FR2379069A1 - Procedes de fabrication de capteurs de mesure de l'humidite absolue - Google Patents

Procedes de fabrication de capteurs de mesure de l'humidite absolue

Info

Publication number
FR2379069A1
FR2379069A1 FR7732931A FR7732931A FR2379069A1 FR 2379069 A1 FR2379069 A1 FR 2379069A1 FR 7732931 A FR7732931 A FR 7732931A FR 7732931 A FR7732931 A FR 7732931A FR 2379069 A1 FR2379069 A1 FR 2379069A1
Authority
FR
France
Prior art keywords
methods
absolute humidity
humidity sensors
layer
smooth surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7732931A
Other languages
English (en)
Other versions
FR2379069B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panametrics LLC
Original Assignee
Panametrics LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panametrics LLC filed Critical Panametrics LLC
Publication of FR2379069A1 publication Critical patent/FR2379069A1/fr
Application granted granted Critical
Publication of FR2379069B1 publication Critical patent/FR2379069B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K13/00—Thermometers specially adapted for specific purposes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Health & Medical Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Electrochemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Non-Adjustable Resistors (AREA)

Abstract

La présente invention concerne des capteurs de mesure de l'humidité et leurs procédés de fabrication. Un tel procédé consiste à produire une plaquette de silicium avec une première surface lisse à l'échelle microscopique et à traiter ladite plaquette dans le but de faire croître une couche d'oxyde SiO2 sur ladite première surface lisse à l'échelle microscopique, cette couche d oxyde SiO2 ayant une seconde surface lisse à l'échelle microscopique, à découvert, sur laquelle on fait croître une couche d'aluminium. Application à la mesure de l'humidité absolue.
FR7732931A 1977-01-31 1977-11-02 Procedes de fabrication de capteurs de mesure de l'humidite absolue Granted FR2379069A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/764,394 US4143177A (en) 1977-01-31 1977-01-31 Absolute humidity sensors and methods of manufacturing humidity sensors

Publications (2)

Publication Number Publication Date
FR2379069A1 true FR2379069A1 (fr) 1978-08-25
FR2379069B1 FR2379069B1 (fr) 1980-08-08

Family

ID=25070605

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7732931A Granted FR2379069A1 (fr) 1977-01-31 1977-11-02 Procedes de fabrication de capteurs de mesure de l'humidite absolue

Country Status (7)

Country Link
US (1) US4143177A (fr)
JP (2) JPS5396891A (fr)
CA (1) CA1101068A (fr)
DE (2) DE2742902A1 (fr)
FR (1) FR2379069A1 (fr)
GB (2) GB1593893A (fr)
IT (1) IT1091288B (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2470382A1 (fr) * 1979-11-22 1981-05-29 Philips Nv Procede de realisation de palpeurs d'humidite
FR2544498A1 (fr) * 1983-04-12 1984-10-19 Endress Hauser Gmbh Co Detecteur d'humidite a couche mince pour mesurer l'humidite absolue et procede pour sa fabrication

Families Citing this family (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4203087A (en) * 1977-01-31 1980-05-13 Panametrics, Inc. Absolute humidity sensors and methods of manufacturing humidity sensors
US4347550A (en) * 1977-12-22 1982-08-31 Peter Rockliff Sensor detector element for an electrical hygrometer
US4272986A (en) * 1979-04-16 1981-06-16 Harris Corporation Method and means for measuring moisture content of hermetic semiconductor devices
US4288775A (en) * 1979-11-09 1981-09-08 Bennewitz Paul F Device and method of manufacturing a relative humidity sensor and temperature sensor
DE2947050C2 (de) * 1979-11-22 1992-11-26 Karoly Dr. 4600 Dortmund Dobos Anordnung zum Nachweis von Ionen, Atomen und Molekülen in Gasen oder Lösungen
DE3024297C2 (de) * 1980-06-27 1985-08-14 Endress U. Hauser Gmbh U. Co, 7867 Maulburg Kapazitiver Feuchtigkeitsfühler und Verfahren zum Herstellen seiner feuchtigkeitsempfindlichen Schicht
US4379406A (en) * 1980-09-25 1983-04-12 Bennewitz Paul F Relative humidity detector systems and method of increasing the calibration period of relative humidity detector systems
US4337658A (en) * 1980-10-14 1982-07-06 Honeywell Inc. Humidity sensor
US4356150A (en) * 1981-05-15 1982-10-26 Honeywell Inc. Humidity sensor with electrical rejection of contaminants
JPS58169052A (ja) * 1982-03-31 1983-10-05 Toshiba Corp 感ガス素子
JPS59167879U (ja) * 1983-04-26 1984-11-10 中部工機株式会社 溝蓋
DE3440351A1 (de) * 1983-12-12 1985-06-20 Voest-Alpine Ag, Linz Feuchtigkeitssensor und verfahren zu dessen herstellung
JPS60140609A (ja) * 1983-12-27 1985-07-25 シャープ株式会社 透湿性導電膜の製造方法
JPS60239657A (ja) * 1984-05-15 1985-11-28 Sharp Corp 感湿素子及びその製造方法
US4662220A (en) * 1985-06-20 1987-05-05 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Water-absorbing capacitor system for measuring relative humidity
JPH0810202B2 (ja) * 1986-08-06 1996-01-31 朝安 中野 ガス検知方法
JPH0810203B2 (ja) * 1987-03-27 1996-01-31 朝安 中野 ガス検知方法
US4793182A (en) * 1987-06-02 1988-12-27 Djorup Robert Sonny Constant temperature hygrometer
US4793181A (en) * 1987-06-02 1988-12-27 Djorup Robert Sonny Constant temperature sorption hygrometer
US4858063A (en) * 1987-12-31 1989-08-15 California Institute Of Technology Spiral configuration of electrodes and dielectric material for sensing an environmental property
US5001453A (en) * 1988-06-27 1991-03-19 Seiko Epson Corporation Humidity sensor
JPH02150754A (ja) * 1988-11-30 1990-06-11 Toshiba Corp 感応素子の製造方法
US5597738A (en) * 1993-12-03 1997-01-28 Kulite Semiconductor Products, Inc. Method for forming isolated CMOS structures on SOI structures
JP3067010B2 (ja) * 1994-02-09 2000-07-17 ティーディーケイ株式会社 絶対湿度センサ
CN1037041C (zh) * 1994-07-16 1998-01-14 东南大学 金属－氧化物－半导体结构电容式湿敏器件及其制造方法
US5792938A (en) * 1996-12-13 1998-08-11 Panametrics, Inc. Humidity sensor with differential thermal detection and method of sensing
US5844125A (en) * 1997-10-01 1998-12-01 Millipore Corporation Method and apparatus for measuring moisture content in a gas
US6895803B2 (en) 2000-10-20 2005-05-24 Fisher & Paykel Healthcare Limited Humidity sensor
DE10149333B4 (de) * 2001-10-06 2007-06-28 Robert Bosch Gmbh Sensorvorrichtung zur Messung der Feuchtigkeit von Gasen
DE10164911B4 (de) * 2001-10-06 2007-07-05 Robert Bosch Gmbh Sensorvorrichtung zur Messung einer Komponente eines Gasgemisches
JP3847162B2 (ja) * 2001-12-21 2006-11-15 本田技研工業株式会社 湿度センサの温度制御装置
US20050247106A1 (en) * 2004-05-06 2005-11-10 Honeywell International, Inc. Relative humidity sensor enclosed with ceramic heater
US7021124B2 (en) * 2004-08-27 2006-04-04 International Business Machines Corporation Method and apparatus for detecting leaks in a fluid cooling system
JP5112639B2 (ja) * 2006-03-06 2013-01-09 トウプラスエンジニアリング株式会社 湿度センサ
JP2008256516A (ja) * 2007-04-04 2008-10-23 Asmo Co Ltd 水滴検出装置及び水滴制御装置
DE102009000315A1 (de) * 2009-01-20 2010-08-19 Robert Bosch Gmbh Flüssigkeitssensor
JP5913906B2 (ja) * 2011-10-28 2016-04-27 日立オートモティブシステムズ株式会社 湿度検出装置
US8739623B2 (en) 2012-03-09 2014-06-03 The University Of Kentucky Research Foundation Moisture sensors on conductive substrates
CN102865938B (zh) * 2012-09-07 2014-02-19 清华大学 热电偶及其形成方法
US9285334B2 (en) 2013-06-06 2016-03-15 Zhi David Chen Hybrid dielectric moisture sensors
GB2519110B (en) * 2013-10-09 2018-04-18 Nokia Technologies Oy An apparatus and associated methods for analyte detection
TWM569412U (zh) * 2018-08-07 2018-11-01 捷騰光電股份有限公司 溫濕度感測模組之烘乾裝置
JP2021092453A (ja) * 2019-12-11 2021-06-17 ミネベアミツミ株式会社 湿度センサ
KR102438554B1 (ko) * 2020-03-26 2022-08-31 (주)씨엠테크 멸균장치 및 상기 멸균장치의 과산화수소 농도 측정방법

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3121853A (en) * 1958-08-29 1964-02-18 Torry Res Station Hygrometric elements
US3574681A (en) * 1966-03-31 1971-04-13 Texas Instruments Inc Aluminum oxide humidity sensor
US3523244A (en) * 1967-11-01 1970-08-04 Panametrics Device for measurement of absolute humidity
US3477055A (en) * 1967-12-22 1969-11-04 Gen Motors Corp Thermistor construction
US3681134A (en) * 1968-05-31 1972-08-01 Westinghouse Electric Corp Microelectronic conductor configurations and methods of making the same
US3622385A (en) * 1968-07-19 1971-11-23 Hughes Aircraft Co Method of providing flip-chip devices with solderable connections
US3751292A (en) * 1971-08-20 1973-08-07 Motorola Inc Multilayer metallization system
FR2160095A5 (fr) * 1971-11-10 1973-06-22 Omron Tateisi Electronics Co
DE2416179A1 (de) * 1974-04-03 1975-10-16 Bayer Ag Feuchte-messfuehler
US3987676A (en) * 1975-11-28 1976-10-26 Bennewitz Paul F Relative humidity detector

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2470382A1 (fr) * 1979-11-22 1981-05-29 Philips Nv Procede de realisation de palpeurs d'humidite
FR2544498A1 (fr) * 1983-04-12 1984-10-19 Endress Hauser Gmbh Co Detecteur d'humidite a couche mince pour mesurer l'humidite absolue et procede pour sa fabrication

Also Published As

Publication number Publication date
US4143177A (en) 1979-03-06
DE2759989C2 (de) 1986-01-30
JPS5396891A (en) 1978-08-24
JPS6350659B2 (fr) 1988-10-11
DE2742902A1 (de) 1978-08-03
IT1091288B (it) 1985-07-06
FR2379069B1 (fr) 1980-08-08
DE2759989A1 (fr) 1982-09-23
JPS60259943A (ja) 1985-12-23
CA1101068A (fr) 1981-05-12
GB1593893A (en) 1981-07-22
GB1593894A (en) 1981-07-22
DE2742902C2 (fr) 1988-03-10

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