JPS6210300B2 - - Google Patents

Info

Publication number
JPS6210300B2
JPS6210300B2 JP58040287A JP4028783A JPS6210300B2 JP S6210300 B2 JPS6210300 B2 JP S6210300B2 JP 58040287 A JP58040287 A JP 58040287A JP 4028783 A JP4028783 A JP 4028783A JP S6210300 B2 JPS6210300 B2 JP S6210300B2
Authority
JP
Japan
Prior art keywords
cutting
layer
carbonitrides
metals
tool member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58040287A
Other languages
Japanese (ja)
Other versions
JPS59166671A (en
Inventor
Noribumi Kikuchi
Takayuki Shingyochi
Hiroaki Yamashita
Akio Nishama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP4028783A priority Critical patent/JPS59166671A/en
Publication of JPS59166671A publication Critical patent/JPS59166671A/en
Publication of JPS6210300B2 publication Critical patent/JPS6210300B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material

Description

【発明の詳細な説明】[Detailed description of the invention]

この発明は、すぐれた耐摩耗性を有し、切削、
耐摩耗、および研削の分野で使用するのに適した
表面被覆工具部材に関するものである。 従来、例えば、粉末冶金法にて製造された、硬
質分散相が主として元素周期律表の4a,5a,
および6a族の金属、並びにSiの炭化物、窒化
物、炭窒化物、および炭酸窒化物のうちの1種ま
たは2種以上で構成され、一方結合相が主として
鉄族金属、並びに同5aおよび6a族の金属のう
ちの1種または2種以上で構成された超硬質合金
基体工具部材の表面に、同4a,5a,および6
a族の金属、並びにSiおよびBの炭化物、窒化
物、炭窒化物、および炭酸窒化物のうちの1種の
単層または2種以上の複層で構成された硬質化合
物層からなる表面被覆層を化学蒸着法や物理蒸着
法などを用いて形成してなる表面被覆超硬質合金
部材が切削工具として用いられていることは良く
知られるところである。 しかし、このような従来表面被覆超硬質合金部
材においては、鋼や鋳鉄の切削では比較的すぐれ
た切削性能を示すものの、被削材が、例えば硬質
のガラス繊維を内蔵したプラスチツク(FRP)
やセラミツク〓焼体などである場合には、耐摩耗
性不足が原因して所望の切削寿命を示さないもの
であつた。 そこで、本発明者等は、上述のような観点か
ら、特にFRPやセラミツク〓焼体などの被削材
の切削に切削工具として用いるのに適した工具部
材を得べく研究を行なつた結果、 基体工具部材を、元素周期律表の5aおよび6a族
の金属、並びにHf、さらにこれらの合金で構成
し、 かつこの基体工具部材の表面に形成される表面
被覆層を、気相合成法により形成されたダイヤモ
ンド層の少なくとも1層と、化学蒸着法や物理蒸
着法などにより形成された、同4a,5a,および6a
族の金属、並びにSiおよびBの炭化物、窒化物、
炭窒化物、および炭酸窒化物のうちの1種の単層
または2種以上の複層からなる硬質化合物層の少
なくとも1層との交互積層構造とした表面被覆工
具部材は、前記表面被覆層中に存在する1層以上
のダイヤモンド層によつて、著しくすぐれた耐摩
耗性をもつようになり、したがつて、これを切削
工具として用いた場合には、鋼および鋳鉄は勿論
のこと、FRPやセラミツク〓焼体などの被削材
の切削においてすぐれた切削性能を発揮し、さら
に、このようにすぐれた耐摩耗性を有するので、
金属熱間加工および金属成形用部材やダイス類な
どの耐摩耗工具や、砥石およびラツプ板などの研
削工具として用いた場合にもすぐれた性能を発揮
するという知見を得たのである。 この発明は、上記知見にもとづいてなされたも
のであつて、元素周期律表の5aおよび6a族の金
属、並びにHf、さらにこれらの合金からなる基
体工具部材の表面に、気相合成法により形成され
たダイヤモンド層の少なくとも1層と、化学蒸着
法や物理蒸着法などにより形成された、同4a,
5a,および6a族の金属、並びにSiおよびBの炭化
物、窒化物、炭窒化物、および炭酸窒化物のうち
の1種の単層または2種以上の複層で構成された
硬質化合物層の少なくとも1層との交互積層構造
を有する表面被覆層を形成してなり、特に切削工
具、耐摩耗工具、および研削工具として用いるの
に適した表面被覆工具部材に特徴を有するもので
ある。 なお、この発明のダイヤモンド層は、気相合成
装置のフイラメントより蒸発したW,Ta,ある
いはMoなどを不純物として1〜10原子%程度含
有する場合がある。 つぎに、この発明の表面被覆工具部材を実施例
により具体的に説明する。 実施例 基体工具部材として、それぞれ第1表に示され
る組成をもち、かつJIS・SNP431の形状をもつた
切削チツプを用意し、これら基体工具部材に対し
て、通常の気相合成装置を用い、 反応炉:内径75mmφの石英管、 Wフイラメントの加熱温度:2000℃、 切削チツプとWフイラメントの間隔:1〜2
cm、 反応炉内に流される反応ガス:容量割合で
CH3/H2=0.005の混合ガス、 反応中保持される反応炉内雰囲気圧力: 20torr、 反応時間:3〜8時間、 の条件での気相合成処理、並びに、通常のマグネ
トロン・スパツタリング装置を用い、 ターゲツトの材質:それぞれ第1表における硬
質化合物層を構成する化合物と同じもの、 反応炉内雰囲気:2×10-2torrのAr、 ターゲツトへの印加電圧:−400V、 切削チツプの加熱温度:500℃、 反応時間:1〜3時間、 の条件での化学蒸着処理とを交互に行ない、それ
ぞれ第1表に示される平均層厚の少なくとも1層
のダイヤモンド層と、同じくそれぞれ第1表に示
される化合物および平均層厚の単層または複層か
らなる硬質化合物の少なくとも1層との交互積層
にて構成された表面被覆層を、前記切削チツプの
表面に形成することによつて本発明被覆切削チツ
プ1〜13をそれぞれ製造した。 また、比較の目的で、基体工具部材として、そ
れぞれ第1表に示される組成をもつた従来超硬質
合金製切削チツプを用意し、この切削チツプの表
This invention has excellent wear resistance, cutting,
The present invention relates to a wear-resistant and surface-coated tool member suitable for use in the field of grinding. Conventionally, for example, hard dispersed phases manufactured by powder metallurgy mainly contain elements 4a, 5a, and 5a of the periodic table.
and 6a group metals, and one or more of Si carbides, nitrides, carbonitrides, and carbonitrides, while the binder phase is mainly iron group metals, and Si group 5a and 6a metals. 4a, 5a, and 6 on the surface of a super hard alloy base tool member made of one or more of the metals
A surface coating layer consisting of a hard compound layer composed of a single layer or a multilayer of two or more of group a metals and carbides, nitrides, carbonitrides, and carbonitrides of Si and B. It is well known that surface-coated super hard alloy members formed using chemical vapor deposition or physical vapor deposition are used as cutting tools. However, although such conventional surface-coated cemented carbide members exhibit relatively excellent cutting performance when cutting steel or cast iron, they do not work well when cutting steel or cast iron.
In the case of a ceramic body or the like, the desired cutting life was not achieved due to insufficient wear resistance. Therefore, from the above-mentioned viewpoint, the present inventors conducted research to obtain a tool member suitable for use as a cutting tool particularly for cutting work materials such as FRP and ceramic fired bodies. The base tool member is composed of metals from groups 5a and 6a of the periodic table of elements, Hf, and alloys thereof, and the surface coating layer formed on the surface of this base tool member is formed by a vapor phase synthesis method. 4a, 5a, and 6a formed by chemical vapor deposition, physical vapor deposition, etc.
metals of the group, as well as carbides, nitrides of Si and B,
A surface-coated tool member having an alternately laminated structure with at least one hard compound layer consisting of a single layer or a multilayer of two or more of carbonitrides and carbonitrides has a surface-coated tool member in which the surface-coated tool member has The presence of one or more diamond layers makes it extremely wear resistant, so when used as a cutting tool, it can be used not only on steel and cast iron, but also on FRP and other materials. Ceramic: Demonstrates excellent cutting performance when cutting work materials such as fired bodies, and also has excellent wear resistance, so
They discovered that it also exhibits excellent performance when used as wear-resistant tools such as metal hot processing and metal forming members and dies, and as grinding tools such as whetstones and lap plates. The present invention has been made based on the above knowledge, and is based on the above-mentioned findings. At least one layer of diamond 4a formed by chemical vapor deposition or physical vapor deposition, etc.
At least a hard compound layer composed of a single layer or a multilayer of two or more of metals of Groups 5a and 6a, and carbides, nitrides, carbonitrides, and carbonitrides of Si and B. A surface coating layer having an alternate laminated structure with one layer is formed, and the surface coating tool member is particularly suitable for use as a cutting tool, a wear-resistant tool, and a grinding tool. The diamond layer of the present invention may contain about 1 to 10 atomic % of impurities such as W, Ta, or Mo evaporated from the filament of a vapor phase synthesis apparatus. Next, the surface-coated tool member of the present invention will be specifically explained using examples. Example Cutting chips each having the composition shown in Table 1 and having the shape of JIS/SNP431 were prepared as base tool members, and these base tool members were processed using a normal vapor phase synthesis apparatus. Reaction furnace: Quartz tube with inner diameter of 75mmφ, W filament heating temperature: 2000℃, Distance between cutting tip and W filament: 1~2
cm, reaction gas flowed into the reactor: in volume fraction
Gas phase synthesis treatment under the following conditions: mixed gas of CH 3 /H 2 = 0.005, atmosphere pressure maintained in the reactor during the reaction: 20 torr, reaction time: 3 to 8 hours, and ordinary magnetron sputtering equipment. Target material: The same compound as the hard compound layer in Table 1, Reaction furnace atmosphere: 2×10 -2 torr Ar, Voltage applied to target: -400V, Cutting chip heating temperature : 500°C, reaction time: 1 to 3 hours, and chemical vapor deposition treatment under the following conditions, respectively, to form at least one diamond layer with the average layer thickness shown in Table 1 and with the average layer thickness shown in Table 1. The coating of the present invention can be obtained by forming a surface coating layer on the surface of the cutting tip, which is composed of alternating layers of the compound shown above and at least one layer of a hard compound consisting of a single layer or multiple layers having an average layer thickness. Cutting chips 1 to 13 were manufactured, respectively. For the purpose of comparison, conventional cutting tips made of cemented carbide having the compositions shown in Table 1 were prepared as base tool members.

【表】 面に、気相合成法によるダイヤモンド層の形成を
行なわず、上記のマグネトロン・スパツタリング
による化学蒸着処理のみを施し、それぞれ第1表
に示される硬質化合物層および平均層厚の単層ま
たは複層からなる表面被覆層を形成することによ
つて、従来被覆切削チツプ1〜5をそれぞれ製造
した。 つぎに、この結果得られた本発明被覆切削チツ
プ1〜13および従来被覆切削チツプ1〜5につい
て、 被削材:FRP、 切削速度:100m/min、 送り:0.1mm/rev、 切込み:1mm、 切削時間:5min、 の条件で連続切削試験を行ない、切刃の逃げ面摩
耗幅を測定した。この測定結果を第1表に示し
た。 第1表に示される結果から、本発明被覆切削チ
ツプ1〜13は、著しくすぐれた耐摩耗性を有する
ので、FRPの切削において、従来被覆切削チツ
プに比して、すぐれた切削性能を長期に亘つて発
揮することが明らかである。 上述のように、この発明の表面被覆工具部材
は、表面被覆層中におけるダイヤモンド層の存在
によつて、すぐれた耐摩耗性を有するので、鋼や
鋳鉄は勿論のこと、FRPやセラミツク〓焼体、
さらにAlおよびAl合金などの硬質の被削材の切
削に切削工具として用いるのに適するばかりでな
く、耐摩耗工具や研削工具などとして用いた場合
にもすぐれた性能を著しく長期に亘つて発揮する
のである。
[Table] A diamond layer was not formed by vapor phase synthesis on the surface, but only the chemical vapor deposition treatment by magnetron sputtering described above was applied to the surface, and a hard compound layer and a single layer or an average layer thickness of the hard compound layer and average layer thickness shown in Table 1 were respectively applied. Conventionally coated cutting chips 1 to 5 were each manufactured by forming a multilayer surface coating layer. Next, regarding the coated cutting chips 1 to 13 of the present invention and the conventional coated cutting chips 1 to 5 obtained as a result, work material: FRP, cutting speed: 100 m/min, feed: 0.1 mm/rev, depth of cut: 1 mm, A continuous cutting test was conducted under the following conditions: cutting time: 5 min, and the flank wear width of the cutting edge was measured. The measurement results are shown in Table 1. From the results shown in Table 1, the coated cutting chips 1 to 13 of the present invention have extremely excellent wear resistance, and therefore have superior cutting performance over a long period of time when cutting FRP compared to conventional coated cutting chips. It is clear that it will be effective over a long period of time. As mentioned above, the surface-coated tool member of the present invention has excellent wear resistance due to the presence of the diamond layer in the surface coating layer, so it can be used not only for steel and cast iron, but also for FRP and ceramic fired bodies. ,
Furthermore, it is not only suitable for use as a cutting tool for cutting hard work materials such as Al and Al alloys, but also exhibits excellent performance over a long period of time when used as a wear-resistant tool or grinding tool. It is.

Claims (1)

【特許請求の範囲】[Claims] 1 元素周期律表の5aおよび6a族の金属、並びに
Hf、さらにこれらの合金からなる基体工具部材
の表面に、気相合成法により形成されたダイヤモ
ンド層の少なくとも1層と、元素周期律表の4a,
5a,および6a族の金属、並びにSiおよびBの炭化
物、窒化物、炭窒化物、および炭酸窒化物のうち
の1種の単層または2種以上の複層で構成された
硬質化合物の少なくとも1層との交互積層構造を
有する表面被覆層を形成してなる耐摩耗性のすぐ
れた表面被覆工具部材。
1 metals of groups 5a and 6a of the periodic table of the elements, and
Hf, and at least one diamond layer formed by vapor phase synthesis on the surface of the base tool member made of these alloys, and 4a of the periodic table of elements,
At least one hard compound composed of a single layer or a multilayer of two or more of metals of groups 5a and 6a, and carbides, nitrides, carbonitrides, and carbonitrides of Si and B. A surface-coated tool member with excellent wear resistance, which is formed by forming a surface coating layer having an alternate laminated structure with layers.
JP4028783A 1983-03-11 1983-03-11 Surface-coated tool member excellent in wear resistance Granted JPS59166671A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4028783A JPS59166671A (en) 1983-03-11 1983-03-11 Surface-coated tool member excellent in wear resistance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4028783A JPS59166671A (en) 1983-03-11 1983-03-11 Surface-coated tool member excellent in wear resistance

Publications (2)

Publication Number Publication Date
JPS59166671A JPS59166671A (en) 1984-09-20
JPS6210300B2 true JPS6210300B2 (en) 1987-03-05

Family

ID=12576388

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4028783A Granted JPS59166671A (en) 1983-03-11 1983-03-11 Surface-coated tool member excellent in wear resistance

Country Status (1)

Country Link
JP (1) JPS59166671A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE453474B (en) * 1984-06-27 1988-02-08 Santrade Ltd COMPOUND BODY COATED WITH LAYERS OF POLYCristalline DIAMANT
SE503038C2 (en) * 1993-07-09 1996-03-11 Sandvik Ab Diamond-coated carbide or ceramic cutting tools

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS566920A (en) * 1979-06-28 1981-01-24 Philips Nv Dry lubricating bearing
JPS5641372A (en) * 1979-09-10 1981-04-18 Mitsubishi Metal Corp Surface covered ultra hard alloy member for cutting tool
JPS5655506A (en) * 1979-10-06 1981-05-16 Sumitomo Electric Ind Ltd Composite sintered body for tool and its production
JPS56108876A (en) * 1980-02-04 1981-08-28 Citizen Watch Co Ltd Silver plated exterior decorative parts for watch and their manufacture
JPS57100989A (en) * 1980-12-12 1982-06-23 Sumitomo Electric Industries Coated ceramic tool

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS566920A (en) * 1979-06-28 1981-01-24 Philips Nv Dry lubricating bearing
JPS5641372A (en) * 1979-09-10 1981-04-18 Mitsubishi Metal Corp Surface covered ultra hard alloy member for cutting tool
JPS5655506A (en) * 1979-10-06 1981-05-16 Sumitomo Electric Ind Ltd Composite sintered body for tool and its production
JPS56108876A (en) * 1980-02-04 1981-08-28 Citizen Watch Co Ltd Silver plated exterior decorative parts for watch and their manufacture
JPS57100989A (en) * 1980-12-12 1982-06-23 Sumitomo Electric Industries Coated ceramic tool

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Publication number Publication date
JPS59166671A (en) 1984-09-20

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