JPS62218566A - Surface coated tool member having excellent wear resistance - Google Patents
Surface coated tool member having excellent wear resistanceInfo
- Publication number
- JPS62218566A JPS62218566A JP2605687A JP2605687A JPS62218566A JP S62218566 A JPS62218566 A JP S62218566A JP 2605687 A JP2605687 A JP 2605687A JP 2605687 A JP2605687 A JP 2605687A JP S62218566 A JPS62218566 A JP S62218566A
- Authority
- JP
- Japan
- Prior art keywords
- metals
- layer
- tool member
- hard
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010410 layer Substances 0.000 claims abstract description 31
- 239000002184 metal Substances 0.000 claims abstract description 23
- 229910052751 metal Inorganic materials 0.000 claims abstract description 23
- 150000002739 metals Chemical class 0.000 claims abstract description 16
- 150000004767 nitrides Chemical class 0.000 claims abstract description 10
- 230000000737 periodic effect Effects 0.000 claims abstract description 10
- 239000010432 diamond Substances 0.000 claims abstract description 9
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 9
- 239000002345 surface coating layer Substances 0.000 claims abstract description 8
- 239000002356 single layer Substances 0.000 claims abstract description 7
- 150000001875 compounds Chemical class 0.000 claims description 14
- 239000012071 phase Substances 0.000 claims description 10
- 150000001247 metal acetylides Chemical class 0.000 claims description 9
- 239000012808 vapor phase Substances 0.000 claims description 5
- 239000011230 binding agent Substances 0.000 claims description 4
- -1 iron group metals Chemical class 0.000 claims description 4
- 238000001308 synthesis method Methods 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 abstract description 5
- 239000000956 alloy Substances 0.000 abstract description 5
- 230000015572 biosynthetic process Effects 0.000 abstract description 4
- 238000003786 synthesis reaction Methods 0.000 abstract description 4
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 abstract 2
- 239000006185 dispersion Substances 0.000 abstract 2
- 238000010276 construction Methods 0.000 abstract 1
- 238000010030 laminating Methods 0.000 abstract 1
- 235000012054 meals Nutrition 0.000 abstract 1
- 238000005520 cutting process Methods 0.000 description 31
- 229910001018 Cast iron Inorganic materials 0.000 description 5
- 229910000831 Steel Inorganic materials 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 239000010959 steel Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000035484 reaction time Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 238000004663 powder metallurgy Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、すぐれた耐摩耗性を有し、切削、耐摩耗、
および研削の分野で使用するのに適した表面被覆工具部
材に関するものである。[Detailed description of the invention] [Industrial field of application] This invention has excellent wear resistance, and is suitable for cutting, wear resistance,
and a surface-coated tool member suitable for use in the field of grinding.
従来、例えば、粉末冶金法にて製造された、硬質分散相
が、主として元素周期律表の４ａ、 ５ａ、および６ａ
族の金属、並びにＳｉの炭化物、窒化物、炭窒化物、お
よび炭酸窒化物のうちの１種または２種以上で構成され
、一方結合相が、主として鉄族金属、並びに同５ａおよ
び６ａ族の金属のうちの１種または２種以上で構成され
た超硬質合金基体工具部材の表面に、同４ａ、５ａ、お
よび６ａ族の金属、並びにＳｉおよびＢの炭化物、窒化
物、炭窒化物、および炭酸窒化物のうちの１樵の単層ま
たは２種以上の複層で構成された硬質化合物層からなる
表面被覆層を化学蒸着法や物理蒸着法などを用いて形成
して々る表面被覆超硬質合金部材が切削工具として用い
られていることは良く知られるところである。Conventionally, for example, hard dispersed phases produced by powder metallurgy are mainly composed of elements 4a, 5a, and 6a of the periodic table.
Si group metals and one or more of Si carbides, nitrides, carbonitrides, and carbonitrides, while the binder phase is mainly composed of iron group metals and Si group 5a and 6a metals. On the surface of a superhard alloy base tool member composed of one or more metals, metals of groups 4a, 5a, and 6a, as well as carbides, nitrides, carbonitrides of Si and B, and A surface coating method in which a surface coating layer consisting of a hard compound layer composed of a single layer or a multilayer of two or more types of carbonic nitride is formed using a chemical vapor deposition method or a physical vapor deposition method. It is well known that hard alloy members are used as cutting tools.
しかし、このような従来表面被覆超硬質合金部材におい
ては、鋼や鋳鉄の切削では比較的すぐれた切削性能を示
すものの、被剛材が、例えば硬質のガラス繊維を内蔵し
たプラスチック（ＦＲＰ）やセラミック殻焼体などであ
る場合には、耐摩耗性不足が原因して所望の切削寿命を
示さないものであった。However, although such conventional surface-coated cemented carbide members exhibit relatively excellent cutting performance when cutting steel or cast iron, they do not work well when cutting steel or cast iron. In the case of a fired shell, etc., the desired cutting life was not exhibited due to insufficient wear resistance.
そこで、本発明者等は、上述のような観点から、特にＦ
Ｉ（Ｐやセラミック■焼体などの被剛材の切削に切削工
具として用いるのに適した工具部材を得べく研究を行な
った結果、
基体工具部材を、硬質分散相が、主として元素周期律表
の４ａ、５ａ、および６ａ族の金属、並びにＳｉの炭化
物、窒化物、炭窒化物、および炭酸窒化物のうちの１種
またｌｄ ２ ｆｉｅｆ以上で構成され、一方結合相が
、主として鉄族金属、並びに元素周期律表の５ａおよび
６ａ族の金属のうちの１種または２種以上で構成された
超硬質合金とし、かつこの基体工具部材の表面に形成さ
れる表面被覆層を、化学蒸着法や物理蒸着法などにより
形成された同４ａ、５ａ、および６ａ族の金属、並びに
８１およびＢの炭化物、窒化物、炭窒化物、および炭酸
窒化物のうちの１＆の単層捷だは２種以上の複層からな
る硬質化合物層を最内層として、この硬質化合物層の少
なくとも２層と、気相合成法によシ形成したダイヤモン
ド層の少なくとも１層とからなる交互積層構造とした表
面被覆工具部材は、前記表面被覆層中に存在する１層以
上のダイヤモンド層によって、著しくすぐれた耐摩耗性
をもつようになり、したがって、これを切削工具として
用いた場合には、鋼および鋳鉄は勿論のこと、ＦＲＰや
セラミック■焼体などの被削材の切削においてすぐれた
切削性能を発揮し、さらに、このようにすぐれた耐摩耗
性を有するので、金属熱間加工および金属成形用部材や
ダイス類などの耐摩耗工具や、砥石およびラップ板など
の研削工具として用いた場合にもすぐれた性能を発揮す
るという知見を得たのである。Therefore, from the above-mentioned viewpoint, the present inventors particularly
As a result of conducting research to obtain a tool member suitable for use as a cutting tool for cutting rigid materials such as I(P) and ceramic fired bodies, it was found that the base tool member was composed of a hard dispersed phase mainly based on the periodic table of elements. 4a, 5a, and 6a metals, and one of Si carbides, nitrides, carbonitrides, and carbonitrides, or ld 2 fief or more, while the binder phase is mainly composed of iron group metals. , and one or more metals from groups 5a and 6a of the periodic table of elements, and the surface coating layer formed on the surface of this base tool member is formed by chemical vapor deposition. A single layer or two of metals of Groups 4a, 5a, and 6a, and carbides, nitrides, carbonitrides, and carbonitrides of 81 and B formed by physical vapor deposition or the like. A surface-coated tool with an alternating layered structure consisting of the hard compound layer consisting of the above multilayers as the innermost layer, at least two layers of this hard compound layer, and at least one diamond layer formed by vapor phase synthesis method. Due to the presence of one or more diamond layers in the surface coating layer, the component has extremely good wear resistance, and therefore, when used as a cutting tool, it can be used not only on steel and cast iron, but also on steel and cast iron. In particular, it exhibits excellent cutting performance when cutting work materials such as FRP and ceramic fired bodies, and also has excellent wear resistance, so it is suitable for metal hot processing and metal forming parts and dies. They found that it also exhibits excellent performance when used as wear-resistant tools such as, and grinding tools such as whetstones and lap plates.
この発明は、上記知見にもとづいてなされたものであっ
て、硬質分散相が、主として元素周期律表の４ａ、５ａ
％および６ａ族の金属、並びにＳｉの炭化物、窒化物、
炭窒化物、および炭酸窒化物のうちの１種または２種以
上で構成され、一方結合相が、主として鉄族金属、並び
に元素周期律表の５ａおよび６ａ族の金属のうちの１種
または２種以上で構成された超硬質合金基体工具部材の
表面に、化学蒸着法や物理蒸着法などによシ形成された
、同４ａ、５ａ、および６ａ族の金属、並びに８１およ
びＢの炭化物、蟹化物、炭窒化物、および炭酸窒化物の
うちの１種の単層または２種以上の複層で構成された硬
質化合物層を最内−として、この硬質化合物層の少なく
とも２膚と、気相合成法によシ形成したダイヤモンド層
の少なくとも１５一
層とからなる交互積層構造を有する表面被覆層を形成し
てなシ、特に切削工具、耐摩耗工具、および研削工具と
して用いるのに適した表面被覆工具部材に特徴を有する
ものである。This invention was made based on the above knowledge, and it is found that the hard dispersed phase mainly contains elements 4a and 5a of the periodic table.
% and group 6a metals, as well as carbides, nitrides of Si,
It is composed of one or more of carbonitrides and carbonitrides, while the binder phase is mainly composed of iron group metals and one or two of metals of groups 5a and 6a of the periodic table of the elements. Metals of Groups 4a, 5a, and 6a, carbides of 81 and B, and carbides of 81 and B formed on the surface of a superhard alloy base tool member composed of 4 or more species by chemical vapor deposition, physical vapor deposition, etc. A hard compound layer composed of a single layer or a multilayer of two or more of compounds, carbonitrides, and carbonitrides is the innermost layer, and at least two layers of this hard compound layer and a gas phase are formed. The surface coating is particularly suitable for use as a cutting tool, a wear-resistant tool and a grinding tool. The tool member has features.
なお、この発明のダイヤモンド層は、気相合成装置のフ
ィラメントよシ蒸発したＷ、Ｔａ、あるいはＭｏなどを
不純物として１〜１ｏ原子チ程度含有する場合がある。The diamond layer of the present invention may contain about 1 to 10 atoms of W, Ta, Mo, or the like as impurities that have been evaporated from the filament of the vapor phase synthesis apparatus.
つぎに、この発明の表面被覆工具部材を実施例によシ具
体的に説明する。Next, the surface-coated tool member of the present invention will be specifically explained using examples.
基体工具部材として、それぞれ第１表に示される組成を
もち、かつＪＩＳ−８ＮＰ４３１の形状をもった超硬質
合金製切削チップを用意し、これら基体工具部材に対し
て、通常の気相合成装置を用い、
反応炉：内径７５藺φの石英管、
Ｗフィラメントの加熱温度： ２０００℃、切削チップ
とＷフィラメントの間隔：１〜２（ｍ。Cemented carbide cutting tips having the composition shown in Table 1 and the shape of JIS-8NP431 were prepared as the base tool members, and these base tool members were subjected to a normal vapor phase synthesis apparatus. Reactor: quartz tube with inner diameter of 75 mm, heating temperature of W filament: 2000°C, distance between cutting tip and W filament: 1-2 (m).
反応炉内に流される反応ガスニ容量割合でＣＨ３／Ｈ，
２−０，００５の混合ガス、
反応中保持される反応炉内雰囲気圧カニ ２０ ｔｏｒ
ｒ。CH3/H in the reaction gas divolume ratio flowed into the reactor,
2-0,005 mixed gas, atmospheric pressure in the reactor maintained during the reaction 20 torr
r.
反応時間：３〜１０時間、
の条件での気相合成処理、並びに、通常のマグネトロン
・スパッタリンｒ装置を用い、
ターゲットの材質：それぞれ第１表における硬質化合物
漕を構成する化合物と同じもの、反応炉内雰囲気：２Ｘ
１０ｔｏｒｒのＡｒ％ターゲットへの印加電圧ニー４０
０Ｖ。Reaction time: 3 to 10 hours, using a gas phase synthesis treatment under the following conditions and using a normal magnetron sputtering device, Target material: The same compound as the compound constituting the hard compound tank in Table 1, respectively. Atmosphere inside reactor: 2X
Applied voltage knee 40 to Ar% target of 10 torr
0V.
切削チップの加熱温度二５００℃、
反応時間：１〜３時間、
の条件での化学蒸着処理とを交互に行表い、硬質化合物
を最内層として、それぞれ第１表に示される平均層厚の
少なくともｌ漕のダイヤモンド層と、同じくそれぞれ第
１表に示される化合物および平均層厚の単層または複層
からなる硬質化合物の少なくとも２層との交互積層にて
構成された表面被覆層を、前記切削チップの表面に形成
することによって本発明被覆切削チップ１〜１３をそれ
ぞれ製造した。The heating temperature of the cutting tip was 2500℃, the reaction time was 1 to 3 hours, and the chemical vapor deposition treatment was carried out alternately under the following conditions, and the hard compound was used as the innermost layer, and the average layer thickness shown in Table 1 was obtained. A surface coating layer constituted by alternating lamination of at least one diamond layer and at least two layers of a hard compound consisting of a compound shown in Table 1 and a single layer or multiple layers of average layer thickness, respectively. Cutting tips 1 to 13 coated with the present invention were each manufactured by forming the coating on the surface of the cutting tip.
また、比較の目的で、気相合成法によるダイヤモンド層
の形成を行なわず、上記のマグネトロン・スパッタリン
グによる化学蒸着処理のみを切削チップ表面に施し、そ
れぞれ第１表に示される硬質化合物看および平均層厚の
単層または複層からなる表面被覆層を形成することによ
って、従来被覆切削チップ１〜５をそれぞれ製造した。For comparison purposes, only the chemical vapor deposition treatment using magnetron sputtering described above was applied to the surface of the cutting tip without forming a diamond layer using the vapor phase synthesis method, and the results showed that the hard compound surface and average layer thickness shown in Table 1 were obtained, respectively. Conventionally coated cutting tips 1 to 5 were each manufactured by forming a surface coating layer consisting of a thick single layer or multiple layers.
つぎに、この結果得られた本発明被覆切削チップ１〜１
３および従来被覆切削チップ１〜５について、
被削材：ＦＲＰ。Next, the coated cutting chips 1 to 1 of the present invention obtained as a result
3 and conventional coated cutting tips 1 to 5, Work material: FRP.
切削速度：８５ｍ／ＷＩＩＬ。Cutting speed: 85m/WIIL.
送り： ０．１ ｍ／ ｒｅｖ、、 切込み：１１１Ｋ。Feed: 0.1 m/rev,, Depth of cut: 111K.
切削時間：３＋ｗ＋ｍ。Cutting time: 3+w+m.
の条件で連続切削試験を行ない、切刃の逃げ面摩耗幅を
測定した。この測定結果を！８１表に示した。A continuous cutting test was conducted under the following conditions, and the flank wear width of the cutting edge was measured. Check out this measurement result! It is shown in Table 81.
第１表に示される結果から、本発明被覆切削チップ１〜
１３は、著しくすぐれた耐摩耗性を有するので、ＦＲＰ
の切削（（おいて、従来被覆切削チップに比して、すぐ
れた切削性能を長期に亘って発揮することが明らかであ
る。From the results shown in Table 1, the coated cutting tips 1 to 1 of the present invention
13 has extremely excellent wear resistance, so FRP
It is clear that the cutting tip exhibits superior cutting performance over a long period of time compared to conventional coated cutting tips.
上述のように、この発明の表面被覆工具部材は、表面被
覆層中におけるダイヤモンド層の存在によって、すぐれ
た耐摩耗性を有するので、鋼や鋳鉄は勿論のこと、ＦＲ
Ｐやセラミック■焼体、さらにＡＰ、およびＭ合金など
の被剛材の切削に切削工具として用いるのに適するばか
りでなく、耐摩耗工具や研削工具などとして用いた場合
にもすぐれた性能を著しく長期に亘って発揮するのであ
る。As mentioned above, the surface-coated tool member of the present invention has excellent wear resistance due to the presence of the diamond layer in the surface coating layer, so it can be used not only with steel and cast iron but also with FR.
Not only is it suitable for use as a cutting tool for cutting rigid materials such as P, ceramic fired bodies, AP, and M alloys, but it also exhibits outstanding performance when used as wear-resistant tools and grinding tools. It is effective over a long period of time.
Claims (1)
よび６ａ族の金属、並びにＳｉの炭化物、窒化物、炭窒
化物、および炭酸窒化物のうちの１種または２種以上で
構成され、一方結合相が、主として鉄族金属、並びに元
素周期律表の５ａおよび６ａ族の金属のうちの１種また
は２種以上で構成された超硬質合金基体工具部材の表面
に、元素周期律表の４ａ、５ａ、および６ａ族の金属、
並びにＳｉおよびＢの炭化物、窒化物、炭窒化物、およ
び炭酸窒化物のうちの１種の単層または２種以上の複層
で構成された硬質化合物層を最内層として、この硬質化
合物層の少なくとも２層と、気相合成法により形成した
ダイヤモンド層の少なくとも１層とからなる交互積層構
造を有する表面被覆層を形成してなる耐摩耗性のすぐれ
た表面被覆工具部材。The hard dispersed phase is mainly composed of metals of groups 4a, 5a, and 6a of the periodic table of the elements, and one or more of Si carbides, nitrides, carbonitrides, and carbonitrides, On the other hand, the binder phase is applied to the surface of a cemented carbide-based tool member mainly composed of iron group metals and one or more metals of groups 5a and 6a of the periodic table of the elements. metals of groups 4a, 5a, and 6a,
and a hard compound layer composed of a single layer or a multilayer of two or more of Si and B carbides, nitrides, carbonitrides, and carbonitrides as the innermost layer; A surface-coated tool member having excellent wear resistance, comprising a surface coating layer having an alternating laminated structure consisting of at least two layers and at least one diamond layer formed by a vapor phase synthesis method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2605687A JPS62218566A (en) | 1983-03-11 | 1987-02-06 | Surface coated tool member having excellent wear resistance |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4028883A JPS59166672A (en) | 1983-03-11 | 1983-03-11 | Surface-coated tool member excellent in wear resistance |
| JP2605687A JPS62218566A (en) | 1983-03-11 | 1987-02-06 | Surface coated tool member having excellent wear resistance |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4028883A Division JPS59166672A (en) | 1983-03-11 | 1983-03-11 | Surface-coated tool member excellent in wear resistance |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62218566A true JPS62218566A (en) | 1987-09-25 |
| JPS635470B2 JPS635470B2 (en) | 1988-02-03 |
Family
ID=26363793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2605687A Granted JPS62218566A (en) | 1983-03-11 | 1987-02-06 | Surface coated tool member having excellent wear resistance |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62218566A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01201480A (en) * | 1987-10-15 | 1989-08-14 | Sumitomo Electric Ind Ltd | Diamond coated hydrogen embrittled metal and production thereof |
| JPH0456758A (en) * | 1990-06-25 | 1992-02-24 | Toyo Kohan Co Ltd | Thin coating film excellent in wear resistance and corrosion resistance |
-
1987
- 1987-02-06 JP JP2605687A patent/JPS62218566A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01201480A (en) * | 1987-10-15 | 1989-08-14 | Sumitomo Electric Ind Ltd | Diamond coated hydrogen embrittled metal and production thereof |
| JPH0456758A (en) * | 1990-06-25 | 1992-02-24 | Toyo Kohan Co Ltd | Thin coating film excellent in wear resistance and corrosion resistance |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS635470B2 (en) | 1988-02-03 |
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