy tool member contains at least one kind of iron group metal as the principal component. The titled member has superior wear resistance and cutting performance.

Description

【発明の詳細な説明】 この発明は、すぐれた耐摩耗性を有し、切削、耐摩耗、
および研削の分野で使用するのに適した表面被覆工具部
材に関するものである。
[Detailed description of the invention] This invention has excellent wear resistance, cutting, wear resistance,
and a surface-coated tool member suitable for use in the field of grinding.

従来、例えば、粉末冶金法にて製造された、硬質分散相
が主として元素周期律表の4a、5a。
Conventionally, for example, hard dispersed phases manufactured by powder metallurgy are mainly elements 4a and 5a of the periodic table.

および6a族の金属、並びにSiの炭化物、窒化物。and group 6a metals, and carbides and nitrides of Si.

炭窒化物、および炭酸窒化物のうちの1種また゛は2種
以上で構成され、一方結合相が主として鉄族金属、並び
に同5aおよび6a族の金属のうちの1種寸たけ2種以
上で構成された超硬質合金基体工具部材の表面に、同4
a、、5a、、および6a族の金属、並びにSiおよび
Bの炭化物、窒化物、炭窒化物、および炭酸窒化物のう
ちの1種の単層または2種以上の複層で構成された硬質
化合物層からなる表面被覆層を化学蒸着法や物理蒸着法
などを用いて形成してなる表面被覆超硬質合金部材が切
削工具として用いられていることは良く知られるところ
である。
One or more carbonitrides and carbonitrides are composed of two or more, while the binder phase is mainly composed of iron group metals and one or more of the metals of groups 5a and 6a. 4 on the surface of the constructed ultra-hard alloy base tool member.
A hard material composed of a single layer or a multilayer of two or more of metals of groups a, 5a, and 6a, and carbides, nitrides, carbonitrides, and carbonitrides of Si and B. It is well known that a surface-coated superhard alloy member formed by forming a surface coating layer made of a compound layer using a chemical vapor deposition method, a physical vapor deposition method, or the like is used as a cutting tool.

しかし、このような従来表面被覆超硬質合金部材におい
ては、鋼や鋳鉄の切削では比較的すぐれた切削性能を示
すものの、被剛材が、例えば硬質のガラス繊維を内蔵し
たプラスチック(FRP)やセラミック仮焼体などであ
る場合には、耐摩耗性不足が原因して所望の切削寿命を
示さないものであった。
However, although such conventional surface-coated cemented carbide members exhibit relatively excellent cutting performance when cutting steel or cast iron, they do not work well when cutting steel or cast iron. In the case of a calcined body, the desired cutting life was not exhibited due to insufficient wear resistance.

そこで、本発明者等は、上述のような観点から、特にF
RPやセラミック仮焼体などの被削材の切削に切削工具
として用いるのに適した工具部材全得べく研究を行なっ
た結果、 基体工具部材を、鉄族金属のうちの少なくとも1種を主
成分とする合金、すなわちFe基合金、N1基合金、X
4:たはCO基合金で構成し、かつこの基体工具部材の
表面に形成される表面被覆層を、化学蒸着法や物理蒸着
法などにより形成された、元素周期律表の4a、5a、
および6a族の金属、並びに81およびBの炭化物、窒
化物。
Therefore, from the above-mentioned viewpoint, the present inventors particularly
As a result of conducting research to obtain all tool members suitable for use as cutting tools for cutting work materials such as RP and ceramic calcined bodies, we found that the base tool member contains at least one type of iron group metal as a main component. alloys, i.e., Fe-based alloys, N1-based alloys,
4: or a CO-based alloy, and the surface coating layer formed on the surface of this base tool member is formed by chemical vapor deposition method, physical vapor deposition method, etc. 4a, 5a of the periodic table of elements,
and Group 6a metals, and 81 and B carbides, nitrides.

炭窒化物、および炭酸窒化物のうちの1種の単層または
2種以上の複層からなる硬質化合物層中に気相合成法に
よ゛り形成したタ゛イヤモンド粒子が分散する組織を有
するものとした表面被覆工具部材は、前記表面被覆層中
に分散するダイヤモンド粒によって、著しくすぐれた耐
摩耗性をもつようになシ、したがって、これを切削工具
として用いた場合には、鋼および鋳鉄は勿論のこと、F
RPやセラミック仮焼体などの被削材の切削においてす
ぐれた切削性能を発揮し、さらに、このようにすぐれた
耐摩耗性を有するので、金属熱間加工および金属成形用
部材やダイス類などの耐摩耗工具゛や、砥石およびラン
プ板などの研削工具として用いた場合にもすぐれた性能
を発揮するという知見を得たのである。
It has a structure in which diamond particles formed by vapor phase synthesis are dispersed in a hard compound layer consisting of a single layer or a multilayer of two or more of carbonitrides and carbonitrides. This surface-coated tool member has extremely excellent wear resistance due to the diamond grains dispersed in the surface coating layer, and therefore, when used as a cutting tool, it can be used not only on steel and cast iron but also on steel and cast iron. About F.
It exhibits excellent cutting performance when cutting work materials such as RP and ceramic calcined bodies, and also has excellent wear resistance, so it is suitable for metal hot processing, metal forming parts, dies, etc. They found that it also exhibits excellent performance when used as a wear-resistant tool or as a grinding tool for grinding wheels, lamp plates, etc.

この発明は、上記知見にもとづ−いてなされたものであ
って、鉄族金属のうちの少なくとも1種を主成分とする
合金基体工具部材の表面に、化学蒸着法や物理蒸着法な
どにより形成された、元素周期律表の4a、5a、およ
び6a族の金属、並びKSiおよびBの炭化物、窒化物
、炭窒化物、および炭酸窒化物のうちの1種の単層また
は2種以上の複層で構成された硬質化合物層中に気相合
成法により形成したダイヤモンド粒子が分散した組織を
有する表面被覆層を形成してなり、特に切削工具、耐摩
耗工具、および研削工具として用−いるのに適した表面
被覆工具部材に特徴を有するものである。。
The present invention was made based on the above knowledge, and the surface of an alloy-based tool member containing at least one of the iron group metals as a main component is coated by chemical vapor deposition, physical vapor deposition, etc. A single layer or two or more of metals of groups 4a, 5a, and 6a of the Periodic Table of the Elements, and carbides, nitrides, carbonitrides, and carbonitrides of KSi and B formed. It is made by forming a surface coating layer with a structure in which diamond particles formed by vapor phase synthesis are dispersed in a hard compound layer composed of multiple layers, and is especially used as cutting tools, wear-resistant tools, and grinding tools. The present invention is characterized by a surface-coated tool member suitable for. .

なお、この発明の表面被覆層におけるダイヤモンド粒は
、気相合成装置のフィラメントより蒸発したW、Mo、
あるいはTaなど全不純物として1〜10原子係程度含
有する場合がある。
Note that the diamond grains in the surface coating layer of this invention are W, Mo,
Alternatively, it may contain about 1 to 10 atomic percentages as total impurities such as Ta.

一つぎに、この発明の表面被覆工具部材を実施例により
具体的に説明する。
Next, the surface-coated tool member of the present invention will be specifically explained using examples.

実施例 ( 基体工具部材として、それぞれ第1表に示される組成を
もち、かつ、T I S −S N P 431の形状
をもった切削チップを用意し、これら基体工具部材に対
して、通常の気相合成装置音用い、反応炉、内径75調
φの石英管、 Wフィラメントの加熱温度: 2 k) O0℃、切削
チップとWフィラメントの間隔: 3.5 on、反応
炉内に流される反応ガス:容量割合でCH3/Hz−o
、oo5の混合ガス、 反応中保持される反応炉内雰囲気圧カニ20torr、
反応時間、3〜10時間、 の条件での気相合成処理、並びに、通常のマグネトロン
・スパッタリング装置ヲ用い、 ターゲットの材質:それぞれ第1表にνける硬質化合物
層全構成する化合物と同じもの、反応炉内雰囲気=2×
1σ2torrのAr。
Example (As the base tool members, cutting tips having the compositions shown in Table 1 and having the shape of TIS-SNP431 were prepared, and these base tool members were subjected to normal Using gas phase synthesizer sound, reactor, quartz tube with inner diameter of 75 mm, heating temperature of W filament: 2k) O0℃, distance between cutting tip and W filament: 3.5 on, reaction flowing into the reactor. Gas: CH3/Hz-o by volume ratio
, oo5 mixed gas, atmospheric pressure in the reactor kept at 20 torr during the reaction,
The reaction time was 3 to 10 hours, and a normal magnetron sputtering device was used.Target material: The same compound as the compound forming the entire hard compound layer shown in Table 1. Atmosphere inside reactor = 2×
Ar of 1σ2 torr.

ターゲットへの印加電圧ニー*40ov、切削チップの
加熱温度二500℃、 反応時間:1是3時間、 の条件での化学蒸着処理とを交互に行ないそれぞれ第1
表に示される化合物および平均層厚の単層まへホ複層か
らなる硬質化合物中にダイヤモンド粒子を分散させた組
織を有する表面被覆層を、前記切削チップの表面に形成
することによって本発明被瀉切削チップ1〜12をそれ
ぞれ製造した。
Chemical vapor deposition treatment was performed alternately under the following conditions: voltage applied to the target at knee *40 OV, heating temperature of the cutting tip at 2500°C, reaction time: 1 to 3 hours.
By forming on the surface of the cutting tip a surface coating layer having a structure in which diamond particles are dispersed in a hard compound consisting of a compound shown in the table and a single-layer multilayer with an average layer thickness, Cutting chips 1 to 12 were manufactured, respectively.

また、比較の目的で、気相合成法によるダイヤモンド粒
の形成を行なわず、上記のマグネトロン・スパッタリン
グによる化学蒸着処理のみを第1Mる組成の切削チップ
表面に施し、同じくそれぞれ第1表に示される硬質化合
物層および平均層厚の単層または複層からなる表面被覆
層を形成することによって、従来被覆切削チップ1〜5
をそれぞれ製造した。
For the purpose of comparison, diamond grains were not formed by vapor phase synthesis, and only the chemical vapor deposition treatment by magnetron sputtering described above was applied to the surface of the cutting tip having the composition No. 1M, and the results were also shown in Table 1. By forming a surface coating layer consisting of a hard compound layer and a single layer or multiple layers with an average layer thickness, conventionally coated cutting tips 1 to 5
were manufactured respectively.

つきに、この結果得られた本発明被覆切削チップ1〜1
2および従来被覆切削チップ1〜5について、 被削材: FRP、 切削速度: 50 tn / m1n1、送り: 0.
2 m+n / rev、、切込み、1胴、 切削時間:iom=、 の条件で連続切削試験を行ない、切刃の逃げ面摩耗幅を
測定した。この測定結果を第1表に示した。
At the same time, the resulting coated cutting chips 1 to 1 of the present invention
2 and conventional coated cutting tips 1 to 5, Work material: FRP, Cutting speed: 50 tn/m1n1, Feed: 0.
A continuous cutting test was conducted under the following conditions: 2 m+n/rev, depth of cut, 1 cylinder, cutting time: iom=, and the flank wear width of the cutting edge was measured. The measurement results are shown in Table 1.

第1表に示される結果から、本発明被覆切削チップ1〜
12は、著しくすぐれた耐摩耗性を有するので、FRP
の切削において、従来被覆切削チップに比して、すぐれ
た切削性能を長期に亘って発揮することが明らかである
From the results shown in Table 1, the coated cutting tips 1 to 1 of the present invention
12 has extremely excellent wear resistance, so FRP
It is clear that the cutting tip exhibits superior cutting performance over a long period of time compared to conventional coated cutting tips.

」一連のように、この発明の表面被覆工具部拐は、表面
被覆層中に分散するダイヤモンド粒によってすぐれた耐
摩耗性を有するので、鋼や鋳鉄は勿論のこと、FRPや
セラミック仮焼体、さらにMおよびM合金などの被削材
の切削に切削工具として用いるのに適するばかりでなく
、耐摩耗工具や研削工具などとして用いた場合にもすぐ
れた性能を著しく長期に亘って発揮するのである。
As shown in the above series, the surface-coated tool part of the present invention has excellent wear resistance due to the diamond grains dispersed in the surface coating layer, so it can be used not only for steel and cast iron, but also for FRP, ceramic calcined bodies, Furthermore, it is not only suitable for use as a cutting tool for cutting work materials such as M and M alloys, but also exhibits excellent performance over a long period of time when used as a wear-resistant tool or a grinding tool. .

出願人 三菱金属株式会社 代理人 富 1)和 夫 外1名Applicant: Mitsubishi Metals Corporation Agent Tomi 1) Kazuo and 1 other person

Claims (1)

【特許請求の範囲】[Claims] 鉄族金属のうちの少なくとも1種を主成分とする合金基
体工具部材の表面に、同じく元素周期律衣の4a、5a
、および6a族の金属、並びに81およびBの炭化物、
窒化物、炭窒化物、および炭酸窒化物のうちの1種の単
層または2種以上の複層からなる硬質化合物層中に気相
合成法によ、9形成したダイヤモンド粒子が分散した組
織を有する表面被覆層を形成してなる耐摩耗性のすぐれ
た表面被覆工具部材。
4a and 5a, which are also periodic elements, are applied to the surface of an alloy-based tool member containing at least one of the iron group metals as a main component.
, and metals of group 6a, and carbides of 81 and B,
A structure in which diamond particles are formed by vapor phase synthesis in a hard compound layer consisting of a single layer or a multilayer of two or more of nitrides, carbonitrides, and carbonitrides is formed. A surface-coated tool member with excellent wear resistance formed by forming a surface coating layer comprising:
JP4170683A 1983-03-14 1983-03-14 Surface-coated tool member with superior wear resistance Pending JPS59170261A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4170683A JPS59170261A (en) 1983-03-14 1983-03-14 Surface-coated tool member with superior wear resistance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4170683A JPS59170261A (en) 1983-03-14 1983-03-14 Surface-coated tool member with superior wear resistance

Publications (1)

Publication Number Publication Date
JPS59170261A true JPS59170261A (en) 1984-09-26

Family

ID=12615865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4170683A Pending JPS59170261A (en) 1983-03-14 1983-03-14 Surface-coated tool member with superior wear resistance

Country Status (1)

Country Link
JP (1) JPS59170261A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63140084A (en) * 1986-12-01 1988-06-11 Sumitomo Electric Ind Ltd Hard carbon coated parts

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5993869A (en) * 1982-11-19 1984-05-30 Sumitomo Electric Ind Ltd Structure coated with hard layer containing diamond

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5993869A (en) * 1982-11-19 1984-05-30 Sumitomo Electric Ind Ltd Structure coated with hard layer containing diamond

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63140084A (en) * 1986-12-01 1988-06-11 Sumitomo Electric Ind Ltd Hard carbon coated parts

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