JPS6232268B2 - - Google Patents
Info
- Publication number
- JPS6232268B2 JPS6232268B2 JP58040288A JP4028883A JPS6232268B2 JP S6232268 B2 JPS6232268 B2 JP S6232268B2 JP 58040288 A JP58040288 A JP 58040288A JP 4028883 A JP4028883 A JP 4028883A JP S6232268 B2 JPS6232268 B2 JP S6232268B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- carbonitrides
- metals
- cutting
- carbides
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010410 layer Substances 0.000 claims description 25
- 239000002184 metal Substances 0.000 claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 20
- 150000002739 metals Chemical class 0.000 claims description 13
- 150000001875 compounds Chemical class 0.000 claims description 10
- 239000010432 diamond Substances 0.000 claims description 9
- 229910003460 diamond Inorganic materials 0.000 claims description 9
- 239000012071 phase Substances 0.000 claims description 9
- 239000002345 surface coating layer Substances 0.000 claims description 9
- 150000001247 metal acetylides Chemical class 0.000 claims description 8
- 150000004767 nitrides Chemical class 0.000 claims description 8
- 230000000737 periodic effect Effects 0.000 claims description 8
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 238000003786 synthesis reaction Methods 0.000 claims description 6
- 239000012808 vapor phase Substances 0.000 claims description 6
- -1 iron group metals Chemical class 0.000 claims description 5
- 239000002356 single layer Substances 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 239000011230 binding agent Substances 0.000 claims description 3
- 238000005520 cutting process Methods 0.000 description 30
- 229910001018 Cast iron Inorganic materials 0.000 description 5
- 229910000831 Steel Inorganic materials 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000010959 steel Substances 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000035484 reaction time Effects 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910000967 As alloy Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000004663 powder metallurgy Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
Description
この発明は、すぐれた耐摩耗性を有し、切削、
耐摩耗、および研削の分野で使用するのに適した
表面被覆工具部材に関するものである。
従来、例えば、粉末冶金法にて製造された、硬
質分散相が主として元素周期律表の4a、5a、およ
び6a族の金属、並びにSiの炭化物、窒化物、炭窒
化物、および炭酸窒化物のうちの１種または２種
以上で構成され、一方結合相が主として鉄族金
属、並びに同5aおよび6a族の金属のうちの１種ま
たは２種以上で構成された超硬質合金基体工具部
材の表面に、同4a、5a、および6a族の金属、並び
にSiおよびＢの炭化物、窒化物、炭窒化物、およ
び炭酸窒化物のうちの１種の単層または２種以上
の複層で構成された硬質化合物層からなる表面被
覆層を化学蒸着法や物理蒸着法などを用いて形成
してなる表面被覆超硬質合金部材が切削工具とし
て用いられていることは良く知られるところであ
る。
しかし、このような従来表面被覆超硬質合金部
材においては、鋼や鋳鉄の切削では比較的すぐれ
た切削性能を示すものの、被削材が、例えば硬質
のガラス繊維を内蔵したプラスチツク（FRP）
やセラミツク〓焼体などである場合には、耐摩耗
性不足が原因して所望の切削寿命を示さないもの
であつた。
そこで、本発明者等は、上述のような観点か
ら、特にFRPやセラミツク〓焼体などの被削材
の切削に切削工具として用いるのに適した工具部
材を得べく研究を行なつた結果、
基体工具部材を、硬質分散相が主として元素周
期律表の4a、5a、および6a族の金属、並びにSiの
炭化物、窒化物、炭窒化物、および炭酸窒化物の
うちの１種または２種以上で構成され、一方結合
相が主として鉄族金属、並びに元素周期律表の5a
および６ａ族の金属のうちの１種または２種以上
で構成された超硬質合金とし、
かつこの基体工具部材の表面に形成される表面
被覆層を、気相合成法により形成したダイヤモン
ド層を最内層として、このダイメモンド層の少な
くとも１層と、化学蒸着法や物理蒸着法により形
成された同4a、5a、および6a族の金属並びにSiお
よびＢの炭化物、窒化物、炭窒化物、および炭酸
窒化物のうちの１種の単層または２種以上の複層
で構成された硬質化合物層の少なくとも１層とか
らなる交互積層構造とした表面被覆工具部材は、
前記表面被覆層中に存在する１層以上のダイヤモ
ンド層によつて、著しくすぐれた耐摩耗性をもつ
ようになり、したがつて、これを切削工具として
用いた場合には、鋼および鋳鉄は勿論のこと、
FRPやセラミツク〓焼体などの被削材の切削に
おいてすぐれた切削性能を発揮し、さらに、この
ようにすぐれた耐摩耗性を有するので、金属熱間
加工および金属成形用部材やダイス類などの耐摩
耗工具や、砥石およびラツプ板などの研削工具と
して用いた場合にもすぐれた性能を発揮するとい
う知見を得たのである。
この発明は、上記知見にもとづいてなされたも
のであつて、硬質分散相が、主として元素周期律
表の4a、5a、および6a族の金属、並びにSiの炭化
物、窒化物、炭窒化物、および炭酸窒化物のうち
の１種または２種以上で構成され、一方結合相
が、主として鉄族金属、並びに元素周期律表の5a
および6a族の金属のうちの１種または２種以上で
構成された超硬質合金基体工具部材の表面に、気
相合成法により形成したダイヤモンド層を最内層
として、このダイヤモンド層の少なくとも１層
と、化学蒸着法や物理蒸着法などにより形成され
た、同4a、5a、および6a族の金属、並びにSiおよ
びＢの炭化物、窒化物、炭窒化物、および炭酸窒
化物のうちの１種の単層または２種以上の複層で
構成された硬質化合物層の少なくとも１層とから
なる交互積層構造を有する表面被覆層を形成して
なり、特に切削工具、耐摩耗工具、および研削工
具として用いるのに適した表面被覆工具部材に特
徴を有するものである。
なお、この発明のダイヤモンド層は、気相合成
装置のフイラメントより蒸発したＷ、Ta、ある
いはMoなどを不純物として１〜10原子％程度含
有する場合がある。
つぎに、この発明の表面被覆工具部材を実施例
により具体的に説明する。
実施例
基体工具部材として、それぞれ第１表に示され
る組成をもち、かつJIS・SNP431の形状をもつた
超硬質合金製切削チツプを用意し、これら基体工
具部材に対して、通常の気相合成装置を用い、
反応炉：内径75mmφの石英管、
Ｗフイラメントの加熱温度：2000℃、
切削チツプとＷフイラメントの間隔：１〜２cm、
反応炉内に流される反応ガス：容量割合でCH3／
H2＝0.005の混合ガス
反応中保持される反応炉内雰囲気圧力：20torr、
反応時間：３〜10時間、
の条件での気相合成処理、並びに、通常のマグネ
トロン・スパツタリング装置を用い、
ターゲツトの材質：それぞれ第１表における硬
質化合物層を構成する化合物と同じもの、
反応炉内雰囲気：２×10-2torrのAr、
ターゲツトへの印加電圧：−400V、
切削チツプの加熱温度：500℃、
反応時間：１〜３時間、
の条件での化学蒸着処理とを交互に行ない、それ
ぞれ第１表に示される平均層厚の少なくとも１層
のダイヤモンド層と、同じくそれぞれ第１表に示
される化合物および平均層厚の単層または複層か
らなる硬質化合物の少なくとも１層との交互積層
にて構成された表面被覆層を、前記切削チツプの
表面に形成することによつて本発明被覆切削チツ
プ１〜10をそれぞれ製造した。
また比較の目的で、気相合成法によるダイヤモ
ンド層の形成を行なわず、上記のマグネトロン・
スパツタリングによる化学蒸着処理のみを切削チ
ツプ表面に施し、それぞれ第１表に示される硬質
化合物層および平均層厚の単層または複層からな
る表面被覆層を形成することによつて、従来被覆
切削チツプ１〜５をそれぞれ製造した。
つぎに、この結果得られた本発明被覆切削チツ
プ１〜10および従来被覆切削チツプ１〜５につ
This invention has excellent wear resistance, cutting,
The present invention relates to a wear-resistant and surface-coated tool member suitable for use in the field of grinding. Conventionally, for example, hard dispersed phases are mainly made of metals of groups 4a, 5a, and 6a of the periodic table of the elements, as well as carbides, nitrides, carbonitrides, and carbonitrides of Si, produced by powder metallurgy. The surface of a cemented carbide-based tool member whose binder phase is mainly composed of iron group metals and one or two or more of iron group metals and group 5a and 6a metals. 4a, 5a, and 6a group metals, and one or more of Si and B carbides, nitrides, carbonitrides, and carbonitrides. It is well known that a surface-coated superhard alloy member formed by forming a surface coating layer made of a hard compound layer using a chemical vapor deposition method, a physical vapor deposition method, or the like is used as a cutting tool. However, although such conventional surface-coated cemented carbide members exhibit relatively excellent cutting performance when cutting steel or cast iron, they do not work well when cutting steel or cast iron.
In the case of a ceramic body or the like, the desired cutting life was not achieved due to insufficient wear resistance. Therefore, from the above-mentioned viewpoint, the present inventors conducted research to obtain a tool member suitable for use as a cutting tool particularly for cutting work materials such as FRP and ceramic fired bodies. The base tool member is made of a hard dispersed phase mainly made of metals of groups 4a, 5a, and 6a of the periodic table of elements, and one or more of carbides, nitrides, carbonitrides, and carbonitrides of Si. while the bonding phase is mainly iron group metals as well as 5a of the periodic table of elements.
and a superhard alloy composed of one or more of Group 6a metals, and the surface coating layer formed on the surface of this base tool member is a diamond layer formed by vapor phase synthesis. As an inner layer, at least one of the dimemond layers and metals of groups 4a, 5a, and 6a, and carbides, nitrides, carbonitrides, and carbonitrides of Si and B, formed by chemical vapor deposition or physical vapor deposition. A surface-coated tool member having an alternate laminated structure consisting of at least one hard compound layer composed of a single layer or a multilayer of two or more types of materials,
Due to the one or more diamond layers present in the surface coating layer, it has extremely good wear resistance, and therefore, when used as a cutting tool, it can be used not only on steel and cast iron but also on steel and cast iron. about,
It exhibits excellent cutting performance when cutting work materials such as FRP and ceramic fired bodies, and also has excellent wear resistance, making it suitable for metal hot processing, metal forming parts, dies, etc. They found that it also exhibits excellent performance when used as wear-resistant tools and grinding tools such as whetstones and lap plates. The present invention was made based on the above knowledge, and the hard dispersed phase mainly consists of metals of groups 4a, 5a, and 6a of the periodic table of elements, as well as carbides, nitrides, carbonitrides, and silicon of silicon. It is composed of one or more carbonitrides, while the binder phase is mainly composed of iron group metals and 5a of the periodic table of elements.
and a diamond layer formed by vapor phase synthesis on the surface of a tool member made of one or more of group 6a metals, and at least one layer of this diamond layer. metals of Groups 4a, 5a, and 6a, and one type of carbides, nitrides, carbonitrides, and carbonitrides of Si and B, formed by chemical vapor deposition, physical vapor deposition, etc. The surface coating layer is formed by forming a surface coating layer having an alternating laminated structure consisting of at least one hard compound layer composed of two or more types of multilayers, and is particularly suitable for use as a cutting tool, a wear-resistant tool, and a grinding tool. It has the characteristics of a surface-coated tool member suitable for. The diamond layer of the present invention may contain about 1 to 10 atomic % of impurities such as W, Ta, or Mo evaporated from the filament of a vapor phase synthesis apparatus. Next, the surface-coated tool member of the present invention will be specifically explained using examples. Example As the base tool members, cutting chips made of cemented carbide having the composition shown in Table 1 and the shape of JIS/SNP431 were prepared, and these base tool members were subjected to normal vapor phase synthesis. Using the equipment, reactor: quartz tube with inner diameter of 75 mmφ, heating temperature of W filament: 2000℃, distance between cutting tip and W filament: 1 to 2 cm, reaction gas flowed into the reactor: CH 3 / by volume ratio
Using a gas phase synthesis process under the following conditions: atmospheric pressure in the reactor maintained during the reaction with a mixed gas of H 2 = 0.005: 20 torr, reaction time: 3 to 10 hours, and a normal magnetron sputtering device, the target Materials: Same compounds as those constituting the hard compound layer in Table 1. Atmosphere inside reactor: Ar at 2×10 -2 torr. Voltage applied to target: -400V. Heating temperature of cutting tip: 500℃. Reaction time: 1 to 3 hours, alternating with chemical vapor deposition treatment under the following conditions to form at least one diamond layer with the average layer thickness shown in Table 1, respectively, and the compounds and compounds also shown in Table 1, respectively. The coated cutting chips 1 to 1 of the present invention can be prepared by forming a surface coating layer on the surface of the cutting chip, which is composed of alternate laminations of at least one layer of a hard compound consisting of a single layer or multiple layers having an average layer thickness. 10 were produced respectively. For comparison purposes, the diamond layer was not formed using the vapor phase synthesis method, and the magnetron layer was
By applying only chemical vapor deposition treatment by sputtering to the cutting chip surface to form a surface coating layer consisting of a hard compound layer and a single layer or multiple layers of average layer thickness shown in Table 1, the conventionally coated cutting chip 1 to 5 were produced respectively. Next, the coated cutting chips 1 to 10 of the present invention and the conventional coated cutting chips 1 to 5 obtained as a result are described below.
【表】
いて、
被削材：FRP、
切削速度：85ｍ／min、
送り：0.1mm／rev.、
切込み：１mm、
切削時間：3min、
の条件で連続切削試験を行ない、切刃の逃げ面摩
耗幅を測定した。この測定結果を第１表に示し
た。
第１表に示される結果から、本発明被覆切削チ
ツプ１〜10は、著しくすぐれた耐摩耗性を有する
ので、FRPの切削において、従来被覆切削チツ
プに比して、すぐれた切削性能を長期に亘つて発
揮することが明らかである。
上述のように、この発明の表面被覆工具部材
は、表面被覆層中におけるダイヤモンド層の存在
によつて、すぐれた耐摩耗性を有するので、鋼や
鋳鉄は勿論のこと、FRPやセラミツク〓焼体、
さらにAlおよびAl合金などの被削材の切削に切
削工具として用いるのに適するばかりでなく、耐
摩耗工具や研削工具などとして用いた場合にもす
ぐれた性能を著しく長期に亘つて発揮するのであ
る。[Table] A continuous cutting test was conducted under the following conditions: Work material: FRP, Cutting speed: 85 m/min, Feed: 0.1 mm/rev., Depth of cut: 1 mm, Cutting time: 3 min. The width was measured. The measurement results are shown in Table 1. From the results shown in Table 1, the coated cutting chips 1 to 10 of the present invention have extremely excellent wear resistance, and therefore have excellent cutting performance for a long period of time when cutting FRP compared to conventional coated cutting chips. It is clear that it will be effective over a long period of time. As mentioned above, the surface-coated tool member of the present invention has excellent wear resistance due to the presence of the diamond layer in the surface coating layer, so it can be used not only for steel and cast iron, but also for FRP and ceramic fired bodies. ,
Furthermore, it is not only suitable for use as a cutting tool for cutting work materials such as Al and Al alloys, but also exhibits excellent performance over a long period of time when used as a wear-resistant tool or grinding tool. .
Claims (1)
5a、および6a族の金属、並びにSiの炭化物、窒化
物、炭窒化物、および炭酸窒化物のうちの１種ま
たは２種以上で構成され、一方結合相が、主とし
て鉄族金属、並びに元素周期律表の5aおよび6a族
の金属のうちの１種または２種以上で構成された
超硬質合金基体工具部材の表面に、気相合成法に
より形成したダイヤモンド層を最内層として、こ
のダイヤモンド層の少なくとも１層と、元素周期
律表の4a、5a、および6a族の金属、並びにSiおよ
びＢの炭化物、窒化物、炭窒化物、および炭酸窒
化物のうちの１種の単層または２種以上の複層で
構成された硬質化合物層の少なくとも１層とから
なる交互積層構造を有する表面被覆層を形成して
なる耐摩耗性のすぐれた表面被覆工具部材。1 The hard dispersed phase is mainly 4a of the periodic table of elements,
5a and 6a group metals, and one or more of Si carbides, nitrides, carbonitrides, and carbonitrides, while the binder phase is mainly composed of iron group metals and elemental periodic metals. A diamond layer formed by vapor phase synthesis is formed as the innermost layer on the surface of a superhard alloy base tool member made of one or more of the metals in Groups 5a and 6a of the Table of Contents. at least one layer and a single layer or two or more of metals from groups 4a, 5a, and 6a of the Periodic Table of the Elements, and one or more of carbides, nitrides, carbonitrides, and carbonitrides of Si and B; A surface-coated tool member having excellent wear resistance, comprising a surface coating layer having an alternate laminated structure including at least one hard compound layer composed of multiple layers.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4028883A JPS59166672A (en) | 1983-03-11 | 1983-03-11 | Surface-coated tool member excellent in wear resistance |
| JP2605687A JPS62218566A (en) | 1983-03-11 | 1987-02-06 | Surface coated tool member having excellent wear resistance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4028883A JPS59166672A (en) | 1983-03-11 | 1983-03-11 | Surface-coated tool member excellent in wear resistance |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2605687A Division JPS62218566A (en) | 1983-03-11 | 1987-02-06 | Surface coated tool member having excellent wear resistance |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59166672A JPS59166672A (en) | 1984-09-20 |
| JPS6232268B2 true JPS6232268B2 (en) | 1987-07-14 |
Family
ID=12576413
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4028883A Granted JPS59166672A (en) | 1983-03-11 | 1983-03-11 | Surface-coated tool member excellent in wear resistance |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59166672A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4594294A (en) * | 1983-09-23 | 1986-06-10 | Energy Conversion Devices, Inc. | Multilayer coating including disordered, wear resistant boron carbon external coating |
| SE503038C2 (en) * | 1993-07-09 | 1996-03-11 | Sandvik Ab | Diamond-coated carbide or ceramic cutting tools |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58126972A (en) * | 1982-01-22 | 1983-07-28 | Sumitomo Electric Ind Ltd | Diamond coated sintered hard alloy tool |
-
1983
- 1983-03-11 JP JP4028883A patent/JPS59166672A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58126972A (en) * | 1982-01-22 | 1983-07-28 | Sumitomo Electric Ind Ltd | Diamond coated sintered hard alloy tool |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59166672A (en) | 1984-09-20 |
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