JPS6354211B2 - - Google Patents
Info
- Publication number
- JPS6354211B2 JPS6354211B2 JP9052983A JP9052983A JPS6354211B2 JP S6354211 B2 JPS6354211 B2 JP S6354211B2 JP 9052983 A JP9052983 A JP 9052983A JP 9052983 A JP9052983 A JP 9052983A JP S6354211 B2 JPS6354211 B2 JP S6354211B2
- Authority
- JP
- Japan
- Prior art keywords
- cap
- arm
- exhaust
- exhaust duct
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000009792 diffusion process Methods 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000010453 quartz Substances 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 238000004140 cleaning Methods 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
Landscapes
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9052983A JPS59215722A (ja) | 1983-05-23 | 1983-05-23 | 半導体製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9052983A JPS59215722A (ja) | 1983-05-23 | 1983-05-23 | 半導体製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59215722A JPS59215722A (ja) | 1984-12-05 |
| JPS6354211B2 true JPS6354211B2 (enrdf_load_html_response) | 1988-10-27 |
Family
ID=14000940
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9052983A Granted JPS59215722A (ja) | 1983-05-23 | 1983-05-23 | 半導体製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59215722A (enrdf_load_html_response) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH071790Y2 (ja) * | 1987-06-17 | 1995-01-18 | 国際電気株式会社 | 拡散装置用自動キャップ |
| JPH01170017A (ja) * | 1987-12-25 | 1989-07-05 | Toshiba Corp | 半導体処理装置 |
-
1983
- 1983-05-23 JP JP9052983A patent/JPS59215722A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59215722A (ja) | 1984-12-05 |
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