JPS6354221B2 - - Google Patents

Info

Publication number
JPS6354221B2
JPS6354221B2 JP58087777A JP8777783A JPS6354221B2 JP S6354221 B2 JPS6354221 B2 JP S6354221B2 JP 58087777 A JP58087777 A JP 58087777A JP 8777783 A JP8777783 A JP 8777783A JP S6354221 B2 JPS6354221 B2 JP S6354221B2
Authority
JP
Japan
Prior art keywords
layer
ceramic
integrated circuit
substrate
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58087777A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5928362A (ja
Inventor
Ansonii Keanzu Jeemuzu
Furanshisu Jiiguraa Jeemuzu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Atomic Energy Authority
International Business Machines Corp
Original Assignee
UK Atomic Energy Authority
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Atomic Energy Authority, International Business Machines Corp filed Critical UK Atomic Energy Authority
Publication of JPS5928362A publication Critical patent/JPS5928362A/ja
Publication of JPS6354221B2 publication Critical patent/JPS6354221B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W42/00Arrangements for protection of devices
    • H10W42/20Arrangements for protection of devices protecting against electromagnetic or particle radiation, e.g. light, X-rays, gamma-rays or electrons
    • H10W42/25Arrangements for protection of devices protecting against electromagnetic or particle radiation, e.g. light, X-rays, gamma-rays or electrons against alpha rays, e.g. for outer space applications
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60Insulating or insulated package substrates; Interposers; Redistribution layers
    • H10W70/67Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
    • H10W70/69Insulating materials thereof
    • H10W70/692Ceramics or glasses
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0306Inorganic insulating substrates, e.g. ceramic, glass
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/072Connecting or disconnecting of bump connectors
    • H10W72/07251Connecting or disconnecting of bump connectors characterised by changes in properties of the bump connectors during connecting
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/20Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps

Landscapes

  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Wire Bonding (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Compositions Of Oxide Ceramics (AREA)
JP58087777A 1982-07-22 1983-05-20 集積回路チップ支持基板のセラミック表面のきめを制御する方法 Granted JPS5928362A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/400,813 US4528212A (en) 1982-07-22 1982-07-22 Coated ceramic substrates for mounting integrated circuits
US400813 1982-07-22

Publications (2)

Publication Number Publication Date
JPS5928362A JPS5928362A (ja) 1984-02-15
JPS6354221B2 true JPS6354221B2 (enExample) 1988-10-27

Family

ID=23585136

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58087777A Granted JPS5928362A (ja) 1982-07-22 1983-05-20 集積回路チップ支持基板のセラミック表面のきめを制御する方法

Country Status (4)

Country Link
US (1) US4528212A (enExample)
EP (1) EP0099570B1 (enExample)
JP (1) JPS5928362A (enExample)
DE (1) DE3379522D1 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60204637A (ja) * 1984-03-19 1985-10-16 Nippon Electric Glass Co Ltd 低融点封着用組成物
JPS6148123A (ja) * 1984-08-15 1986-03-08 Sumitomo Special Metals Co Ltd 記録デイスク用基板の製造方法
US5165983A (en) * 1984-09-30 1992-11-24 Kabushiki Kaisha Toshiba Method for production of aluminum nitride ceramic plate
EP0196865B1 (en) * 1985-03-27 1990-09-12 Ibiden Co, Ltd. Electronic circuit substrates
FR2584863B1 (fr) * 1985-07-12 1988-10-21 Inf Milit Spatiale Aeronaut Composant electronique durci vis-a-vis des radiations
JPS62120629A (ja) * 1985-11-20 1987-06-01 Sumitomo Special Metals Co Ltd 磁気ディスク及びその製造方法
US5165981A (en) * 1987-03-20 1992-11-24 Sumitomo Electric Industries, Ltd. Ceramic substrate and preparation of the same
US4832870A (en) * 1988-06-20 1989-05-23 The United States Department Of Energy Electrically conductive composite material
US4995947A (en) * 1988-06-29 1991-02-26 The United States Of America As Represented By The Department Of Energy Process for forming a metal compound coating on a substrate
FR2640428B1 (fr) * 1988-12-09 1992-10-30 Thomson Csf Procede de durcissement vis-a-vis des rayonnements ionisants de composants electroniques actifs, et composants durcis de grandes dimensions
US5316854A (en) * 1991-12-06 1994-05-31 Ppg Industries, Inc. Glass or quartz articles having high temperature UV absorbing coatings containing ceria
US5626943A (en) * 1994-06-02 1997-05-06 The Carborundum Company Ultra-smooth ceramic substrates and magnetic data storage media prepared therefrom
US5480695A (en) * 1994-08-10 1996-01-02 Tenhover; Michael A. Ceramic substrates and magnetic data storage components prepared therefrom
US6699450B2 (en) 1999-01-08 2004-03-02 Redunndant Materials, Inc. Carbide material by electromagnetic processing
US6545330B1 (en) 2000-07-12 2003-04-08 International Business Machines Corporation On chip alpha-particle detector
JP2013028679A (ja) * 2011-07-27 2013-02-07 Nitto Denko Corp 半導体装置製造用の接着シート、ダイシングフィルム一体型半導体装置製造用の接着シート、及び、当該半導体装置製造用の接着シートを有する半導体装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2857147C2 (de) * 1977-11-01 1987-03-26 United Kingdom Atomic Energy Authority, London Verfahren zur Beschichtung eines Substrats mit einem feuerfesten Material
US4230773A (en) * 1978-12-04 1980-10-28 International Business Machines Corporation Decreasing the porosity and surface roughness of ceramic substrates
JPS5598846A (en) * 1979-01-22 1980-07-28 Nippon Telegr & Teleph Corp <Ntt> Semiconductor device
JPS55163850A (en) * 1979-06-08 1980-12-20 Fujitsu Ltd Semiconductor device

Also Published As

Publication number Publication date
DE3379522D1 (en) 1989-05-03
EP0099570B1 (en) 1989-03-29
JPS5928362A (ja) 1984-02-15
EP0099570A3 (en) 1986-01-22
EP0099570A2 (en) 1984-02-01
US4528212A (en) 1985-07-09

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