JPS59170262A - Surface-coated tool member with superior wear resistance - Google Patents
Surface-coated tool member with superior wear resistanceInfo
- Publication number
- JPS59170262A JPS59170262A JP4170783A JP4170783A JPS59170262A JP S59170262 A JPS59170262 A JP S59170262A JP 4170783 A JP4170783 A JP 4170783A JP 4170783 A JP4170783 A JP 4170783A JP S59170262 A JPS59170262 A JP S59170262A
- Authority
- JP
- Japan
- Prior art keywords
- tool member
- wear resistance
- layer
- cutting
- coating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
- B23B27/148—Composition of the cutting inserts
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
Abstract
Description
【発明の詳細な説明】
この発明は、すぐれた耐摩耗性を有し、切削、耐摩耗、
および研削の分野で使用するのに適した表面被覆工具部
材に関するものである。[Detailed description of the invention] This invention has excellent wear resistance, cutting, wear resistance,
and a surface-coated tool member suitable for use in the field of grinding.
従来、例えば、粉末冶金法にて製造された、硬質分散相
が主として゛元素周期律表の4a、5a。Conventionally, for example, hard dispersed phases produced by powder metallurgy are mainly composed of elements 4a and 5a of the periodic table.
および6a族の金属、並びにfEiの炭化物、窒化物炭
窒化物、および炭酸窒化物のうちの1種または2種以上
で構成され、一方結合相が主として鉄族金属、並びに同
5aおよび6a族の金属のうちの1種または2種以上で
構成された超硬質合金基体工具部材の表面に、同4a、
5a、および6a族の金属、並びにSiおよびBの炭化
物、窒化物、炭窒化物、および炭酸窒化物のうちの1種
の単層または2種以上の複層で構成された硬質化合物層
からなる表面被覆層を化学蒸着法や物理蒸着法などを用
いて形成してなる表面被覆超硬質合金部材が切削工具と
して用いられていることは良く知られるところである。and 6a group metals, and one or more of fEi carbides, nitride carbonitrides, and carbonitrides, while the binder phase is mainly composed of iron group metals, and fEi group 5a and 6a metals. The same 4a,
Consists of a hard compound layer composed of a single layer or a multilayer of two or more of metals of Groups 5a and 6a, and carbides, nitrides, carbonitrides, and carbonitrides of Si and B. It is well known that a surface-coated superhard alloy member formed by forming a surface coating layer using a chemical vapor deposition method, a physical vapor deposition method, or the like is used as a cutting tool.
しかし、このような従来表面被覆超硬質合金部材におい
ては、鋼や鋳鉄の切削では比較的すぐれた切削性能全示
すものの、被剛材が、例えば硬質のガラス繊維を内蔵し
たプラスチック(FRP)やセラミック仮焼体などであ
る場合には、耐摩耗性不足が原因して所望の切削寿命を
示さないものであった。However, although such conventional surface-coated cemented carbide members exhibit relatively excellent cutting performance when cutting steel or cast iron, they do not work well when cutting steel or cast iron. In the case of a calcined body, the desired cutting life was not exhibited due to insufficient wear resistance.
そこで、本発明者等は、上述のような観点から、特にF
RPやセラミック仮焼体などの被削材の切削に切削工具
として用いるのに適した工具部拐全得べく研究を行なっ
た結果、
基体工具部材を、鉄族金属のうちの少なくとも1種を主
成分とする合金、すなわちFe基合金、 Ni基合金、
またはCO基合金で構成し、
かつこの基体工具部材の表面に形成される表面被覆層を
、少なくとも1層の気相合成法により形成されたダイヤ
モンド層と、化学蒸着法や物理蒸着法などにより形成さ
れた、元素周期律表の4a。Therefore, from the above-mentioned viewpoint, the present inventors particularly
As a result of conducting research to obtain a tool part suitable for use as a cutting tool for cutting work materials such as RP and ceramic calcined bodies, it was found that the base tool part was made mainly of at least one type of iron group metal. Alloys as components, namely Fe-based alloys, Ni-based alloys,
Or, the surface coating layer formed on the surface of this base tool member is formed by a chemical vapor deposition method, a physical vapor deposition method, etc. and at least one diamond layer formed by a vapor phase synthesis method. 4a of the periodic table of elements.
5a、および6a族の金属、並びに81およびBの炭化
物、窒化物、炭窒化物、および炭酸窒化物のうちの1種
の単層または2種以上の複層からなる硬質化合物層との
交互積層構造とした表面被覆工具部材は、前記表面被覆
層中に存在する1層以上のグイA′モンド粒によって、
著しくすぐれた耐摩耗性をもつようになシ、したが1っ
て、これを切削工具として用いた場合には、鋼および鋳
鉄は勿論のこと、FRPやセラミック仮焼体などの被削
材の切削においてすぐれた切削性能を発揮し、さらに、
このようにすぐれた耐摩耗性を有するので、金属熱間加
工および金属成形用部材やダイス類などの耐摩耗工具や
、砥石およびラップ板などの研削工具として用いた場合
にもすぐれた性能全発揮するという知見を得たのである
。5a and 6a group metals, and 81 and B carbides, nitrides, carbonitrides, and carbonitrides. The structured surface-coated tool member has one or more layers of Gui A'mond grains present in the surface coating layer,
It has extremely excellent wear resistance, so when used as a cutting tool, it can be used for cutting materials such as steel and cast iron, as well as FRP and ceramic calcined bodies. Demonstrates excellent cutting performance in cutting, and also
Because it has such excellent wear resistance, it exhibits excellent performance when used as wear-resistant tools such as metal hot processing and metal forming parts and dies, and as grinding tools such as whetstones and lap plates. We obtained the knowledge that
この発明は、上記知見にもとづいてなされたものであっ
て、鉄族金属のうちの少々くとも1種を主成分とする合
金基体工具部材の表面に、少なくとも1層の気相合成法
により形成されたダイヤモンド層と、化学蒸着法や物理
蒸着法などにより形成された、元素周期律表の4 a+
’ 5 a + および6a族の金属、並びに81お
よびBの炭化物、窒化物。The present invention has been made based on the above findings, and includes the formation of at least one layer by vapor phase synthesis on the surface of an alloy-based tool member whose main component is at least one of the iron group metals. 4 a+ of the periodic table of elements formed by chemical vapor deposition method, physical vapor deposition method, etc.
' 5 a + and group 6a metals, and 81 and B carbides, nitrides.
炭窒化物、および炭酸窒化物のうちの1種の単層または
2種以上の複層で構成された硬質化合物層との交互積層
構造を有する表面被覆層全形成してなり、特に切削工具
、耐摩耗工具、および研削工JJ、として用いるのに適
した表面被覆工具部材に特徴を有するものである。The entire surface coating layer has an alternate lamination structure with hard compound layers composed of a single layer or a multilayer of two or more of carbonitrides and carbonitrides, and is particularly suitable for cutting tools, The present invention is characterized by a surface-coated tool member suitable for use as a wear-resistant tool and a grinder JJ.
なお、この発明の表面被覆層におけるダイヤモンド層は
、気相合成装置のフィラメントよシ蒸発したW、Mo、
あるいはTaなどを不純物として1〜10原子係程度含
有する場合がある。Note that the diamond layer in the surface coating layer of this invention is made of W, Mo,
Alternatively, it may contain about 1 to 10 atomic percent of Ta or the like as an impurity.
つぎに、この発明の表面被覆工具部材を実施例により具
体的に説明する。Next, the surface-coated tool member of the present invention will be specifically explained using examples.
実施例
基体工具部材として、それぞれ第1表に示される組成を
もち、かつJIS−8NP431の形状をもった切削チ
ップを用意し、これら基体工具部材に対して、通常の気
相合成装置を用い、反応炉 内径75咽φの石英管、
Wフィラメントの加熱温度:2000℃、切削チップと
Wフィラメントの間隔:1.5an、反応炉内に流され
る反応ガス:容量割合でCH3/ H2= 0.005
の混合ガス、
反応中保持される反応炉内雰囲気圧カニ20torr、
反応時間、3〜10時間、
の条件での気相合成処理、並びに、通常のマグネトロン
・スパッタリング装置を用い、
ターゲットの材質:それぞれ第1表における硬質化合物
層を構成する化合物と同じもの、反応炉内29囲気:2
X10torrのAr。Examples Cutting tips having the compositions shown in Table 1 and having the shape of JIS-8NP431 were prepared as base tool members, and these base tool members were processed using a normal vapor phase synthesis apparatus. Reactor: Quartz tube with inner diameter of 75 mm, W filament heating temperature: 2000°C, distance between cutting tip and W filament: 1.5 an, reaction gas flowed into the reactor: volume ratio CH3/H2 = 0.005
A mixed gas, an atmospheric pressure in the reactor maintained during the reaction of 20 torr,
Reaction time: 3 to 10 hours, gas phase synthesis treatment under the conditions of Inside 29 Ki: 2
Ar of X10torr.
ターゲットへの印加電圧ニー400V、切削チップの加
熱温度:500℃、
反応時間′:1〜3時間、
の条件での化学蒸着処理とを交互に行ない、それぞれ第
1表に示される平均層厚の少なくとも1層のダイヤモン
ド層と、同じくそれぞれ第1表に示される化合物および
平均層厚の単層または複層からなる硬質化合物の少なく
とも1層との交互積層にて構成された表面被覆層を、前
記切削チップの表面に形成することによって本発明被覆
切削チップ1〜13をそれぞれ製造した。Chemical vapor deposition treatment was performed alternately under the following conditions: voltage applied to the target was 400 V, heating temperature of the cutting tip was 500°C, reaction time was 1 to 3 hours, and the average layer thickness shown in Table 1 was obtained. The surface coating layer is composed of alternating layers of at least one diamond layer and at least one layer of a hard compound consisting of a compound shown in Table 1 and a single layer or multiple layers having an average layer thickness. Cutting tips 1 to 13 coated with the present invention were each manufactured by forming the coating on the surface of the cutting tip.
また、比較の目的で、気相合成法によるダイヤモンド層
の形成を行なわず、上記のマグネトロン・スパッタリン
グによる化学蒸着処理のみを第ト炉される組成の切削チ
ップ表面に施し、同じくそれぞれ第1表に示される硬質
化合物層および平均層厚の幣層捷たは複層からなる表面
被覆層を形成することによって、従来被覆切削チップ1
〜5をそれぞれ製造した。For comparison purposes, the diamond layer was not formed by vapor phase synthesis, and only the chemical vapor deposition treatment by magnetron sputtering described above was applied to the surface of the cutting chip having the composition to be treated in the first furnace. By forming a surface coating layer consisting of a hard compound layer and a thin layer or multiple layers having an average layer thickness as shown, the conventional coated cutting tip 1
-5 were produced, respectively.
つぎに、この結果得られた本発明被覆切削チップ1〜1
3および従来被覆切削チップ1〜5について、
被剛材:FRP、
切削速度:80m/mn、
送り: 0.2 tnm / rev、、切込み:1m
、
切削時間:3m1n、
の条件で連続切削試験全行ない、切刃の逃げ面摩耗幅を
測定した。この測定結果を第1表に示した。Next, the coated cutting chips 1 to 1 of the present invention obtained as a result
3 and conventional coated cutting tips 1 to 5, Rigid material: FRP, Cutting speed: 80 m/mn, Feed: 0.2 tnm/rev, Depth of cut: 1 m
, Cutting time: 3 ml, All continuous cutting tests were conducted under the following conditions, and the flank wear width of the cutting edge was measured. The measurement results are shown in Table 1.
第1表に示される結果から、本発明被覆切削チップ1〜
13は、著しくすぐれた耐摩耗性を有するので、FRP
の切削において、従来被覆切削チップに比して、すぐれ
た切削性能を長期に亘って発揮することが明らかである
。From the results shown in Table 1, the coated cutting tips 1 to 1 of the present invention
13 has extremely excellent wear resistance, so FRP
It is clear that the cutting tip exhibits superior cutting performance over a long period of time compared to conventional coated cutting tips.
上述のように、この発明の表面被覆工具部材は、表面被
覆層中における少なくとも1層以上のダイヤモンド層の
存在によって、すぐれた耐摩耗性を有するので、鋼や鋳
鉄は勿論のこと、FRPやセラミック仮焼体、さらにM
およびM合金などの被削材の切削に切削工具として用い
るのに適するばかシでなく、耐摩耗工具や研削工具など
として用いた場合にもすぐれた性能を著しく長期に亘っ
て発揮するのである。As mentioned above, the surface-coated tool member of the present invention has excellent wear resistance due to the presence of at least one diamond layer in the surface coating layer, so it can be used not only with steel and cast iron but also with FRP and ceramics. Calcined body, further M
It is not only suitable for use as a cutting tool for cutting work materials such as M alloys, but also exhibits excellent performance over a long period of time when used as a wear-resistant tool or a grinding tool.
出願人 三菱金属株式会社 代理人 富 1)和 夫 外1名 −31コApplicant: Mitsubishi Metals Corporation Agent Tomi 1) Kazuo and 1 other person -31 pieces
Claims (1)
体工具部材の表面に、少なくとも1層の気相合成法によ
り形成されたダイヤモンド層と、元素周期律表の4a、
5a、および6a族の金属。 並びにSlおよびB・の炭化物、窒化物、炭窒化物。 および炭酸窒化物のうちの1種の単層または2種以上の
複層で構成された硬質化合物層との交互積層構造を有す
る表面被覆層を形成してなる耐摩耗性のすぐれた表面被
覆工具部材。[Scope of Claims] At least one diamond layer formed by a vapor phase synthesis method on the surface of an alloy-based tool member containing at least one of the iron group metals as a main component, and 4a of the periodic table of elements. ,
Group 5a and 6a metals. and carbides, nitrides, carbonitrides of Sl and B. A surface-coated tool with excellent wear resistance formed by forming a surface coating layer having an alternate lamination structure with a hard compound layer composed of a single layer or a multilayer of two or more of carbonate and nitrides. Element.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4170783A JPS59170262A (en) | 1983-03-14 | 1983-03-14 | Surface-coated tool member with superior wear resistance |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4170783A JPS59170262A (en) | 1983-03-14 | 1983-03-14 | Surface-coated tool member with superior wear resistance |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59170262A true JPS59170262A (en) | 1984-09-26 |
JPS6210301B2 JPS6210301B2 (en) | 1987-03-05 |
Family
ID=12615895
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4170783A Granted JPS59170262A (en) | 1983-03-14 | 1983-03-14 | Surface-coated tool member with superior wear resistance |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59170262A (en) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6115972A (en) * | 1984-06-27 | 1986-01-24 | サントレード リミテイド | Article with superhard coating |
JPS61159302A (en) * | 1984-12-28 | 1986-07-19 | Kyocera Corp | Cutting tip |
FR2596775A1 (en) * | 1986-04-07 | 1987-10-09 | Univ Limoges | Hard multilayer coating produced by ion deposition of titanium nitride, titanium carbonitride and i-carbon |
EP0284190A2 (en) * | 1987-02-24 | 1988-09-28 | Semiconductor Energy Laboratory Co., Ltd. | Enhanced CVD method for deposition of carbon |
JPH03146666A (en) * | 1989-10-31 | 1991-06-21 | Shimadzu Corp | Formation of hard carbon film |
US5271696A (en) * | 1991-04-08 | 1993-12-21 | Hilti Aktiengesellschaft | Tool bit for machining materials |
EP0651069A1 (en) * | 1993-10-29 | 1995-05-03 | VLAAMSE INSTELLING VOOR TECHNOLOGISCH ONDERZOEK, afgekort V.I.T.O., onderneming van openbaar nut onder de vorm van een n.v. | Method for applying a friction-reducing coating |
US6207281B1 (en) | 1988-03-07 | 2001-03-27 | Semiconductor Energy Laboratory Co., Ltd. | Electrostatic-erasing abrasion-proof coating and method for forming the same |
US6224952B1 (en) | 1988-03-07 | 2001-05-01 | Semiconductor Energy Laboratory Co., Ltd. | Electrostatic-erasing abrasion-proof coating and method for forming the same |
JP2009156836A (en) * | 2007-12-28 | 2009-07-16 | Horiba Ltd | Comparison electrode |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3712530A1 (en) * | 1987-04-13 | 1988-11-03 | Fischer Artur Werke Gmbh | STORAGE CONTAINER WITH DRAWER ELEMENT |
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---|---|---|---|---|
JPS52110209A (en) * | 1976-03-15 | 1977-09-16 | Mitsubishi Metal Corp | Coated hard alloy tool |
JPS566920A (en) * | 1979-06-28 | 1981-01-24 | Philips Nv | Dry lubricating bearing |
JPS5641372A (en) * | 1979-09-10 | 1981-04-18 | Mitsubishi Metal Corp | Surface covered ultra hard alloy member for cutting tool |
JPS56108876A (en) * | 1980-02-04 | 1981-08-28 | Citizen Watch Co Ltd | Silver plated exterior decorative parts for watch and their manufacture |
JPS572148A (en) * | 1980-06-06 | 1982-01-07 | Hitachi Ltd | Ternary-to-binary code converting device |
JPS57100989A (en) * | 1980-12-12 | 1982-06-23 | Sumitomo Electric Industries | Coated ceramic tool |
-
1983
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Patent Citations (6)
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JPS52110209A (en) * | 1976-03-15 | 1977-09-16 | Mitsubishi Metal Corp | Coated hard alloy tool |
JPS566920A (en) * | 1979-06-28 | 1981-01-24 | Philips Nv | Dry lubricating bearing |
JPS5641372A (en) * | 1979-09-10 | 1981-04-18 | Mitsubishi Metal Corp | Surface covered ultra hard alloy member for cutting tool |
JPS56108876A (en) * | 1980-02-04 | 1981-08-28 | Citizen Watch Co Ltd | Silver plated exterior decorative parts for watch and their manufacture |
JPS572148A (en) * | 1980-06-06 | 1982-01-07 | Hitachi Ltd | Ternary-to-binary code converting device |
JPS57100989A (en) * | 1980-12-12 | 1982-06-23 | Sumitomo Electric Industries | Coated ceramic tool |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0576546B2 (en) * | 1984-06-27 | 1993-10-22 | Santrade Ltd | |
JPS6115972A (en) * | 1984-06-27 | 1986-01-24 | サントレード リミテイド | Article with superhard coating |
JPS61159302A (en) * | 1984-12-28 | 1986-07-19 | Kyocera Corp | Cutting tip |
FR2596775A1 (en) * | 1986-04-07 | 1987-10-09 | Univ Limoges | Hard multilayer coating produced by ion deposition of titanium nitride, titanium carbonitride and i-carbon |
EP0284190A2 (en) * | 1987-02-24 | 1988-09-28 | Semiconductor Energy Laboratory Co., Ltd. | Enhanced CVD method for deposition of carbon |
US6207281B1 (en) | 1988-03-07 | 2001-03-27 | Semiconductor Energy Laboratory Co., Ltd. | Electrostatic-erasing abrasion-proof coating and method for forming the same |
US6224952B1 (en) | 1988-03-07 | 2001-05-01 | Semiconductor Energy Laboratory Co., Ltd. | Electrostatic-erasing abrasion-proof coating and method for forming the same |
US6265070B1 (en) | 1988-03-07 | 2001-07-24 | Semiconductor Energy Laboratory Co., Ltd. | Electrostatic-erasing abrasion-proof coating and method for forming the same |
US6583481B2 (en) | 1988-03-07 | 2003-06-24 | Semiconductor Energy Laboratory Co., Ltd. | Electrostatic-erasing abrasion-proof coating and method for forming the same |
US7144629B2 (en) | 1988-03-07 | 2006-12-05 | Semiconductor Energy Laboratory Co., Ltd. | Electrostatic-erasing abrasion-proof coating and method for forming the same |
JPH03146666A (en) * | 1989-10-31 | 1991-06-21 | Shimadzu Corp | Formation of hard carbon film |
US5271696A (en) * | 1991-04-08 | 1993-12-21 | Hilti Aktiengesellschaft | Tool bit for machining materials |
EP0651069A1 (en) * | 1993-10-29 | 1995-05-03 | VLAAMSE INSTELLING VOOR TECHNOLOGISCH ONDERZOEK, afgekort V.I.T.O., onderneming van openbaar nut onder de vorm van een n.v. | Method for applying a friction-reducing coating |
BE1008229A3 (en) * | 1993-10-29 | 1996-02-20 | Vito | METHOD FOR APPLYING A WEAR PROTECTIVE LAYER TO A SUBSTRATE |
JP2009156836A (en) * | 2007-12-28 | 2009-07-16 | Horiba Ltd | Comparison electrode |
Also Published As
Publication number | Publication date |
---|---|
JPS6210301B2 (en) | 1987-03-05 |
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