JP2974285B2 - Manufacturing method of coated carbide tool - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cutting and wear-resistant coated super-hard alloy tool having excellent wear resistance. 2. Description of the Related Art Conventionally, a coated cemented carbide tool having a cemented carbide substrate as a substrate and a hard coating such as TiC or TiN coated on the surface with a high wear resistance has been developed. It is widely used for practical use. However, alloys coated with TiC and TiN have drawbacks such as significant crater wear on the rake face and shortened tool life. For this reason, methods for forming various coatings have been proposed as means for eliminating the above-mentioned drawbacks, but all of them have problems, and none of them has always been satisfactory. For example, a method of coating a single layer of Al ₂ O ₃ instead of TiC or TiN-Japanese Patent Application Laid-Open No. 54-158780,
TiC, a method for coating a TiB ₂ monolayers in place of TiN - JP 54-74816, etc., TiC, TiN
A method of forming a two-layered film by further coating Al ₂ O ₃ on the surface of the film (two layers)-JP-A-55-119165, T
coated with Al ₂ O ₃ on the surface of iB _2, a method of forming a two-layer structure film - like 55-8485 JP, are the shown. [0003] The method described above has disadvantages such as that the affinity between the super-hard substrate and TiB ₂ is weak, and that iron and diboride of the work material react with each other to easily cause crater wear. The method has a drawback that the affinity between the ultra-hard substrate and Al ₂ O ₃ is weak, and the bonding strength between the substrate and the film is not sufficient. 'S TiC-Al ₂ O ₃ coated article according to the method as compared to the above and have been subjected to practical use widely for having more preferred properties, Al ₂ O ₃ and TiC
Alternatively, the affinity between TiNs is weak, and the bonding strength has room for improvement. This method has insufficient adhesion strength as in the above method, but has good crater resistance because the reaction with the work material is prevented by the Al ₂ O ₃ layer. [0004] Therefore, in order to eliminate the drawbacks while maintaining the features of the single-layer coating and the two-layer coating, for example, Ti (C,
N), Ti (C, O), Ti (C, N, O),
A method of forming a three-layered film by coating Al ₂ O ₃ as an outer layer thereon (Japanese Patent Application Laid-Open No. 55-148768) has been proposed. [0005] This method is formed by changing the method of coating the inner TiC layer and the intermediate layer in order to improve the drawbacks of the above method. Is to make the most of it. Further, the life of the cutting tool is further extended (the wear resistance is improved). SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, improves the above-mentioned drawbacks of the prior art, and provides a coated cemented carbide that is excellent in wear resistance, focusing on the grain size of each layer of the coating-especially the inner layer and the intermediate layer. It is intended for that purpose. According to the present invention, at least a TiCN layer is provided on the surface of a super-hard alloy substrate, and the TiCN layer is formed by a chemical vapor deposition method using an organic CN compound. This is a production method comprising a film and a columnar crystal. More specifically, as the inner layer, first, TiN
And a second layer of TiCN is formed in a columnar shape, and an intermediate layer, that is, a third layer is provided with one or more of Ti carbides, nitrides, and carbonitrides. 4
One or two or more Al ₂ O ₃ layers or TiN layers are provided as layers, and the particles of the third layer are likely to be coarsened by the influence of the second layer. , The thickness of the second layer is increased, and the abrasion resistance of the outer layer is provided. [0007] The super-hard alloy as a substrate in the present invention includes carbides, nitrides of groups 4a, 5a and 6a of the periodic table.
One or more of carbonitrides, Fe, Ni, Co, W,
A super-hard alloy consisting of one or more of Mo and Cr is applied. The formation of each coating layer in the present invention is possible by applying a known film forming method. For example, for the TiCN or TiN film constituting the inner layer, TiCl ₄ + (CH ₃ ) CN + 2H ₂ → TiCN + HCl TiCl ₄ + 2H ₂ → Ti + 4HCH ₄ → CH ₄ → C + 2H ₂ Ti + C → TiC or TiCl ₄ + 2H ₂ → Ti + 4HCl Ti + 1 / 2N ₂ → TiN Vaporization of Ti halide and reduction and carbonization or nitriding to obtain it Can be. Next, the thickness of the inner layer is 2.0 to 10 μm, the thickness of the intermediate layer is 0.1 to 5 μm, and the thickness of the outer layer is 0.5 to 1 μm.
Desirably, it is 0 μm. The reason is as follows. (1) If the thickness of the inner layer made of any one of TiN and TiCN is less than 2.0 μm, columnar crystals are not sufficiently generated, and if it exceeds 10 μm, the layer such as TiCN is essentially brittle and defective. The inner layer has a thickness of 2.
Desirably, the thickness is 0 to 10 μm. (2) The thickness of the intermediate layer composed of at least one of Ti carbide, nitride and carbonitride is 0.1
If it is less than μm, it is insufficient to adjust the particle size.
If it exceeds μm, the entire thickness becomes thick and brittle, so that it is easily broken. Therefore, the thickness of the intermediate layer is 0.1 to 5 μm.
m is desirable. In addition, the structure of this layer is desirably two or more layers because the characteristics can be more effectively exhibited by combining Ti carbide, nitride, and carbonitride. (3) The outer Al ₂ O ₃ layer and / or TiN layer is 0.5
If the thickness is less than μm, the reaction with the work material, which is a defect of the intermediate layer, cannot be prevented. If the thickness exceeds 5 μm, the Al ₂ O ₃ layer is inherently brittle and easily breaks. Is good. Next, the coated super-hard alloy according to the present invention will be specifically described with reference to examples. However, it goes without saying that the present invention is not limited to the scope of these examples.
WC 72%, 8% TiC, (Ta
Nb) Powder was blended to a composition of 11% C and 9% Co (% by weight), and sintered at 1400 ° C. for 1 hour in a vacuum, and a G-class throw-away chip was prepared from the obtained sintered body. Next, coating was performed under each of the film forming conditions described below to obtain the results shown in Table 1.
Samples 1 to 3 having the film structures shown in Table 1 were obtained. The film thickness was measured by polishing the chip and observing the structure with an SEM (scanning electron microscope). (1) The sample No. 1 was formed by heating the throw-away tip to 800 ° C. in a heat-resistant alloy reaction vessel.
At reduced pressure of 0 Torr, 4% TiCl ₄ 4% N ₂
A gas mixed at a rate of 96% of H ₂ was flowed at a flow rate of 5 l / min, reacted for 0.3 hours to coat a 0.5 μm TiN layer, and then Ti (CH ₃ ) CN 4% N ₂ 4% _Two
A gas mixed at a rate of 92% was sent at a flow rate of 5 l / min and reacted for 2 hours to coat a 4 μm TiCN layer to form an inner layer of 4.5 μm. Thereafter, the chamber is evacuated to 10 Torr, the temperature is raised to 1020 ° C., and TiCl ₄ 4% CH ₄ 4%
A gas mixed at a rate of 92% of H ₂ was flowed for 20 minutes to form a 2 μm TiC film, which was used as an intermediate layer. Then, AlCl ₃ 5% CO ₂ 5%, CO 15% H
₂ A gas mixture of 75% was supplied, and the temperature was 10
The temperature was maintained at 20 ° C. for 2 hours, and a 1.5 μm Al ₂ O ₃ layer was coated. Finally, a 0.5 μm TiN film was formed by the same method as described above, and the surface was colored gold. FIG. 1 shows the result of observing the fracture surface of this chip by a SEM (scanning electron microscope) after breaking it in a bending test. It can be seen that the columnar crystals are well developed in the inner layer portion, whereas the intermediate layer is formed into a granular film, and the outer layer / outermost layer is similar to the particle size of the intermediate layer and is not coarse-grained. . Also,
FIG. 2 also shows the results of surface observation of the outermost layer. (The magnification of each photograph is 5000 times.) (2) The film of Sample No. 2 was heated to 800 ° C. in a reaction vessel made of a heat-resistant alloy, and T was depressurized at 20 Torr.
A gas mixed at a rate of iCl ₄ 4% N ₂ 4% H ₂ 96% was flowed at a flow rate of 5 l / min, and reacted for 0.5 hour to obtain a 1.0 μm TiN coating layer. Then, sample N
Coating was carried out in the same manner as in o1. (3) The film of Sample No. 3 is heated to 1050 ° C. in a heat-resistant alloy reaction vessel, which is one of the conventional examples.
At reduced pressure of 20 Torr, TiCl ₄ 4% CH ₄ 2%
A gas mixture of 30% N _{2 and} 64% H ₂
The mixture was allowed to react at a flow rate of 1 / min for 2.5 hours to obtain a TiCN coating layer of 5 μm. Then, it coated by the same method as the sample No1. Using these three types of inserts, the following cutting conditions, ie, a continuous casting work material FC25 (HB230), a cutting speed of 180 m / min, a feed of 0.3 mm / rev, a cutting depth of 1.5 mm, and a cutting test were performed using a water-soluble cutting oil. went. Table 1 shows that the average flank wear was 0.4
and the time when the crater wear reached either 0.1 mm was determined as the life, and the time is indicated. [Table 1] While the throw-away insert of sample No. (3) has reached the end of its life after cutting for 25 minutes, (1) and (2) according to the present invention have a life of 40 to 40 as can be seen from Table 1.
It can be seen that cutting can be performed for 50 minutes. In addition, the life of each of the tips according to the present invention was due to wear of the average flank, and the crater wear did not break even after cutting until the life, and showed a good form of wear. Further, a throw-away chip made of the same substrate as that used in the above-described embodiment was prepared by changing the thickness of the TiC, TiN or TiCN layer and the thickness of Al ₂ O ₃ variously. The conditions for film formation were the same as in Example 1,
The film thickness was controlled by adjusting the time. Table 2 shows the structure, thickness, and the like of the film obtained. The same table also shows the results of cutting tests performed using these materials in the same manner as in Example 1. [Table 2] As is clear from Table 2, the coated cemented carbides according to the present invention all have excellent crater wear resistance and long life. As described above, the coated super-hard alloy of the present invention covers the inner layer between TiN, TiCN, the outer layer Al ₂ O _3, etc. and the granular Ti carbide having good affinity with both. By doing so, a high-performance coated cemented carbide tool having a different grain size between layers and having particularly high wear resistance can be obtained.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 shows the results of observing the cross-sectional fracture surface of the metal structure of the coated carbide tool of the present invention with a scanning electron microscope (SEM). FIG. 2 shows the result of observing the outermost surface of a metal structure of the same sample as in FIG. 1 by using a scanning electron microscope (SEM). FIG. 3 is an enlarged view of a main part of FIG. 1; FIG. 4 is an enlarged view of a main part of FIG. 1;

Claims (1)

(57) [Claims] Carbides of groups 4a, 5a and 6a of the periodic table as the hard phase,
One or more of nitrides and carbonitrides, Fe group as a bonding metal,
A super-hard alloy comprising at least one Cr group is used as a base, at least a TiCN layer is provided on the base, and the TiCN layer is formed by a chemical vapor deposition method using an organic CN compound, and is made of columnar crystals. Characterized method of manufacturing coated carbide tools.