JPS6352696B2 - - Google Patents

Info

Publication number
JPS6352696B2
JPS6352696B2 JP55156576A JP15657680A JPS6352696B2 JP S6352696 B2 JPS6352696 B2 JP S6352696B2 JP 55156576 A JP55156576 A JP 55156576A JP 15657680 A JP15657680 A JP 15657680A JP S6352696 B2 JPS6352696 B2 JP S6352696B2
Authority
JP
Japan
Prior art keywords
strip
optical system
irradiation section
photoelectric
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55156576A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5780546A (en
Inventor
Shoichi Tanimoto
Kazunori Imamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP15657680A priority Critical patent/JPS5780546A/ja
Publication of JPS5780546A publication Critical patent/JPS5780546A/ja
Publication of JPS6352696B2 publication Critical patent/JPS6352696B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N21/8903—Optical details; Scanning details using a multiple detector array

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP15657680A 1980-11-07 1980-11-07 Detecting device for foreign substance Granted JPS5780546A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15657680A JPS5780546A (en) 1980-11-07 1980-11-07 Detecting device for foreign substance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15657680A JPS5780546A (en) 1980-11-07 1980-11-07 Detecting device for foreign substance

Publications (2)

Publication Number Publication Date
JPS5780546A JPS5780546A (en) 1982-05-20
JPS6352696B2 true JPS6352696B2 (ko) 1988-10-19

Family

ID=15630775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15657680A Granted JPS5780546A (en) 1980-11-07 1980-11-07 Detecting device for foreign substance

Country Status (1)

Country Link
JP (1) JPS5780546A (ko)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57128834A (en) * 1981-02-04 1982-08-10 Nippon Kogaku Kk <Nikon> Inspecting apparatus of foreign substance
JPS59152626A (ja) * 1983-02-21 1984-08-31 Hitachi Ltd 異物検出装置
JPS5982727A (ja) * 1982-11-04 1984-05-12 Hitachi Ltd 異物検出方法及びその装置
JPS59152625A (ja) * 1983-02-21 1984-08-31 Hitachi Ltd 異物検出装置
JPS6046558A (ja) * 1983-08-25 1985-03-13 Hitachi Ltd 縮小投影露光装置
JPH0731129B2 (ja) * 1984-10-29 1995-04-10 株式会社日立製作所 半導体ウエハ異物検出装置
JPS61117433A (ja) * 1984-11-14 1986-06-04 Hitachi Ltd 半導体ウェハ異物検出方法及びその装置
JPS61104242A (ja) * 1984-10-29 1986-05-22 Hitachi Ltd 半導体ウェハ異物検査装置
JPS62180758U (ko) * 1986-05-08 1987-11-17
US4772126A (en) * 1986-10-23 1988-09-20 Inspex Incorporated Particle detection method and apparatus
JPS63154948A (ja) * 1986-12-18 1988-06-28 Fujitsu Ltd 塵埃検出方法
JPH0769272B2 (ja) * 1987-05-18 1995-07-26 株式会社ニコン 異物検査装置
JPH0711492B2 (ja) * 1990-07-27 1995-02-08 株式会社日立製作所 異物検査装置
US5410400A (en) * 1991-06-26 1995-04-25 Hitachi, Ltd. Foreign particle inspection apparatus
JP4700554B2 (ja) * 2005-06-30 2011-06-15 パナソニック電工Ｓｕｎｘ株式会社 異物検出装置
JP4700574B2 (ja) * 2006-07-31 2011-06-15 パナソニック電工Ｓｕｎｘ株式会社 異物検出装置
JP4648880B2 (ja) * 2006-07-31 2011-03-09 パナソニック電工Ｓｕｎｘ株式会社 異物検出装置
JP6920009B2 (ja) * 2018-02-27 2021-08-18 株式会社日立ハイテク 欠陥検出装置、欠陥検出方法および欠陥観察装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS498292A (ko) * 1972-05-10 1974-01-24
JPS54101390A (en) * 1978-01-27 1979-08-09 Hitachi Ltd Foreign matter inspector
JPS5594145A (en) * 1979-01-12 1980-07-17 Hitachi Ltd Method of and device for inspecting surface of article
JPS55107942A (en) * 1979-02-13 1980-08-19 Matsushita Electric Works Ltd Inspecting method of plate

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS498292A (ko) * 1972-05-10 1974-01-24
JPS54101390A (en) * 1978-01-27 1979-08-09 Hitachi Ltd Foreign matter inspector
JPS5594145A (en) * 1979-01-12 1980-07-17 Hitachi Ltd Method of and device for inspecting surface of article
JPS55107942A (en) * 1979-02-13 1980-08-19 Matsushita Electric Works Ltd Inspecting method of plate

Also Published As

Publication number Publication date
JPS5780546A (en) 1982-05-20

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