JPS6350659B2 - - Google Patents
Info
- Publication number
- JPS6350659B2 JPS6350659B2 JP58062393A JP6239383A JPS6350659B2 JP S6350659 B2 JPS6350659 B2 JP S6350659B2 JP 58062393 A JP58062393 A JP 58062393A JP 6239383 A JP6239383 A JP 6239383A JP S6350659 B2 JPS6350659 B2 JP S6350659B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- substrate
- humidity sensor
- absolute humidity
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 35
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 27
- 229910052710 silicon Inorganic materials 0.000 claims description 26
- 239000010703 silicon Substances 0.000 claims description 26
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 239000010409 thin film Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 7
- 229910052681 coesite Inorganic materials 0.000 claims description 5
- 229910052906 cristobalite Inorganic materials 0.000 claims description 5
- 239000000377 silicon dioxide Substances 0.000 claims description 5
- 235000012239 silicon dioxide Nutrition 0.000 claims description 5
- 229910052682 stishovite Inorganic materials 0.000 claims description 5
- 229910052905 tridymite Inorganic materials 0.000 claims description 5
- 239000004020 conductor Substances 0.000 claims description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 3
- 230000001419 dependent effect Effects 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000010931 gold Substances 0.000 description 26
- 229910052737 gold Inorganic materials 0.000 description 25
- 229910052782 aluminium Inorganic materials 0.000 description 24
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 24
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 24
- 238000004519 manufacturing process Methods 0.000 description 18
- 238000000034 method Methods 0.000 description 14
- 238000005259 measurement Methods 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 6
- 239000010408 film Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000013461 design Methods 0.000 description 5
- 238000010276 construction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000007743 anodising Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910018487 Ni—Cr Inorganic materials 0.000 description 2
- 238000002048 anodisation reaction Methods 0.000 description 2
- RZVXOCDCIIFGGH-UHFFFAOYSA-N chromium gold Chemical compound [Cr].[Au] RZVXOCDCIIFGGH-UHFFFAOYSA-N 0.000 description 2
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 2
- 238000005253 cladding Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000004611 spectroscopical analysis Methods 0.000 description 2
- 150000001450 anions Chemical class 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000000892 gravimetry Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229910021426 porous silicon Inorganic materials 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000026041 response to humidity Effects 0.000 description 1
- 238000003746 solid phase reaction Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K13/00—Thermometers specially adapted for specific purposes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Health & Medical Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Electrochemistry (AREA)
- Manufacturing & Machinery (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Non-Adjustable Resistors (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/764,394 US4143177A (en) | 1977-01-31 | 1977-01-31 | Absolute humidity sensors and methods of manufacturing humidity sensors |
| US764394 | 1985-08-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60259943A JPS60259943A (ja) | 1985-12-23 |
| JPS6350659B2 true JPS6350659B2 (US20110232667A1-20110929-C00004.png) | 1988-10-11 |
Family
ID=25070605
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14577877A Pending JPS5396891A (en) | 1977-01-31 | 1977-12-06 | Absolute humidity sensor and its manufacture |
| JP58062393A Granted JPS60259943A (ja) | 1977-01-31 | 1983-04-11 | 湿度センサ |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14577877A Pending JPS5396891A (en) | 1977-01-31 | 1977-12-06 | Absolute humidity sensor and its manufacture |
Country Status (7)
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008256516A (ja) * | 2007-04-04 | 2008-10-23 | Asmo Co Ltd | 水滴検出装置及び水滴制御装置 |
| JP2013096708A (ja) * | 2011-10-28 | 2013-05-20 | Hitachi Automotive Systems Ltd | 湿度検出装置 |
Families Citing this family (44)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4203087A (en) * | 1977-01-31 | 1980-05-13 | Panametrics, Inc. | Absolute humidity sensors and methods of manufacturing humidity sensors |
| US4347550A (en) * | 1977-12-22 | 1982-08-31 | Peter Rockliff | Sensor detector element for an electrical hygrometer |
| US4272986A (en) * | 1979-04-16 | 1981-06-16 | Harris Corporation | Method and means for measuring moisture content of hermetic semiconductor devices |
| US4288775A (en) * | 1979-11-09 | 1981-09-08 | Bennewitz Paul F | Device and method of manufacturing a relative humidity sensor and temperature sensor |
| GB2064126A (en) * | 1979-11-22 | 1981-06-10 | Philips Electronic Associated | Method of making humidity sensors |
| DE2947050C2 (de) * | 1979-11-22 | 1992-11-26 | Karoly Dr. 4600 Dortmund Dobos | Anordnung zum Nachweis von Ionen, Atomen und Molekülen in Gasen oder Lösungen |
| DE3024297C2 (de) * | 1980-06-27 | 1985-08-14 | Endress U. Hauser Gmbh U. Co, 7867 Maulburg | Kapazitiver Feuchtigkeitsfühler und Verfahren zum Herstellen seiner feuchtigkeitsempfindlichen Schicht |
| US4379406A (en) * | 1980-09-25 | 1983-04-12 | Bennewitz Paul F | Relative humidity detector systems and method of increasing the calibration period of relative humidity detector systems |
| US4337658A (en) * | 1980-10-14 | 1982-07-06 | Honeywell Inc. | Humidity sensor |
| US4356150A (en) * | 1981-05-15 | 1982-10-26 | Honeywell Inc. | Humidity sensor with electrical rejection of contaminants |
| JPS58169052A (ja) * | 1982-03-31 | 1983-10-05 | Toshiba Corp | 感ガス素子 |
| DE3313150C1 (de) * | 1983-04-12 | 1984-10-04 | Endress U. Hauser Gmbh U. Co, 7867 Maulburg | Duennschicht-Feuchtsensor zur Messung der absoluten Feuchte und Verfahren zu seiner Herstellung |
| JPS59167879U (ja) * | 1983-04-26 | 1984-11-10 | 中部工機株式会社 | 溝蓋 |
| DE3440351A1 (de) * | 1983-12-12 | 1985-06-20 | Voest-Alpine Ag, Linz | Feuchtigkeitssensor und verfahren zu dessen herstellung |
| JPS60140609A (ja) * | 1983-12-27 | 1985-07-25 | シャープ株式会社 | 透湿性導電膜の製造方法 |
| JPS60239657A (ja) * | 1984-05-15 | 1985-11-28 | Sharp Corp | 感湿素子及びその製造方法 |
| US4662220A (en) * | 1985-06-20 | 1987-05-05 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Water-absorbing capacitor system for measuring relative humidity |
| JPH0810202B2 (ja) * | 1986-08-06 | 1996-01-31 | 朝安 中野 | ガス検知方法 |
| JPH0810203B2 (ja) * | 1987-03-27 | 1996-01-31 | 朝安 中野 | ガス検知方法 |
| US4793181A (en) * | 1987-06-02 | 1988-12-27 | Djorup Robert Sonny | Constant temperature sorption hygrometer |
| US4793182A (en) * | 1987-06-02 | 1988-12-27 | Djorup Robert Sonny | Constant temperature hygrometer |
| US4858063A (en) * | 1987-12-31 | 1989-08-15 | California Institute Of Technology | Spiral configuration of electrodes and dielectric material for sensing an environmental property |
| KR940002635B1 (ko) * | 1988-06-27 | 1994-03-26 | 세이꼬 엡슨 가부시끼가이샤 | 습도 센서 |
| JPH02150754A (ja) * | 1988-11-30 | 1990-06-11 | Toshiba Corp | 感応素子の製造方法 |
| US5597738A (en) * | 1993-12-03 | 1997-01-28 | Kulite Semiconductor Products, Inc. | Method for forming isolated CMOS structures on SOI structures |
| JP3067010B2 (ja) * | 1994-02-09 | 2000-07-17 | ティーディーケイ株式会社 | 絶対湿度センサ |
| CN1037041C (zh) * | 1994-07-16 | 1998-01-14 | 东南大学 | 金属－氧化物－半导体结构电容式湿敏器件及其制造方法 |
| US5792938A (en) * | 1996-12-13 | 1998-08-11 | Panametrics, Inc. | Humidity sensor with differential thermal detection and method of sensing |
| US5844125A (en) * | 1997-10-01 | 1998-12-01 | Millipore Corporation | Method and apparatus for measuring moisture content in a gas |
| US6895803B2 (en) | 2000-10-20 | 2005-05-24 | Fisher & Paykel Healthcare Limited | Humidity sensor |
| DE10149333B4 (de) * | 2001-10-06 | 2007-06-28 | Robert Bosch Gmbh | Sensorvorrichtung zur Messung der Feuchtigkeit von Gasen |
| DE10164911B4 (de) * | 2001-10-06 | 2007-07-05 | Robert Bosch Gmbh | Sensorvorrichtung zur Messung einer Komponente eines Gasgemisches |
| JP3847162B2 (ja) * | 2001-12-21 | 2006-11-15 | 本田技研工業株式会社 | 湿度センサの温度制御装置 |
| US20050247106A1 (en) * | 2004-05-06 | 2005-11-10 | Honeywell International, Inc. | Relative humidity sensor enclosed with ceramic heater |
| US7021124B2 (en) * | 2004-08-27 | 2006-04-04 | International Business Machines Corporation | Method and apparatus for detecting leaks in a fluid cooling system |
| JP5112639B2 (ja) * | 2006-03-06 | 2013-01-09 | トウプラスエンジニアリング株式会社 | 湿度センサ |
| DE102009000315A1 (de) * | 2009-01-20 | 2010-08-19 | Robert Bosch Gmbh | Flüssigkeitssensor |
| US8739623B2 (en) | 2012-03-09 | 2014-06-03 | The University Of Kentucky Research Foundation | Moisture sensors on conductive substrates |
| CN102865938B (zh) * | 2012-09-07 | 2014-02-19 | 清华大学 | 热电偶及其形成方法 |
| US9285334B2 (en) | 2013-06-06 | 2016-03-15 | Zhi David Chen | Hybrid dielectric moisture sensors |
| GB2519110B (en) * | 2013-10-09 | 2018-04-18 | Nokia Technologies Oy | An apparatus and associated methods for analyte detection |
| TWM569412U (zh) * | 2018-08-07 | 2018-11-01 | 捷騰光電股份有限公司 | 溫濕度感測模組之烘乾裝置 |
| JP2021092453A (ja) * | 2019-12-11 | 2021-06-17 | ミネベアミツミ株式会社 | 湿度センサ |
| KR102438554B1 (ko) * | 2020-03-26 | 2022-08-31 | (주)씨엠테크 | 멸균장치 및 상기 멸균장치의 과산화수소 농도 측정방법 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3121853A (en) * | 1958-08-29 | 1964-02-18 | Torry Res Station | Hygrometric elements |
| US3574681A (en) * | 1966-03-31 | 1971-04-13 | Texas Instruments Inc | Aluminum oxide humidity sensor |
| US3523244A (en) * | 1967-11-01 | 1970-08-04 | Panametrics | Device for measurement of absolute humidity |
| US3477055A (en) * | 1967-12-22 | 1969-11-04 | Gen Motors Corp | Thermistor construction |
| US3681134A (en) * | 1968-05-31 | 1972-08-01 | Westinghouse Electric Corp | Microelectronic conductor configurations and methods of making the same |
| US3622385A (en) * | 1968-07-19 | 1971-11-23 | Hughes Aircraft Co | Method of providing flip-chip devices with solderable connections |
| US3751292A (en) * | 1971-08-20 | 1973-08-07 | Motorola Inc | Multilayer metallization system |
| FR2160095A5 (US20110232667A1-20110929-C00004.png) * | 1971-11-10 | 1973-06-22 | Omron Tateisi Electronics Co | |
| DE2416179A1 (de) * | 1974-04-03 | 1975-10-16 | Bayer Ag | Feuchte-messfuehler |
| US3987676A (en) * | 1975-11-28 | 1976-10-26 | Bennewitz Paul F | Relative humidity detector |
-
1977
- 1977-01-31 US US05/764,394 patent/US4143177A/en not_active Expired - Lifetime
- 1977-09-20 CA CA287,109A patent/CA1101068A/en not_active Expired
- 1977-09-23 DE DE19772742902 patent/DE2742902A1/de active Granted
- 1977-09-23 DE DE2759989A patent/DE2759989C2/de not_active Expired
- 1977-10-25 IT IT69385/77A patent/IT1091288B/it active
- 1977-11-02 FR FR7732931A patent/FR2379069A1/fr active Granted
- 1977-12-02 GB GB16159/80A patent/GB1593894A/en not_active Expired
- 1977-12-02 GB GB50253/77A patent/GB1593893A/en not_active Expired
- 1977-12-06 JP JP14577877A patent/JPS5396891A/ja active Pending
-
1983
- 1983-04-11 JP JP58062393A patent/JPS60259943A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008256516A (ja) * | 2007-04-04 | 2008-10-23 | Asmo Co Ltd | 水滴検出装置及び水滴制御装置 |
| JP2013096708A (ja) * | 2011-10-28 | 2013-05-20 | Hitachi Automotive Systems Ltd | 湿度検出装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2742902A1 (de) | 1978-08-03 |
| JPS60259943A (ja) | 1985-12-23 |
| US4143177A (en) | 1979-03-06 |
| FR2379069B1 (US20110232667A1-20110929-C00004.png) | 1980-08-08 |
| GB1593893A (en) | 1981-07-22 |
| DE2742902C2 (US20110232667A1-20110929-C00004.png) | 1988-03-10 |
| CA1101068A (en) | 1981-05-12 |
| GB1593894A (en) | 1981-07-22 |
| DE2759989A1 (US20110232667A1-20110929-C00004.png) | 1982-09-23 |
| DE2759989C2 (de) | 1986-01-30 |
| JPS5396891A (en) | 1978-08-24 |
| IT1091288B (it) | 1985-07-06 |
| FR2379069A1 (fr) | 1978-08-25 |
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