JPS6351356B2 - - Google Patents

Info

Publication number
JPS6351356B2
JPS6351356B2 JP55144598A JP14459880A JPS6351356B2 JP S6351356 B2 JPS6351356 B2 JP S6351356B2 JP 55144598 A JP55144598 A JP 55144598A JP 14459880 A JP14459880 A JP 14459880A JP S6351356 B2 JPS6351356 B2 JP S6351356B2
Authority
JP
Japan
Prior art keywords
heating resistor
ceramic
molybdenum
resistance value
silicon nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55144598A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5767297A (en
Inventor
Naryoshi Yamamoto
Nobukazu Sagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP55144598A priority Critical patent/JPS5767297A/ja
Publication of JPS5767297A publication Critical patent/JPS5767297A/ja
Publication of JPS6351356B2 publication Critical patent/JPS6351356B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
  • Ceramic Products (AREA)
JP55144598A 1980-10-15 1980-10-15 Ceramic heater Granted JPS5767297A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55144598A JPS5767297A (en) 1980-10-15 1980-10-15 Ceramic heater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55144598A JPS5767297A (en) 1980-10-15 1980-10-15 Ceramic heater

Publications (2)

Publication Number Publication Date
JPS5767297A JPS5767297A (en) 1982-04-23
JPS6351356B2 true JPS6351356B2 (enrdf_load_stackoverflow) 1988-10-13

Family

ID=15365767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55144598A Granted JPS5767297A (en) 1980-10-15 1980-10-15 Ceramic heater

Country Status (1)

Country Link
JP (1) JPS5767297A (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59165395A (ja) * 1983-03-09 1984-09-18 いすゞ自動車株式会社 発熱体
JPS62132754A (ja) * 1985-12-06 1987-06-16 株式会社アイジー技術研究所 セラミツク成形体
JP2534847B2 (ja) * 1986-07-31 1996-09-18 京セラ株式会社 セラミツクヒ−タ
JP2538973B2 (ja) * 1988-03-24 1996-10-02 日本碍子株式会社 セラミックヒ―タの製造方法
JP2754814B2 (ja) * 1989-12-12 1998-05-20 松下電器産業株式会社 ヒータ素子
EP0899986B1 (en) * 1996-05-05 2004-11-24 Tateho Chemical Industries Co., Ltd. Electric heating element and electrostatic chuck using the same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3914500A (en) * 1973-09-04 1975-10-21 United Aircraft Corp Tungsten wire reinforced silicon nitride articles and method for making the same
JPS523649A (en) * 1975-06-25 1977-01-12 Mitsubishi Chem Ind Ltd Improved method for sealing
JPS55126989A (en) * 1979-03-24 1980-10-01 Kyoto Ceramic Ceramic heater

Also Published As

Publication number Publication date
JPS5767297A (en) 1982-04-23

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